A list of scanning electron microscopes. Some dual beam FIBs are included for now but may eventually be moved to their own page

year reflects earliest reference to that SEM model. When one company has merged with another, the vendor name most associated with that microscope is listed (ie who designed or marketed the system as opposed to who owns the IP 20 years later)

assume list prices are non-inflation adjusted from around year SEM was offered

ask prices were from around 10/05/2013 unless otherwise noted

I've included ultra-high voltage SEMs as well

schematic column marked Yes if at least one schematic from the unit is available (original or reverse engineered)

Some units may be duplicated. When its ambiguous if two units are the same they get two separate rows until can be reasonably proven to be redundant

Image	Vendor	Model	Year	kV	Gun	Resolution (nm)	Features	List price	Ask price	Manual	Schem	SW	Notes
Source	Agilent	8500			FE								Tabletop Keysight?
	Amray	900 (AMR-900)	1969	30		10
Source	Amray	1000	197?
Source	Amray	1000A	197?			4
Source	Amray	1000B	197?		FE LaB6				8750
	Amray	1200B				5
	Amray	1200C							9900
	Amray	1400D
Source	Amray	1500FE	1989
Source	Amray	1600 Turbo				4
Source	Amray	1810	~1985
Source	Amray	1820	~1985
Source	Amray	1830	~1985			4 nm @ 30 kV
	Amray	1830D							7950
Source	Amray	1840FE	~1985
	Amray	1845FE				4 nm @ 1 kV 1.5 nm @ 25 kV
	Amray	1850
	Amray	1860FE	~1988		TFE	7 nm @ 1 kV 1.5 nm @ 25 kV			27,000
	Amray	1880FE	~1988	10?		2
	Amray	1910FE			FE	7 nm @ 1 kV 1.5 nm @ 30 kV
	Amray	2030L
	Amray	3200				6nm @ 30kV (LV) 4nm @ 30kV (HV)							4 torr max pressure
	Amray	3300FE			FE	5 nm @ 1.5 kV 1.5 nm @ 20 kV
Source	Amray	3800C
	Akashi	Mini-SEM MSM2	1972	15									[1970s]
	Akashi	Mini-Rapid-Scan	1973	15?									“slightly modified version of the Mini-SEM” [1970s]
	Bausch & Lomb	LE 2100							12950
	Ben Krasnow	BK-1?
	Cambridge	S-90
	Cambridge	S-100
	Cambridge	S-120
	Cambridge	S-200
	Cambridge	S-240
	Cambridge	S-250
	Cambridge	S-260
	Cambridge	S-360
	CEMES-LOE/CNRS		1965	3 MeV									[1960s]
	Delong Instruments	LVEM5
	ElectroScan (Phillips)	2020							999
	ElectroScan (Phillips)	E30							$7,000 used 10/05/2013				“Voltage: 208-220 VAC, 60 Hz, 30 Amps, 1 phase”
	ElectroScan (Phillips)	ESEM E3					ESEM		20,000
	Elionix	8900			FE	5 nm @ 1 kV 1.2 nm @ 30 kV
	FEI	ESEM Explorer	1992				ESEM						“up to 20 Torr” [1990s]
	FEI	ESEM Model 2020	1994				ESEM						“50 Torr in the sample chamber” [1990s]
	FEI	Nova NanoSEM 450								Yes
	FEI	Nova NanoSEM 650								Yes
	FEI	Quanta 450FEG								Yes
	Hitachi	?	1954	300									[1960s]
	Hitachi	H-1250	1976	1250		0.204							Successor to HU-3000 [1970s]
	Hitachi	H-1300S	1982	1300									“ based on ion radiation” [1980s]
	Hitachi	HFS-2	1972		FE	3							“first SEM to use a field emission gun as an electron source” [1970s]
	Hitachi	HSM-2A	1971	40		15	EDS, WDS						[1970s]
	Hitachi	HU-500	1964	500									[1960s]
	Hitachi	HU-650	1968	650									[1960s]
	Hitachi	HU-1000	1969	1000									[1960s]
	Hitachi	HU-3000	1970	3000		0.46							“accelerating voltage was the highest ever for an electron microscope” [1970s]
	Hitachi	S-450	1977										“samples up to 4 inches” [1970s]
	Hitachi	S-500	1975						6,500 refurbished 10/05/2013				“two 8 inch CRT displays, and featured automatic recording of image data (including magnification, acceleration voltage, and film number) directly on the micrograph” [1970s]
	Hitachi	S-510					EDX						ref
	Hitachi	S-520							8950
