[[piranha_solution]]
 
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piranha_solution [2013/11/17 06:56] – created mcmasterpiranha_solution [2013/11/17 07:03] – mcmaster
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 Since its typical use is to remove organics, don't expect many organic things to survive.  Sources always say to avoid plasitcs, unclear how fluorinated plastics do Since its typical use is to remove organics, don't expect many organic things to survive.  Sources always say to avoid plasitcs, unclear how fluorinated plastics do
 +
 +"Piranha is compatible with teflon and borosilicate glass" [AMC]
  
 Metals? Metals?
 +
 +AZ etch rates from etch bible:
 +  * "Evaporated Al in piranha etches at >5200 nm/min"
 +  * "evaporated Cu at 88nm/min"
 +  * "spin-on polyimide >17,000 nm/min"
 +  * "Oxygen plasma eats polyimide at 370nm/min and is "slow or zero" for Cu/Al"
 +
 +
 +====== References ======
 +
 +Acid comaptible materials (AMC): http://www.cheresources.com/invision/topic/19132-piranha-caros-acid-peroxymonosulfuric-acid-compatible-materials/
  
 
piranha_solution.txt · Last modified: 2013/11/17 07:08 by mcmaster
 
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