This is an old revision of the document!
#collection/az #vendor/honeywell #type/sensor/airflow #type/mems
Honeywell AWM2100V mass airflow sensor (http://sensing.honeywell.com/product%20page?pr_id=25698)
Blog posts:
Ceramic, looks like Al2O3. Two layers of metalization plus thick-film resistors. Blue dielectric may be glass or polymer, not sure which yet.