	Hitachi	S-530							9500
	Hitachi	S-570							4,900 non-working 10/05/2013		Yes		“As an option the S-570 is available with LaB6 gun for large probe currents and low voltage applications” ref
	Hitachi	S-800							$6,700 used 10/05/2013		Yes		ref
	Hitachi	S-806											“uses a cold field emitter as electron gun” ref
	Hitachi	S-806C
	Hitachi	S-2100
	Hitachi	S-2300					WDX, EDX		$4,999 non-working 10/05/2013		Yes		ref
	Hitachi	S-2400
	Hitachi	S-2460N									Yes
	Hitachi	S-2500
	Hitachi	S-2600N/H									Yes
	Hitachi	S-2700
	Hitachi	S-3000
	Hitachi	S-3000N/H									Yes
	Hitachi	S-3200H				3nm @ 30kV
	Hitachi	S-3200N								Yes
	Hitachi	S-3500N/H									Yes
	Hitachi	S-4000									Yes
	Hitachi	S-4100
	Hitachi	S-4200			FE	5 nm @ 1 kV 1.6 nm @ 15 kV
	Hitachi	S-4500									Yes
	Hitachi	S-4700									Yes
	Hitachi	S-4700-II							160,000
	Hitachi	S-4800								Yes
	Hitachi	S-5200									Yes
	Hitachi	S-6000
	Hitachi	S-6100
	Hitachi	S-6200
	Hitachi	S-6280H											ref
	Hitachi	S-6600
	Hitachi	S-6780							10,000
	Hitachi	S-7000
	Hitachi	S-9300							8,000 column only				ref
	Hitachi	SU-1500
	Hitachi	SU-8010
	Hitachi	SU-8020
	Hitachi	SU-8030
	Hitachi	SU-8040
	Hitachi	XMA-5b	1966										“Hitachi called its 1966 XMA-5b an “EPMA with SEM.” This was more of an electron probe microanalyzer than an SEM, and was most likely Hitachi's attempt to quickly join in the SEM business” [1960s]
Source: [TNTech MSE]	ISI	SR50
Source: [UMT EA]	ISI	CL-6
Source: [DS130 DS130]	ISI	DS130
Source: [dtradingpost ISI-40]	ISI	ISI-40
	ISI	ISI-100	1977	25?	LAB6	10?							“could handle 4-inch-diameter specimens” [1970s]
Source: [PTLI ISI-SS40]	ISI	ISI-SS40
	ISI	ISI-60	1979					<$30,000 (1979) [isi research advert]					Advert lists it as new the same time as the Super IIIA and I know the Super IIIA was around 1979
Source: [AMS SEM]	ISI	ISI-SS60
Source: private e-mail	ISI	M-7											Very hard to find info on this unit
Source: [OSU MINISEM1]	ISI	MSM-2	1973			30		$17,000					Tabletop [OSU MINISEM1]
	ISI	Super-Mini-SEM 1 (SMS-1)	1974	25		10					Yes		“could accommodate samples up to 32 mm in diameter” [1970s]
	ISI	Super-Mini-SEM 2 (SMS-2)	1975	25?		10?					Yes		“increased the sample chamber size to 3 inches in diameter”[1970s] JM may have partial or full schematic
	ISI	Super-Mini-SEM (SMS-3A) “Super III A”	~1980	30	WHP	7		<$30,000 (1979) [isi research advert]		Yes	Yes		ref
Source: [Virago]	ISI	SX30											[Virago]
Source: [equipmatching]	ISI	SX-40			30	6				Yes			Thanks to Nathalie Renevier for the user manual! Specifications on page 67
		SX-60											Mentioned on ds130 website but I can't find any other references to this model
	ISI	TV Mini-SEM (TV-MSM) Schematic: MRS-2	1976								Yes		Noisebridge unit Year based off of schematic date
Source: [eBay 231289327125]	ISI	WB-6
	JEOL	ClairScope JASM-6200				W/8nm (30kV)							Atmospheric
	JEOL	JAMP-10
	JEOL	JEM-100S							14999 20,000				[1960s]
	JEOL	JEM-ARM-1000	1983	1000									“one-of-a-kind Ultrahigh Voltage EM for the Lawrence Berkeley Laboratories in California, where scientists were interested in atomic resolution” [1980s]
	JEOL	JFSM-30	1974		FE	3							[1970s]
	JEOL	JRSM-50A	1973										“hot stage for examining samples at elevated temperatures” [1970s]
	JEOL	JSM-1		50		50							[1960s]
	JEOL	JSM-2		50									[1960s]
	JEOL	JSM-U		50									[1960s]
	JEOL	JSM-35CF							4,900 used 10/05/2013
	JEOL	JSM-35CFS	1982/3?										[1980s]
	JEOL	JSM-820
