Above: photo from eBay listing

210 mm optics

Came mostly complete save objectives. Got a Nikon BD Plan 20x objective off of eBay but unfortunately its scratched a little :(. Might not hurt image quality too much though.

Above: system at auction. Trivia: the CRT said Micron Technology on it…must have come from them

Intended to be a mask aligner. Infinity system. I believe this is sold by Zygo with major components from Technical Instruments and Nikon.

Very heavy! Estimate 700 lbs

Came as a complete system minus control system:

• Mercury burner w/ PS
• Fiber illuminator w/ PS
• Nikon CF Plan objectives (4). Something like % * 5x
  • 10x
  • 20x
  • 100x
• TMC pneumatic anti-vibration table
• Motorized servo XY table
• Motorized Z axis (course focus)
• Piezo Z axis (fine focus)

This page is about piecing it together to try to get it working again

It came with a very small subsection of the user man. I was able to contact Zygo and get some more info

Dataplate:

Technical Instrument Company
650 North Mary Avenue
Sunyvale, CA 94086-2906
Model: KMS310RT
Serial No: XXX
Assembly No: 015-00007-AA
Manufacturered: TIC
THIS PRODUCT CONFORMS TO 21 CFR
1040 AT DATE OF MANUFACTURE

Detailed teardown

TMS300 or something

Had a neutral density filter rattling around when I got it. Have not looked to see where it came from. Have not tried spinning it up

Mercury burner: HB-10103AF

Technical Instrument Company
650 North Mary Avenue
Sunnyvale, CA 94086-2906
Model: K2IND-KMS310
Serial No: 9635-3235
Assembly No: 200-00013-AJ
Manufactured: August 1996

Removed, but would be nice to get it working at some point

PHYSIK INSTRUMENTE (PI)

Type: P-960.00 Polarity: +

Serial-No. XXX

DC servo system with glass linear encoders. Switched out for stepper system for quicker bring up but might eventually put it back on

Motor: voltage/current/inductance?

QUALITY MOTION CONTROL
PART NO. 2241-M2608
SERIAL NO. 177
DATE CODE 9606
CUST NO.
REV. LEVEL

linear encoder

RSK
Type MSA6703
Nr.034-042815 01003 Spec.939
F08 Int. 10 um RI-Code02U +5V

XY stepper motors and a reasonably heavy duty (not as heavy duty as the Zygo) manual Z axis.

I believe this was from a K2 IND, or at least something very similar. The XY stage (and maybe z too) footprint is compatible with the disposition services unit

At the time I didn't have a use for it but bought it on speculation since it was pretty inexpensive (about $120 total IIRC)

Currently unused, in storage

Above: standard K2 IND next to the KMS310RT

Above: both Disposition Services stages during the swap. The servo system baseplate is 3.5“ thick (!) and the stepper system is “only” 1.9” thick.

• K2 IND manual
• KMS 300 user guide appendix A: calibration procedures
  • The only documentation that came with it…where did the rest go…
• Zygo KMS-310/400 Operator's Manual
• Zygo KMS-310/400 Supervisor's Manual