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technics:hummer [2018/08/09 13:40]
mcmaster [mcmaster Hummer VI]
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-Now Anatech 
- 
-BK intro to sputter coaters: https://​www.youtube.com/​watch?​v=9OEz_e9C4KM 
- 
-Suggested procedure: https://​sbs.wsu.edu/​fmic/​protocol/​Au%20Gold%20sputter%20coater.pdf 
- 
-Claims to have a manual: https://​wiki.pumpingstationone.org/​Technics_Hummer_V_Sputter_Coater 
-  * "The manufacturer was purchased by Anatech USA and they still support this product. " 
-  * Requesting it 
- 
-====== Hummer I ====== 
- 
- 
-====== Hummer II ====== 
- 
-{{:​mcmaster:​technics:​hummer_ii:​hummer1.jpg?​300|}} 
- 
-{{:​mcmaster:​technics:​hummer_ii:​hummer2.jpg?​300|}} 
- 
-JM unit: advert called it "​Hummer II Sputter Coater for Au" although it doesn'​t actually say that anywhere on the machine 
- 
-Have a bunch of internal photos. ​ Will add them + better pictures once I finish overhauling it. 
- 
-TODO: 
-  * Fix ATM switch 
-    * Stuck closed 
-  * Panel: clean 
-  * Panel: fix handle / order screw(s) 
-    * Replace with SHCS? 
-    * Thread size? 
-  * Panel: fill out all screws 
-    * Replace with SHCS? 
-    * Thread size? 
-  * Pump: slowly leaking oil? 
-  * Pump: oil mist filter 
-    * Where does it go?  Thread? 
-  * HV: fix negative lead.  Currently alligator clipped 
-  * TC: replace sensor 
-    * Rusted 
-    * Key is broken 
-    * Seems to work though 
- 
-DONE 
-  * Demonstrate plasma. ​ System seems to more or less work 
-  * General cleaning 
-  * Pump: oil was low but now halfway on window 
-  * Pump: window dirty. ​ Tried to clean but not much success. ​ Probably okay as is 
- 
-General notes: 
-  * TC sensor: Teledyne DV-23. ​ Orange base 
-  * Pump: Sargent Welch 8810 
- 
- 
-====== Hummer III ====== 
- 
- 
-====== Hummer IV ====== 
- 
- 
-====== Hummer V ====== 
- 
-{{:​ps1:​technics:​ps1.jpg?​300|}} 
- 
-[[https://​wiki.pumpingstationone.org/​Technics_Hummer_V_Sputter_Coater|Source]] 
- 
- 
-====== Hummer 6 ====== 
- 
-[[https://​siliconpr0n.org/​media/​anatech/​anatech_hummer_vi_operations_manual.pdf|manual]] 
- 
-{{:​sitekprocess:​hummervi:​0.jpg?​300|}} 
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-[[http://​www.sitekprocess.com/​ccp4230-technics-hummer-vi-sputtering-system-technics-hummer-vi-51091.htm|Source]]:​ "​Technics Hummer VI Sputtering System"​ 
- 
-{{:​rit:​hummer6:​it_sputter1.jpg?​300|}} 
- 
-[[http://​www.rit.edu/​gis/​research-centers/​nanopower/​flmddf.html|Source]] ​ Like above but its switched from being Technics to Anatech branded 
- 
-{{:​anatechusa:​hummer6.2:​0.jpg|}} 
- 
-[[http://​www.anatechusa.com/​hummer-sputter-systems/​4|Source]]:​ "​Hummer 6.2 Sputter System - SEM Sample Preparation"​ 
- 
-{{:​anatechusa:​hummer6.6:​0.jpg|}} 
- 
-[[http://​www.anatechusa.com/​hummer-sputter-systems/​5|Source]]:​ "​Hummer 6.6 Sputter System - SEM Sample Preparation"​ 
- 
-{{:​capovani:​hummer6.6t:​0.jpg?​300|}} 
-{{:​capovani:​hummer6.6t:​2.jpg?​300|}} 
- 
-[[http://​www.capovani.com/​iinfo.cfm?​itemno=171583|Source]]:​ "​ANATECH HUMMER 6.6T SPUTTER SYSTEM"​ 
- 
- 
-====== Hummer 7 ====== 
- 
-Website skips from 7 to 8.  Never produced? 