	JEOL	JSM-840	1982/3?			3			3900				“best i've gotten out of it was resolving ~60nm colloidal silica particles” [az] year: [1980s]
	JEOL	JSM-5200							18950
	JEOL	JSM-5400
	JEOL	JSM-5800
	JEOL	JSM-5900							6000
	JEOL	JSM-5900LV				3nm @ 30kV (SEI) 5nm @30kV (BEI)
	JEOL	JSM-5910
	JEOL	JSM-6100							10,000
	JEOL	JSM-6300LV
	JEOL	JSM-6300F			CFE	1.5 nm @ 30 kV
	JEOL	JSM-6300V							9500
	JEOL	JSM-6340F			CFE	2.5 nm @ 1 kV 1.2 nm @ 20 kV
	JEOL	JSM-6400							10,000 11,000
	JEOL	JSM-6010LA InTouchScop				HV: 4nm @ 20kV (SE) LV: 5nm @ 20kV (BSE)
	JEOL	JSM-6510				LV: 3nm @ 30kV (SE)
	JEOL	JSM-6510LV				HV: 3nm @ 30kV (SE) LV: 4nm @ 30kV (BSE)
	JEOL	JSM-7100F				1.2nm at 30kV
	JEOL	JSM-7500F				x 25 to 1,000,000 (printed as a 120mm x 90mm micrograph)
	JEOL	JSM-7610F				1.0 nm (15 kV), 0.6 nm (30 kV) attainable in STEM
	JEOL	JSM-7800F				1.0nm at 15kV, 0.8nm at 15kV, GB mode
	JEOL	JSM-IC25S	1970's										[1970s]
	JEOL	JSM-IC845	1982/3?										“capable of holding 6 inch semiconductor wafers” [1980s]
	JEOL	JSM-IC848	1982/3?										“cold handle 9 inch wafers” [1980s]
	JEOL	JSM IC-848A							6,000 used 10/05/2013
	JEOL	JSM-IT300LV				HV: 3nm @ 30kV (SE) LV: 4nm @ 30kV (BSE)
	JEOL	JSM-T20							828
	JEOL	JSM-T200							12,000
	JEOL	JSM-T220	1986										“auto-stigmator and auto-focus” [1980s]
	JEOL	JSM-T330	1986										“auto-stigmator and auto-focus” [1980s]
	JEOL	JSM-T330A							link
	JEOL	JSM-U3		50		20							[1960s]
	JEOL	NeoScope Benchtop SEM				"10X to 60,000X (printed as a 128mm x 96mm micrograph)"							Benchtop
	JEOL	T-200
	JEOL	T-300
	Leica Cambridge	S 360FE							5000
	Leica Cambridge	260							15,000
	Leica Cambridge	Stereoscan 150u	1978			7 [manual]			5,000 on craigslist
	Leica Cambridge	Stereoscan 240							7395
	Leica Cambridge	Stereoscan 430								Yes
	Leica Cambridge	Stereoscan 440								Yes
	Leo	435VP				4nm @ 30kV (HV)
	Leo	1530								Yes
	Leo	1550
	Phillips	FEG XL 40					EDAX		100,000
	Phillips	501	1977	30		7							[1970s]
	Phillips	501B	1979	30?		7?	EDS, WDS						[1970s]
	Phillips	SEM 505	1980										“new doped-yttrium silicate scintillator for the detection of backscattered electrons in its 1980 model SEM 505; this new detector was 200 times more sensitive to backscattered electrons than previous scintillators” [1980s]
	Phillips	SEM 515	1984										“improved on the 505 by adding computer-controlled automatic focussing and astigmation correction” [1980s]
	Phillips	SEM 525 EB	1985										“created for functional testing of ICs” [1980s]
	Phillips	SEM 525 IC	1985										“designed for the non-destructive testing of semiconductor wafers” [1980s]
	Phillips	EM 300 accessory	1968										“attachment turned the TEM into an STEM” [1960s]
	Phillips	PSEM 500	1972	50		10							“Philips' first SEM” [1970s]
	Phillips	PSEM 500M	1973	50?		10?							“designed for larger samples, accommodating specimens with dimensions of 153 mm x 146 mm x 84 mm” [1970s]
	Phillips	XL-30			W	3.5nm @ 30kV
	RCA	EMU-3							275,000 for EMU-3/4 (way overpriced?)
	RCA	EMU-4							275,000 for EMU-3/4 (way overpriced?)
	SEC	SNE-1500M								Yes			Tabletop
	SEC	SNE-3000M											Tabletop
	SEC	SNE-3000MB											Tabletop
	SEC	SNE-3200M											Tabletop
	SEC	SNE-4500M											Tabletop
	Seron	AIS2100C
	Seron	AIS2200
	Seron	AIS2300C
	Tescan	VEGA3								Yes
	Topcon	ABT-32				5
	Topcon	ABT-60				4
	Topcon	ABT-150
	Topcon	SM-720				0.9
	Zeiss	DSM 960							link
	Zeiss	NEON 40 EsB			FE	2.5 nm @ 1 kV							“Canion FIB column”
	Zeiss	SIGMA								Yes
	Zeiss	Supra 55VP			FE	1.7 nm @ 1 kV 2 nm @ 30 kV (VP)

