The following issues have been noted:

• EZLAZE: PS missing
• XY stage: missing X motor and maybe some related brackets
• FS-60: possibly missing part…fine focusing knob?
• FS-60: focusing knob fell off (during shipping I think)
• Broken e-stop wire (from dissassembly?)
• Misc rusted screws. Rust has not been found on anything critical

NEW WAVE
RESEARCH
MODEL EZLAZE 532/355
SER NO XXX
DATE OCTOBER 2000
MADE IN USA
US Patent 5,611,946

Power supply missing

Above: power supply this unit should take [eBay ntxsupply item 151675355993]

Genwac
GW-202B

Mituotyo Finescope, likely FS-60

Above: focus knob

Above: likely motorized stage power/control connector

For doing optical emission analysis. Also good to block out dust in my dusty garage

Above: misc cables hanging out of the hood going to the various electronics inside

Removed hood to move to proper table and overhaul control system. Notes:

• ezlaze is not water cooled
• water cooling is for chuck
• BNC connector bent
  • From move?
• CPC for thermal chuck (not motors)
• Motors are synchronous stepping
  • Replacing with IMS NEMA 23

IMS MDM1FSD23A7

NEMA 23

“These are 90 oz/in”

Closest match: step/direction input version

• Datasheet
• Spec sheet
• MDMXXX174
• MDrive 17 Plus step and direction input
• SPI

Y axis test

Open question: do I need the programming cable?

• I think I have one

Initial current draw 50 mA. Holding torque is not very good; slightly above off level. Spikes to around 80 mA at startup

BBB: mk-test. Verified powers up

changes 10 mA (min PS resolution) when try to move. Time to play with settings cable

Cable: MD-CC4 USB to RS422 Comm Converter

Unfortunately:

The MDrive microstepping integrated motor and driver use the Serial
Peripheral Interface (SPI) to configure the setup parameters.

Use bus pirate or beagle

Decided to try one last time to see if I could move motors before messing with programming cables.

Hooked up a test motor without any shaft load. Spins fine and has reasonable torque.

Hooked Y2 axis back up and was able to move it just fine. Issues yesterday evidently were just due to shoddy wiring

Conclusion: don't need programming cable. Default settings seem to be good enough for now

Also validates that motors are good enough. Need to get 1-2 more for XY1. Wait until I take it apart to verify clearances etc?

X2 motor won't fit:

• original: 2.0“
• max: 2.2”
• mine: 2.7“ (official IMS docs list Lmax: 2.65”)

Looked around and it looks like its going to be difficult to find any motors with integrated drivers at this constrained size. Min length from vendors:

• IMS: 2.65“
• linengineering: 2.69”
• anaheimautomation: 2.98“

Time to see if I can make these motors work. I have some reasonably compact standalone IMS drivers (by coincidence also IMS) I can try to use

http://www.cnczone.com/forums/stepper-motors-drives/15273-slo-syn-motor-wiring-info.html

• 4 wire motors are bipolar
• 5 wire motors are unipolar
• 6 or 8 wire motors can be wired either way

Mine: 6 wire

• Red
• White-red
• Green
• White-green
• White
• Black

In stock:

• 3x IMS INT-481
• 4x Compumotor OEM650

Briefly poked at things. Current plan:

• Try to use original motors. This is combination of tight clearance in X2 combined with advantages of using existing wiring harness in X1/Y1
• See if I can get INT-481 to work with the slo-syn motors?
  • A fourth INT-481 may cost $100
• This makes OEM650 more attractive since I have more of them
  • They are slightly bigger but also easier to mount
• Z1 axis is a NEMA 34 motor. Does not appear to be a slo-syn. Maybe compumotor
  • Low priority
• Make a schematic
• Fix e-stop loose wire (after schematic to better understand where it should go)

Working on schematic

Electrical:

• (STAGE): 25×2 0.1” male IDC
• T/C: type K thermocouple plug
• HEATER: 4 pin CPC twist lock

Pnematic:

• VACUUM
• STAGE IN
• STAGE OUT
• RING IN
• RING OUT

What is RING?

Main board: J2

Breakout board: Y

I did not pin this out directly since I don't need to interface it directly

Connectors:

Main board: J3

Breakout board: Y

Dataplate:

Superior Electric

SLO-SYN

SYNCHRONOUS/STEPPING MOTOR

TYPE: M061-LS02

OZ. IN: HOLD 60

RPM: SPEC BM101025

STEPS: 200

V: 5.0

A: 1.0

HZ: DC

CLASS A INSULATION

IMPEDANCE PROTECTED

X1 is probably identical

With breakout board rightside up pin 1 is at P2 right (on silkscreen)

ASSY A1003958

has following connectors:

• Y : “Y ribbon cable”
  • Upper right pin 1: on silkscreen and agrees with convention I was already using
  • Both X and Y board have label Y
• P1: N/C. Ignore for now?
• P2: motor. Has thicker traces
• P3: limit switches?

All are N/C

to heater connector

Goes to large loose brown connector near wafer chuck

Goes to t junction near front panel

• To vacuum gauge
• To switch

Not sure where goes from switch

I don't currently need the vacuum system but have no reason to rip it out. Leave it for now

Hoses could potentially tangle into Z1 drive but I could secure them if I eventually use Z1

Main board: J7

Main board: J5

Main board: J8

Main board: J4

Main board: J6

collating data

Back 50 pin connector. Its not labeled but it is on the back of the hood enclosure

Per breakout board, pin 1 lower left, pin 2 upper left

What would it take to determine this?

• Can I make a schematic of any of the opto boards?

Likely 5V

Materials:

• Benchtop power supply (want current monitoring)
• Slo-syn motor
• OEM650 driver
• Sparkfun level shifter?
  • TODO: verify that OEM650 actually can't take 3.3V

Resistor config?

• “V: 5.0, A: 1.0”
  • Series configuration
• Jumper 1 removed
• 1.0A: 18.2k
• 2.0A: 3.57k

Wiring?

• pg 13
• Figure 2-2. NEMA 23 Size OEM Motor Wiring—Series & Parallel
• LCR meter (old)
  • Single: 9.5 mH
  • Series: 36 mH

Waiting for LCR meter to replace questionable 875B

Wiring up in preparation though

Testing rewired OEM-650's

Using half motor to favor speed over torque (lower inductance but doesn't use the entire coil). if its not enough power I'll switch to using full motor. In part this should be lower power consumption

Microstepping: I was using 10,000 on pr0nscope. Start with that? pg 27 says default (reccomended?) 25,000?

Jumper config:

Quick disconnect power connector:

DB25 signal connector:

Successfully ran motor in test mode

Need to convert from 3.3V to 5V per above spec

BBB breakout: https://www.adafruit.com/products/572

Logic level converter: https://www.sparkfun.com/products/12009

Successfully tested BBB voltage boost X channel on standalone motor

Tested OEM650 drives and discovered only 2/4 are functional. Unclear if I broke these last time I used them or they were always broken. Discarded defective drives

Current strategy: use MDrive23 for X1, Y1. Use original motors with OEM650 for X2, Y2. Z1 will not be hooked up at this time but will still be accessible on connector if required. Only X1 and Y1 will be used in initial testing since stock BBB configuration only supports 3 axes

Working on polishing earlier tables to verify its safe to rewire X1, Y1 for completely different purpose signals. I'll then have to cut wires and solder in the MDrive23's.