- 
-Notes from someone: 
-<​code>​ 
-HUMMER VII NOTES  
-DISPLAY PCB  
-LED Short Lead to square Pad,       Long Lead to Round Pad MAIN  PCB CONNECTIONS J7 Pin 1 Common Red Pin 2 Current Monitor Green Pin 3 No Connection Pin 4 No Connection Pin 5 Relay Yellow Pin 6 Relay Brown Pin 7 Safety Interlock Black Pin 8 Current Program Orange J8 Pin 1 Analog Common Yellow Pin 2 No Connection Pin 3 No Connection Pin 4 No Connection Pin 5 Logic Common Black Pin 6 -12v Pin 7 +5v Red Pin 8 +12v Green J9 Pin 1 Pressure Switch Blue Pin 2 Pressure Switch Blue Pin 3 No Connection J5 Pin 1 Two Way Gas Solenoid ​ White Pin 2 Two Way Gas Solenoid ​ White Blue Pin 3 3-Way Vent Solenoid ​     White Pin 4 3-Way Vent Solenoid ​     White Connector J4 Pin 1 Pump Relay Green Pin 2 Pump Relay Yellow Pin 3 + Meter Red Pin 4 - Meter BlackON RELAY PCB J4 Pin 1 + Meter Red Pin 2 - Meter Black Pin 3 Pump Relay Green Pin 4 Pump Relay Yellow 
-</​code>​ 
- 
-====== Hummer 8 ====== 
- 
-{{:​anatechusa:​hummer8.0:​0.jpg|}} 
- 
-[[http://​www.anatechusa.com/​hummer-sputter-systems/​6|Source]]:​ "​Hummer 8.0 Sputter System - SEM Sample Preparation"​ 
- 
- 
-====== Hummer X ====== 
- 
-{{:​wotol:​hummerx:​0.jpg?​300|}} 
- 
-[[http://​www.wotol.com/​1-anatech-hummer-x-cold-deposition-etch-sputter-co/​second-hand-machinery/​prod_id/​500420|Source]]:​ "​HUMMER X, Cold Deposition/​Etch Sputter Coater"​ 
- 
- 
-====== Hummer XP ====== 
- 
-{{:​bsdservice:​hummerxp:​0.jpg|}} 
- 
-[[http://​www.used-line.com/​semiconductor-and-pcb/​sputtering-systems/​anatech-hummer-xp/​item-10127265|Source]]:​ "​Anatech Hummer XP" 
- 
- 
-====== mcmaster Hummer IV ====== 
- 
-Got from craigslist a while back, including gold source. A little dirty, but worked fine. Cleaned up front panel best I could 
- 
-2018-08-07: 
-  * Pedestal does not stay tight and can be easily moved up and down when tightented 
-  * Threads had eroded on pedestal clamp. I tried to shore them up with PTFE tape, but maybe not enough 
-  * Ordered "​PARKER P8MC6 Connector, Poly, CompxM, 1/​2Inx3/​8In"​ to replace it 
- 
-2018-08-08: 
-  * Chamber glass 
-    * 5" OD 
-    * 4.5" ID 
-    * 0.25" thick 
-    * 6" tall 
-  * Chamber seals 
-    * PORTER SEAL COMPANY-DALLAS 
-    * L shaped 
-    * 1/2" tall 
-    * 3/8" wide 
-    * ~0.073"​ thick 
-    * Bell jar L gasket 
- 
-====== mcmaster Hummer VI ====== 
- 
-Got from industrial auction 
- 
-2018-08-07: 
-  * Glass chamber + seals not present 
-  * No source installed 
-  * Vacuum pump 
-    * Model: Trivac D1, 6B 
-    * Low on oil 
-    * Remaining oil is clear 
-    * Put Agilent oil in 
-    * Black feet at bottom have degraded 
-    * Black feet stick outside of case...I guess to better isolate the pump from the chamber? 
-    * TODO: replace feet 
-    * KF16 inlet and outlet 
-  * Cleaned up inside unit 
-    * Oil, degraded pump feet 
-  * Front panel 
-    * Cleaned. Lots of black stuff on it 
-    * Not holding a vacuum. Pressure gauge does not move 
-    * MODE switch is off center, but otherwise seems to work 
-    * VAC PUMP switch is not present 
-  * Its unclear how to properly vent the unit 
-  * Rear assembly 
-    * Chamber => electric solenoid => leak valve => cut green tube 
-    * Rubber hinge w/ chamber top snapped 
-  * Hummer IV chamber fits, but is probably too tall and slightly too wide 
-  * Back cover comes off easily 
-    * Generally much easier to work on this unit than the IV 
- 
-2018-08-08: 
-  * Found large gouge on cap 
-    * Filed down followed by 220, 1500 grit sandpaper 
-    * Pump ran for a few minutes and reached 50 mTorr 
-    * Switched to IV pedestal 
-    * After pumping for 15 minutes reached nearly 20 mTorr 
-    * Conclusion 
-      * Pump is good 
-      * Vacuum tight, including the rear assembly 
-      * Both pedestals seem fine. Evidence points towards replacing TITE assembly on IV 
-    * TODO 
-      * Size / order chamber, seals 
-      * Investigate leaking chamber 
-  * Mode tests 
-    * All three modes seem to roughly work 
-    * Plate D/C: very slight discharge at top. Suspect plate is too far away 
-    * Etch D/C: padastel sparkles (reverse polarity?) 
-    * Plasma Exc: mix of both of above (AC?) 