Where:

• Gun type
  • WHP: tungsten hairpin
  • CFE: cold field emission
  • TFE: thermally assisted field emission

Misc notes:

• “1990s…Carl Zeiss and Leica joined to form LEO Electron Microscopy, Inc” [1990s]
• “1996 Philips bought Electroscan…to form Philips Electroscan” [1990s]
• 1997: “Philips Electron Optics and a company called FEI merged under the name FEI” [1990s]

List of privately owned SEMs (ie die hard SEMolites that we could probably collaborate with):

• McMaster ISI Super III A
• Noisebridge ISI TV Mini SEM
• lapointe2 ISI Super III A
• Ben Krasnow DIY SEM
• SCIFIaction: Our living room Scanning Electron Microscope (SEM)
  • Main site: http://www.sciencephotography.com/
• Jeri Ellsworth: Video showing my electron microscope in action
  • Complete/working Amray 1800 + some of Cambridge and ASI SEM's
• This guy is trying to get rid of his Amray</font> 1610T </font> as of May 2013
• bbandli JEOL JSM-6490LV
• DC: Philips XL30
• Sascha: Super IIIA
• Markus: Aspex PSEM
• Pumping station 1 (Leica Cambridge Stereoscan 430?)

• Might be interesting read and/or get in contact with them: http://blog.lib.umn.edu/bbandli/semlablog/
• Electron microscopy in the…
• Electron microscopy in the 1960s: http://authors.library.caltech.edu/5456/1/hrst.mit.edu/hrs/materials/public/ElectronMicroscope/EM1960s.htm
• Electron microscopy in the 1970s: http://authors.library.caltech.edu/5456/1/hrst.mit.edu/hrs/materials/public/ElectronMicroscope/EM1970s.htm
• Electron microscopy in the 1980s: http://authors.library.caltech.edu/5456/1/hrst.mit.edu/hrs/materials/public/ElectronMicroscope/EM1980s.htm
• Electron microscopy in the 1990s: http://authors.library.caltech.edu/5456/1/hrst.mit.edu/hrs/materials/public/ElectronMicroscope/EM1990s.htm
• ISI research advert: http://webcache.googleusercontent.com/search?q=cache:PzDd1oLzlawJ:cdn-pubs.acs.org/doi/pdfplus/10.1021/ac50015a716+&cd=18&hl=en&ct=clnk&gl=us&client=ubuntu
• OSU MINISEM1: http://www.science.oregonstate.edu/emfacility/?q=node/History/EM/MINISEM1
• Virago: http://www.drviragopete.com/scanning-electron-microscope.php
• DS130
  • DS130: http://ds130.com/ds130.htm
• United Material Technologies, LLC. Equipment Analytical [UMT EA]: http://www.unitedmt.com/equipment_analytical.htm
• Taking apart the controls of a scanning electron microscope [AMS SEM]: http://amymakesstuff.com/2011/06/29/taking-apart-the-controls-of-a-scanning-electron-microscope/
• Complete ISI Model 40 Scanning Electron Microscope ( SEM ) [dtradingpost ISI-40]: http://dtradingpost.com/isi40qte.htm
• PTLI ISI-SS40: http://www.ptli.com/testlopedia/tests/sem.asp
• Microanalysis In Science and Engineering [TNTech MSE]: http://www.cae.tntech.edu/~jbiernacki/nsfteacherworkshop.htm
• eBay 231289327125: product4you80, “Set of ISI Scanning Electron Microscopes WB-6 w/ manual and accessories”
• equipmatching: http://www.equipmatching.com/used_equipment/4/62/327603.php
• http://www.semtechsolutions.com/sites/default/files/2010-SEM-List.pdf