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piranha_solution

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Produces Caro's Acid / Peroxymonosulfuric acid, can get same/better result typically by using that

“A typical mixture is 3:1 concentrated sulfuric acid to 30% hydrogen peroxide solution; other protocols may use a 4:1 or even 7:1 mixture” [Wikipedia]

Compatibility

Since its typical use is to remove organics, don't expect many organic things to survive. Sources always say to avoid plasitcs, unclear how fluorinated plastics do

“Piranha is compatible with teflon and borosilicate glass” [AMC]

Metals?

AZ etch rates from etch bible:

  • “Evaporated Al in piranha etches at >5200 nm/min”
  • “evaporated Cu at 88nm/min”
  • “spin-on polyimide >17,000 nm/min”
  • “Oxygen plasma eats polyimide at 370nm/min and is “slow or zero” for Cu/Al”

References

piranha_solution.1384671829.txt.gz · Last modified: 2013/11/17 07:03 by mcmaster