This was a merge of two duplicate pages, messy…
eBay seller mlsolar
Small lettering on the lower left:
Large lettering bottom:
6-2807A 8A31099 13
(M) 2005 28079-NN MICREL
TCC051 TMC05A HRES 09X0.5 15X.45
Looks a lot like GCA Autostep 200 INSITU alignment marks: http://www.cnf.cornell.edu/cnf_process_photo_step_align.html
Downloadable GDS of the alignment patterns are at http://ssel-sched.eecs.umich.edu/wiki/GetFile.aspx?Page=Public.GCA%20AS200%20AutoStep&File=GCA%20Alignment%20Marks.zip.
Not quite identical, though - the AS200 has ten lines in each set and this one looks more like 15. The AS200 pattern also omits the central cross. Perhaps another GCA stepper with a slightly different firmware version?