This is an old revision of the document!
Now Anatech
BK intro to sputter coaters: https://www.youtube.com/watch?v=9OEz_e9C4KM
Suggested procedure: https://sbs.wsu.edu/fmic/protocol/Au%20Gold%20sputter%20coater.pdf
Claims to have a manual: https://wiki.pumpingstationone.org/Technics_Hummer_V_Sputter_Coater
JM unit: advert called it “Hummer II Sputter Coater for Au” although it doesn't actually say that anywhere on the machine
Have a bunch of internal photos. Will add them + better pictures once I finish overhauling it.
TODO:
DONE
General notes:
Source: “Technics Hummer VI Sputtering System”
Source Like above but its switched from being Technics to Anatech branded
Source: “Hummer 6.2 Sputter System - SEM Sample Preparation”
Source: “Hummer 6.6 Sputter System - SEM Sample Preparation”
Source: “ANATECH HUMMER 6.6T SPUTTER SYSTEM”
Website skips from 7 to 8. Never produced?
Notes from someone:
HUMMER VII NOTES DISPLAY PCB LED Short Lead to square Pad, Long Lead to Round Pad MAIN PCB CONNECTIONS J7 Pin 1 Common Red Pin 2 Current Monitor Green Pin 3 No Connection Pin 4 No Connection Pin 5 Relay Yellow Pin 6 Relay Brown Pin 7 Safety Interlock Black Pin 8 Current Program Orange J8 Pin 1 Analog Common Yellow Pin 2 No Connection Pin 3 No Connection Pin 4 No Connection Pin 5 Logic Common Black Pin 6 -12v Pin 7 +5v Red Pin 8 +12v Green J9 Pin 1 Pressure Switch Blue Pin 2 Pressure Switch Blue Pin 3 No Connection J5 Pin 1 Two Way Gas Solenoid White Pin 2 Two Way Gas Solenoid White Blue Pin 3 3-Way Vent Solenoid White Pin 4 3-Way Vent Solenoid White Connector J4 Pin 1 Pump Relay Green Pin 2 Pump Relay Yellow Pin 3 + Meter Red Pin 4 - Meter BlackON RELAY PCB J4 Pin 1 + Meter Red Pin 2 - Meter Black Pin 3 Pump Relay Green Pin 4 Pump Relay Yellow
Source: “Hummer 8.0 Sputter System - SEM Sample Preparation”
Source: “HUMMER X, Cold Deposition/Etch Sputter Coater”
Source: “Anatech Hummer XP”
Got from craigslist a while back, including gold source. A little dirty, but worked fine. Cleaned up front panel best I could
2018-08-07:
2018-08-08:
Got from industrial auction
2018-08-07:
2018-08-08:
glass tubing
Custom glass quotes
2018-08-09
2018-08-07: