Given the quality of this system and how much I bid to get other systems, this system has been surprisingly low cost to build.

Combining parts into a working high quality system composed of:

210 mm optics

Came mostly complete save objectives. Got a Nikon BD Plan 20x objective off of eBay but unfortunately its scratched a little :(. Might not hurt image quality too much though.

Above: system at auction. Trivia: the CRT said Micron Technology on it…must have come from them

Intended to be a mask aligner. Infinity system

Very heavy! Estimate 700 lbs

Came as a complete system minus control system:

• Mercury burner w/ PS
• Fiber illuminator w/ PS
• Nikon CF Plan objectives (4). Something like % * 5x
  • 10x
  • 20x
  • 100x
• TMC pneumatic anti-vibration table
• Motorized servo XY table
• Motorized Z axis (course focus)
• Piezo Z axis (fine focus)

This page is about piecing it together to try to get it working again

It came with a very small subsection of the user man. I was able to contact Zygo and get some more info

Dataplate:

Technical Instrument Company
650 North Mary Avenue
Sunyvale, CA 94086-2906
Model: KMS310RT
Serial No: XXX
Assembly No: 015-00007-AA
Manufacturered: TIC
THIS PRODUCT CONFORMS TO 21 CFR
1040 AT DATE OF MANUFACTURE

TMS300 or something

Had a neutral density filter rattling around when I got it. Have not looked to see where it came from. Have not tried spinning it up

Mercury burner: HB-10103AF

Technical Instrument Company
650 North Mary Avenue
Sunnyvale, CA 94086-2906
Model: K2IND-KMS310
Serial No: 9635-3235
Assembly No: 200-00013-AJ
Manufactured: August 1996

Above: Zygo electronics overview

Have this sort of working using Gecko drive but not very well

Motor: Harmonic Drive “HiT Drive SERVO ACTUATOR, RH-11-6001-E100DO5”

• Encoder (sold with motor): ENCODER-02A 1000P /R

Website decoding of RH-11-6001-E100DO5:

• RH Type: RH mini series
• 11 size 11
• 60 Output shaft rated rotational speed (r/min) 60 r/min
• 01 Rated output (W) x10 10 W
• E incremental encoder
• 100 encoder resolution 1000p/r
• D Encoder power supply 5-12
  • Case says 5V
• O: open collector
  • aha!
• 5: ?
  • Not a special suffix
  • indicates 5V operation?

Cover removed:

Glass rotary encoder with open drain outputs.

I opened this up because I was having trouble getting signal (2014-09-29) and thought it might have been broken. Now I know it was just an open drain vs actively driven issue.

Above: troubleshooting encoder signals

When I asked Gecko about my linear encoders they didn't seem that familiar with them (which seems a bit odd but w/e). In any case, they recommended the follow qudrature encoders:

• CUI AMT102-V
• US Digital quadrature encoder

Motor: FRAULHABER

MOTOREN
22BK 40.5:1

“super high pressure mercury”

Model: Nikon LH-M100CB-1

Use bulb: USH-102DH

Removed, but would be nice to get it working at some point

PHYSIK INSTRUMENTE (PI)

Type: P-960.00 Polarity: +

Serial-No. XXX

DC servo system with glass linear encoders. Switched out for stepper system for quicker bring up but might eventually put it back on

Motor: voltage/current/inductance?

QUALITY MOTION CONTROL
PART NO. 2241-M2608
SERIAL NO. 177
DATE CODE 9606
CUST NO.
REV. LEVEL

linear encoder

RSK
Type MSA6703
Nr.034-042815 01003 Spec.939
F08 Int. 10 um RI-Code02U +5V

XY stepper motors and a reasonably heavy duty (not as heavy duty as the Zygo) manual Z axis.

I believe this was from a K2 IND, or at least something very similar. The XY stage (and maybe z too) footprint is compatible with the disposition services unit

At the time I didn't have a use for it but bought it on speculation since it was pretty inexpensive (about $120 total IIRC)

Manual

Motor

Model: M57-102
Serial: 27852
Code: 

Driver

COMPUMOTOR
CORPORATION
Model: M57-102
Serial: 27852
Code: A

Control cable is a DB-9 to funky female connector

Currently unused, in storage

Above: standard K2 IND next to the KMS310RT

Above: both Disposition Services stages during the swap. The servo system baseplate is 3.5“ thick (!) and the stepper system is “only” 1.9” thick.

• K2 IND manual
• KMS 300 user guide appendix A: calibration procedures
  • The only documentation that came with it…where did the rest go…
• Zygo KMS-310/400 Operator's Manual
• Zygo KMS-310/400 Supervisor's Manual