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| microscope:sem:start [2014/08/09 01:14] – mcmaster | microscope:sem:start [Unknown date] (current) – removed - external edit (Unknown date) 127.0.0.1 |
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| This page was originally created to help me figure out options for buying a SEM for personal use. Since then, it has served best as a magnet for other DIY SEM people to contact me and collaborate with each other. If you have any SEM material (pictures, user manual, schematics, etc) I am very interested. Also feel free to contact me if you are looking for info on a particular model and I'll see what I can dig up | |
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| I can be contacted at JohnDMcMaster<nowiki> *</nowiki>at<nowiki>*</nowiki> gmail.com | |
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| |
| ====== SEM model comparison ====== | |
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| A list of scanning electron microscopes. Some dual beam FIBs are included for now but may eventually be moved to their own page | |
| |
| year reflects earliest reference to that SEM model. When one company has merged with another, the vendor name most associated with that microscope is listed (ie who designed or marketed the system as opposed to who owns the IP 20 years later) | |
| |
| assume list prices are non-inflation adjusted from around year SEM was offered | |
| |
| ask prices were from around 10/05/2013 unless otherwise noted | |
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| I've included ultra-high voltage SEMs as well | |
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| schematic column marked Yes if at least one schematic from the unit is available (original or reverse engineered) | |
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| Some units may be duplicated. When its ambiguous if two units are the same they get two separate rows until can be reasonably proven to be redundant | |
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| ^Image ^Vendor ^Model ^Year ^kV ^Gun ^Resolution (nm) ^Features ^List price ^Ask price ^Manual ^Schem ^SW ^Notes | | |
| |{{:agilent:8500:overview.jpg?300}} \\ [[http://www.keysight.com/en/pd-1878801/8500-field-emission-scanning-electron-microscope-fe-sem?nid=-33760.940647&cc=SG&lc=eng|Source]] |Agilent |8500 | | |FE | | | | | | | | \\ Tabletop \\ \\ Keysight? | | |
| | |Amray | \\ 900 \\ \\ (AMR-900) | 1969 | 30 | |10 | | | | | | | | | |
| |{{:cae:amray:1000:1.jpg?300}} \\ [[http://www.caeonline.com/listing/product/155989/amray-1000|Source]] |Amray |1000 |197? | | | | | | | | | | | | |
| |{{:coxem2010:amray:1000a:3222325533384853814.jpg?300}} \\ [[http://coxem2010.blog.163.com/blog/static/16510375720105120510147/|Source]] |Amray |1000A |197? | | |[[http://pubs.acs.org/doi/pdf/10.1021/ac00225a856|4]] | | | | | | | | | |
| |{{:coxem2010:amray:1000b:1276207544423025258.jpg?300}} \\ [[http://coxem2010.blog.163.com/blog/static/16510375720105120510147/|Source]] |Amray |1000B |197? | | \\ FE \\ \\ LaB6 | | | |[[http://www.ebay.com/itm/AMRAY-ELECTRON-MICROSCOPE-MODEL-SEM-1000B-/320804161513?pt=LH_DefaultDomain_0&hash=item4ab16b07e9|8750]] | | | | | | |
| | |Amray |1200B | | | |[[http://pubs.acs.org/doi/pdf/10.1021/ac00225a856|5]] | | | | | | | | | |
| | |Amray |1200C | | | | | | |[[http://www.ebay.com/itm/AMRAY-1200C-Scanning-Electron-Microscope-L611-/141074565269?pt=LH_DefaultDomain_0&hash=item20d8b30895|9900]] | | | | | | |
| | |Amray |1400D | | | | | | | | | | | | | |
| | {{:coxem2010:amray:1500fe:amray_1500fe.jpg?300|}} \\ [[http://coxem2010.blog.163.com/blog/static/16510375720105120510147/|Source]] |Amray |1500FE | 1989 | | | | | | | | | | | | |
| | |Amray |1600 Turbo | | | |[[http://pubs.acs.org/doi/pdf/10.1021/ac00225a856|4]] | | | | | | | | | |
| | {{:coxem2010:amray:1810:1.jpg?300|}} \\ [[http://coxem2010.blog.163.com/blog/static/16510375720105120510147/|Source]] |Amray |1810 | ~1985 | | | | | | | | | | | | |
| | {{:coxem2010:amray:1820:amray_1820.jpg?300|}} \\ [[http://coxem2010.blog.163.com/blog/static/16510375720105120510147/|Source]] |Amray |1820 | ~1985 | | | | | | | | | | | | |
