This is an old revision of the document!
Die shots by John McMaster.
If someone wants to refine the alignement, beware that the vectorization is aligned to the m68000-m-3.png image, which should not change.
The svg uses m68000-m-3.png as background, which should be in the same directory. Beware that inkscape uses 5+G of ram to open and display it.
Six layers with its own style for each: active (blue), polysilicon (red), buried contacts (pink), metal (black), vias (white/grey), capacitors (dark green).
Metal layer was done by Quietust, everything else by me, Olivier Galibert.