-  * Chamber glass diameter estimate 
-    * Lower platform lip 
-      * IV: recessed, 3.8 ID, 5.4 OD 
-      * VI: edge, 3.9 ID, 4.9 OD 
-    * Upper 
-      * VI: recessed, 4.9 OD 
-      * VI: edge, 5.4 OD 
-    * VI pedestal: 3.75" OD 
-    * eBay pictures show a chamber not overhanging 
-    * IV is 4.5" ID, could shrink down 0.5" probably from 5.0" => 4.5" OD 
-    * But 5" does seem to work and would keep parts compatible. Maybe easier to find 
-  * Chamber glass height estimate 
-    * 2.3" gap 
-    * Current chamber 6", 3.75" is probably right for this one 
-  * Chamber glass summary 
-    * Diameter: 4.5 - 5.0" OD 
-    * Height: 3.5 - 4.0" 
-    * Width: 0.25" 
-  * Chamber candidates 
-    * https://​www.mcmaster.com/#​8486k581/​=1e2ia4r 
-      * $67 for 1' of 5" acrylic 
-  * Finding replacement seal 
-    * Ideally want chamber + seals together 
-    * http://​www.customgasketmfg.com/​MoldedRubberProducts/​BellJarGaskets 
-      * Called. Min run 250 pieces 
-    * https://​www.duniway.com/​catalog/​supplies/​l-gaskets 
-      * Smallest 7" 
-    * https://​www.appliedvacuum.co.uk/​sales/​vacuum-bell-jars-cylinders-gaskets 
-      * Sent RFQ 
-      * Same as http://​www.belljargaskets.com/​ 
-    * https://​www.lesker.com/​newweb/​chambers/​pyrex-bell-jars.cfm 
-      * smallest 12" 
-    * mcmaster.com 
-      * can't find anything in the category 
-    * https://​www.laddresearch.com/​vacuum-equipment/​viton-bell-jar-gaskets 
-      * smallest 7" 
-    * http://​www.greatglas.com/​PyrexBellJars.htm 
-      * smallest 6" 
-    * http://​www.willsonscientific.com/​glassbelljars.html 
-      * might have some 
-      * Called, they will get back to me 
-    * http://​elderrubber.com/​ 
-      * Think they used to be PORTER SEAL COMPANY-DALLAS 
-      * Called them and have 5" in stock, about $15 each, $50 min order. Order 3 
- 
-glass tubing 
-  * need: Pyrex 237670 
-    * 127.0mm (5") Pyrex® Glass Heavy Wall Tubing, 2/cs., 29 lbs. 
-    * Size O.D. (mm):  127 
-    * Wall (mm):  6.4 
-    * http://​www.stemmerich.com/​pdf/​Pyrexbrochure.pdf 
-  * https://​www.waleapparatus.com/​product-options/​heavy-wall-corning-pyrex-glass-tubing-20323 
-    * BH-500C 
-    * Heavy Wall Corning Pyrex Glass Tubing - 5 ft. lengths 
-    * 127mm (5 in) O.D. x 6.4mm wall Corning Pyrex Glass Tubing - CASE(3 PCS.) 53 LBS. 
-    * $310.00 
-    * Yields 15' => 180", need 4 
-  * https://​www.mcmaster.com/#​glass-tubing/​=1e2sbaq 
-    * 4-1/4" max 
-    * Pressure-Rated Borosilicate Glass Tubes 
-    * can be used as glass bowls in oil dispensers 
-  * http://​www.sci-techglassblowing.com/​products/​listing.asp?​idCategory=2 
-    * HW237670 
-    * $239 
- 
-Custom glass quotes 
-  * http://​www.sci-techglassblowing.com/​ 
-    * "1 to 2 ea  #​STG-2376570-95 ​ Clear Pyrex glass cylinders, 5" O.D. x .25" wall thickness x 3.75" long. both ends open, cut straight, flat, parallel, fire polished and furnace annealed ​ @ $120.00 ea, can ship 2 to 3 days ARO" 
-  * stemmerich.com 
-    * $29 each 
-    * 3 wk LT 
-  * http://​www.newportglass.com/​ 
-    * Pending 
- 
- 
-2018-08-09 
-  * Gasket order placed w/ elderrubber 
-    * MOQ $50, gaskets about $16 each, ordered 3 
-    * In stock 
-  * Glass order placed w/ stemmerich.com 
-    * $29 each, no MOQ 
-    * Ordered 1 
-    * 3 wk LT 
-  * Summary: a lot of sleuthing, but around $100 to fully replace a chamber 
- 
- 
-====== mcmaster carbon ====== 
- 
-2018-08-07: 
-  * Order replacement chamber seals 
-    * Original gasket brown (Viton?) 
-    * Ordered replacement gaskets: [[https://​www.mcmaster.com/#​9464K175|mcmaster 9464K175]] 
-      * Chemical-Resistant Viton Fluoroelastomer O-Ring, 3/16 Fractional Width, Dash Number 346, packs of 2 
-      * Width: 0.21" 
-      * ID: 4.100" 
-      * OD: 4.520" 
-  * Order carbon rods: [[https://​www.tedpella.com/​carbon_html/​carbon-rods-shapers.htm|Ted Pella 62-118]] 
-    * PNTD CARBON ROD,​1.5MMTIP,​PK/​10 
  
 
technics/hummer.1533836422.txt.gz · Last modified: 2018/08/09 13:40 by mcmaster
 
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