This is an old revision of the document!


Now Anatech

BK intro to sputter coaters: https://www.youtube.com/watch?v=9OEz_e9C4KM

Suggested procedure: https://sbs.wsu.edu/fmic/protocol/Au%20Gold%20sputter%20coater.pdf

Claims to have a manual: https://wiki.pumpingstationone.org/Technics_Hummer_V_Sputter_Coater

Hummer I

Hummer II

JM unit: advert called it “Hummer II Sputter Coater for Au” although it doesn't actually say that anywhere on the machine

Have a bunch of internal photos. Will add them + better pictures once I finish overhauling it.

TODO:

  • Fix ATM switch
    • Stuck closed
  • Panel: clean
  • Panel: fix handle / order screw(s)
    • Replace with SHCS?
    • Thread size?
  • Panel: fill out all screws
    • Replace with SHCS?
    • Thread size?
  • Pump: slowly leaking oil?
  • Pump: oil mist filter
    • Where does it go? Thread?
  • HV: fix negative lead. Currently alligator clipped
  • TC: replace sensor
    • Rusted
    • Key is broken
    • Seems to work though

DONE

  • Demonstrate plasma. System seems to more or less work
  • General cleaning
  • Pump: oil was low but now halfway on window
  • Pump: window dirty. Tried to clean but not much success. Probably okay as is

General notes:

  • TC sensor: Teledyne DV-23. Orange base
  • Pump: Sargent Welch 8810

Hummer III

Hummer IV

Hummer V

Hummer 6

manual

Source: “Technics Hummer VI Sputtering System”

Source Like above but its switched from being Technics to Anatech branded

Source: “Hummer 6.2 Sputter System - SEM Sample Preparation”

Source: “Hummer 6.6 Sputter System - SEM Sample Preparation”

Source: “ANATECH HUMMER 6.6T SPUTTER SYSTEM”

Hummer 7

Website skips from 7 to 8. Never produced?

Notes from someone:

HUMMER VII NOTES 
DISPLAY PCB 
LED Short Lead to square Pad,       Long Lead to Round Pad MAIN  PCB CONNECTIONS J7	Pin 1 	Common Red			Pin 2	Current Monitor	Green	Pin 3	No Connection			Pin 4	No Connection	Pin 5	Relay	Yellow				Pin 6	Relay	Brown	Pin 7	Safety Interlock	Black		Pin 8	Current Program	Orange J8	Pin 1	Analog Common	Yellow		Pin 2	No Connection	Pin 3	No Connection			Pin 4	No Connection	Pin 5	Logic Common	Black		Pin 6	-12v	Pin 7	+5v			Red		Pin 8	+12v	Green J9	Pin 1	Pressure Switch	Blue		Pin 2	Pressure Switch	Blue	Pin 3	No Connection J5	Pin 1	Two Way Gas Solenoid  White	Pin 2	Two Way Gas Solenoid  White Blue	Pin 3	3-Way Vent Solenoid      White	Pin 4	3-Way Vent Solenoid      White Connector J4	Pin 1	Pump Relay		Green		Pin 2	Pump Relay	Yellow 	Pin 3	+ Meter		Red		Pin 4	- Meter	BlackON RELAY PCB J4	Pin 1	+ Meter	Red			Pin 2	- Meter	Black	Pin 3 	Pump Relay	Green			Pin 4	Pump Relay	Yellow

Hummer 8

Source: “Hummer 8.0 Sputter System - SEM Sample Preparation”

Hummer X

Source: “HUMMER X, Cold Deposition/Etch Sputter Coater”

Hummer XP

Source: “Anatech Hummer XP”

mcmaster Hummer IV

Got from craigslist a while back, including gold source. A little dirty, but worked fine. Cleaned up front panel best I could

2018-08-07:

  • Pedestal does not stay tight and can be easily moved up and down when tightented
  • Threads had eroded on pedestal clamp. I tried to shore them up with PTFE tape, but maybe not enough
  • Ordered “PARKER P8MC6 Connector, Poly, CompxM, 1/2Inx3/8In” to replace it

2018-08-08:

  • Chamber glass
    • 5“ OD
    • 4.5” ID
    • 0.25“ thick
    • 6” tall
  • Chamber seals
    • PORTER SEAL COMPANY-DALLAS
    • L shaped
    • 1/2“ tall
    • 3/8” wide
    • ~0.073“ thick
    • Bell jar L gasket

mcmaster Hummer VI

Got from industrial auction

2018-08-07:

  • Glass chamber + seals not present
  • No source installed
  • Vacuum pump
    • Model: Trivac D1, 6B
    • Low on oil
    • Remaining oil is clear
    • Put Agilent oil in
    • Black feet at bottom have degraded
    • Black feet stick outside of case…I guess to better isolate the pump from the chamber?
    • TODO: replace feet
    • KF16 inlet and outlet
  • Cleaned up inside unit
    • Oil, degraded pump feet
  • Front panel
    • Cleaned. Lots of black stuff on it
    • Not holding a vacuum. Pressure gauge does not move
    • MODE switch is off center, but otherwise seems to work
    • VAC PUMP switch is not present
  • Its unclear how to properly vent the unit
  • Rear assembly
    • Chamber ⇒ electric solenoid ⇒ leak valve ⇒ cut green tube
    • Rubber hinge w/ chamber top snapped
  • Hummer IV chamber fits, but is probably too tall and slightly too wide
  • Back cover comes off easily
    • Generally much easier to work on this unit than the IV

2018-08-08:

glass tubing

Custom glass quotes

    • “1 to 2 ea #STG-2376570-95 Clear Pyrex glass cylinders, 5” O.D. x .25“ wall thickness x 3.75” long. both ends open, cut straight, flat, parallel, fire polished and furnace annealed @ $120.00 ea, can ship 2 to 3 days ARO“
  • stemmerich.com
    • $29 each
    • 3 wk LT
    • Pending

2018-08-09

  • Gasket order placed w/ elderrubber
    • MOQ $50, gaskets about $16 each, ordered 3
    • In stock
  • Glass order placed w/ stemmerich.com
    • $29 each, no MOQ
    • Ordered 1
    • 3 wk LT
  • Summary: a lot of sleuthing, but around $100 to fully replace a chamber

mcmaster carbon

2018-08-07:

  • Order replacement chamber seals
    • Original gasket brown (Viton?)
    • Ordered replacement gaskets: mcmaster 9464K175
      • Chemical-Resistant Viton Fluoroelastomer O-Ring, 3/16 Fractional Width, Dash Number 346, packs of 2
      • Width: 0.21”
      • ID: 4.100“
      • OD: 4.520”
  • Order carbon rods: Ted Pella 62-118
    • PNTD CARBON ROD,1.5MMTIP,PK/10
 
technics/hummer.1533836422.txt.gz · Last modified: 2018/08/09 17:40 by mcmaster
 
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