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Protects the underlying circuits. Seems to be omitted on rare occasions or more likely at least something that decapsulation chemicals attack. When still on the chip it gives a cloudy feeling and should be removed for best results. Example of damaged passivation showing difference in image quality:
When the passivation is in good condition it can be difficult to discern if its still present. Also called overglass since its often made of SiO2.
Connects bonding wires to the die. Large metal pads so the wire can be attached without high precision. The inner box is the overglass covering part of the aluminium so as to be able to make a good contact and still maintain a good seal.
Still has a bond wire on it:
Damaged overglass: damaged_overglass.jpg It is very fragile and can easily get completely stripped during decapsulation.
Aluminium (M1) errosion from excessive time in acid bath:
Tensile stress enhances electron mobility and compressive stress enhances hole mobility. [Kaeslin] Can be incorporated with the following:
Does not seem that this is common and is only seen in very high performance ICs.
Any component that makes up the layers on the die. Gets its name since the components are made by shining light through a photomask. Example photomask:
Actual photomasks only are for a single layer at a time.
Manufacturers typically label dies with an internal chip number and often the manufacturer. Often these are all placed together (if present), but not necessarily.
Makes up interconnect layers.
Above example shows an L shaped interconnect used to jumper over an area. The vias are the dots on the ends. Vias seem to usually be made of copper.
[Kaeslin] provides some good information: -“Historical sink-in via”: hole in dielectric is simply deposited in a layer that fills the hole -Plugged via: tungsten “plug” forms the via and goes between two metal layers mostly filled with a dielectric -Fabs usually only accept a single size via -Stipple contact/via: array of vias since often only one size via is allowed -“Electromigration-aware stipple contact/via”?
Connects transistor pieces together and often other metal layers. Typically aluminium and occasionally copper on upper layers of high performance chips.
Connections between metal layers and the transistors. Typically made of copper in modern dies, but earlier dies used aluminium.
The active part of the die. Depending on the process technology, these will be formed in various ways. They are the lowest interesting layer.
The majority of the mass of the die. Some sort of SiO2 varient. Generally fairly boring and not much worth noting.