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Honeywell AWM2100V mass airflow sensor (

Guessing the 9503 is a date code so tagging it as such.

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Ceramic, looks like Al2O3. Two layers of metalization plus thick-film resistors. Blue dielectric may be glass or polymer, not sure which yet.


One layer of polysilicon resistor plus one layer of gold metalization.

Die is <100> oriented as can be seen by the KOH (or similar) etch used to define the cavity under the membrane.

azonenberg/honeywell/awm2100v.txt · Last modified: 2015/01/04 17:50 (external edit)