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microscope:sem:p-z

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Image Vendor Model Year kV Gun Resolution (nm) Features List price Ask price Manual Schem SW Notes
Phillips FEG XL 40 EDAX 100,000
Phillips 501 1977 30 7 [1970s]
Phillips 501B 1979 30? 7? EDS, WDS [1970s]
Phillips SEM 505 1980 “new doped-yttrium silicate scintillator for the detection of backscattered electrons in its 1980 model SEM 505; this new detector was 200 times more sensitive to backscattered electrons than previous scintillators” [1980s]
Phillips SEM 515 1984 “improved on the 505 by adding computer-controlled automatic focussing and astigmation correction” [1980s]
Phillips SEM 525 EB 1985 “created for functional testing of ICs” [1980s]
Phillips SEM 525 IC 1985 “designed for the non-destructive testing of semiconductor wafers” [1980s]
Phillips EM 300 accessory 1968 “attachment turned the TEM into an STEM” [1960s]
Phillips PSEM 500 1972 50 10 “Philips' first SEM” [1970s]
Phillips PSEM 500M 1973 50? 10? “designed for larger samples, accommodating specimens with dimensions of 153 mm x 146 mm x 84 mm” [1970s]
dc_sem.jpg Phillips XL-30 W 3.5nm @ 30kV
RCA EMU-3 275,000 for EMU-3/4 (way overpriced?)
RCA EMU-4 275,000 for EMU-3/4 (way overpriced?)
SEC SNE-1500M Yes Tabletop
SEC SNE-3000M Tabletop
SEC SNE-3000MB Tabletop
SEC SNE-3200M Tabletop
SEC SNE-4500M Tabletop
Seron AIS2100C
Seron AIS2200
Seron AIS2300C
Tescan VEGA3 Yes
Topcon ABT-32 5
Topcon ABT-60 4
Topcon ABT-150
Topcon SM-720 0.9
Zeiss DSM 960 link
Zeiss NEON 40 EsB FE 2.5 nm @ 1 kV “Canion FIB column”
Zeiss SIGMA Yes
Zeiss Supra 55VP FE
1.7 nm @ 1 kV

2 nm @ 30 kV (VP)
microscope/sem/p-z.1407698102.txt.gz · Last modified: 2014/08/10 19:15 by mcmaster