| | {{:coxem2010:amray:1830:1.jpg?300|}} \\ [[http://coxem2010.blog.163.com/blog/static/16510375720105120510147/|Source]] |Amray |1830 | ~1985 | | |4 nm @ 30 kV | | | | | | | | | |
| | |Amray |1830D | | | | | | |[[http://www.ebay.com/itm/AMRAY-SCANNING-ELECTRON-MICROSCOPE-MODEL-1830D-/310478306270?pt=LH_DefaultDomain_0&hash=item4849f2fbde|7950]] | | | | | | |
| | {{:coxem2010:amray:1840fe:amray_1840fe.jpg?300|}} \\ [[http://coxem2010.blog.163.com/blog/static/16510375720105120510147/|Source]] |Amray |1840FE | ~1985 | | | | | | | | | | | | |
| | |Amray |1845 | | | |4 nm @ 1 kV \\ 1.5 nm @ 25 kV | | | | | | | | | |
| | |Amray |1850 | | | | | | | | | | | | | |
| | |Amray |1860 | | |TFE |7 nm @ 1 kV \\ 1.5 nm @ 25 kV | | |[[http://www.ebay.com/itm/Amray-1860-FE-Scanning-Electron-Microscope-Kevex-Superdry-EDS-Digital-Imagin-/190907089156?pt=LH_DefaultDomain_0&hash=item2c72f30104|27,000]] | | | | | | |
| | |Amray |1860FE | ~1988 | 10 | | 2 | | | | | | | | | |
| | |Amray |1880FE | ~1988 | 10 | | 2 | | | | | | | | | |
| | |Amray |1910 | | |FE |7 nm @ 1 kV \\ 1.5 nm @ 30 kV | | | | | | | | | |
| | |Amray |2030L | | | | | | | | | | | | | |
| | |Amray |3200 | | | |6nm @ 30kV (LV) \\ 4nm @ 30kV (HV) | | | | | | |4 torr max pressure | | |
| | |Amray |3300 | | |FE |5 nm @ 1.5 kV \\ 1.5 nm @ 20 kV | | | | | | | | | |
| |{{:cae:amray:3800c:1.jpg?300}} \\ [[http://www.caeonline.com/listing/product/143256/amray-3800c|Source]] |Amray |3800C | | | | | | | | | | | | | |
| | |Akashi |Mini-SEM MSM2 |1972 |15 | | | | | | | | |[1970s] | | |
| | |Akashi |Mini-Rapid-Scan |1973 |15? | | | | | | | | |"slightly modified version of the Mini-SEM" [1970s] | | |
| | |Bausch & Lomb |LE 2100 | | | | | | |[[http://www.ebay.com/itm/Bausch-Lomb-LE-2100-Nanolab-SEM-Scanning-Electron-Microscope-Nice-/370713741124?pt=LH_DefaultDomain_0&hash=item565042c744|12950]] | | | | | | |
| | |Ben Krasnow |BK-1? | | | | | | | | | | | | | |
| | |Cambridge |S-90 | | | | | | | | | | | | | |
| | |Cambridge |S-100 | | | | | | | | | | | | | |
| | |Cambridge |S-120 | | | | | | | | | | | | | |
| | |Cambridge |S-200 | | | | | | | | | | | | | |
| | |Cambridge |S-240 | | | | | | | | | | | | | |
| | |Cambridge |S-250 | | | | | | | | | | | | | |
| | |Cambridge |S-260 | | | | | | | | | | | | | |
| | |Cambridge |S-360 | | | | | | | | | | | | | |
| | |CEMES-LOE/CNRS | |1965 |3 MeV | | | | | | | | |[1960s] | | |
| | |Delong Instruments |LVEM5 | | | | | | | | | | | | | |
| | |ElectroScan (Phillips) |2020 | | | | | | |[[http://www.ebay.com/itm/Electroscan-2020-Low-Vacuum-Scanning-Electron-Microscope-w-TMC-Isolation-Table-/221292097856?pt=LH_DefaultDomain_0&hash=item3386097140|999]] | | | | | | |
| | |ElectroScan (Phillips) |E30 | | | | | | |[[http://www.ebay.com/itm/ElectroScan-Environmental-Scanning-Electron-Microscope-/251302098451?pt=LH_DefaultDomain_0&hash=item3a82c5b613|$7,000 used 10/05/2013]] | | | |"Voltage: 208-220 VAC, 60 Hz, 30 Amps, 1 phase" | | |
| | |ElectroScan (Phillips) |ESEM E3 | | | | |ESEM | |[[http://www.ebay.com/itm/ELECTRO-SCAN-ENVIRONMENTAL-SCANNING-ELECTRON-MICROSCOPE-ESEM-E3-PHILLIPS-/300665894695?pt=LH_DefaultDomain_0&hash=item4601157727|20,000]] | | | | | | |
| | |Elionix |8900 | | |FE |5 nm @ 1 kV \\ 1.2 nm @ 30 kV | | | | | | | | | |
| | |FEI |ESEM Explorer |1992 | | | |ESEM | | | | | |"up to 20 Torr" [1990s] | | |
| | |FEI |ESEM Model 2020 |1994 | | | |ESEM | | | | | |"50 Torr in the sample chamber" [1990s] | | |
| | |FEI |Nova NanoSEM 450 | | | | | | | |[[http://siliconpr0n.org/media/fei/nova_nanosem/online_doc.pdf|Yes]] | | | | | |
| | |FEI |Nova NanoSEM 650 | | | | | | | |[[http://siliconpr0n.org/media/fei/nova_nanosem/online_doc.pdf|Yes]] | | | | | |
| | |FEI |Quanta 450FEG | | | | | | | |Yes | | | | | |
| | |Hitachi |? |1954 |300 | | | | | | | | |[1960s] | | |
| | |Hitachi |H-1250 |1976 |1250 | |0.204 | | | | | | |Successor to HU-3000 [1970s] | | |
| | |Hitachi |H-1300S |1982 |1300 | | | | | | | | |" based on ion radiation" [1980s] | | |
| | |Hitachi |HFS-2 |1972 | |FE |3 | | | | | | |"first SEM to use a field emission gun as an electron source" [1970s] | | |
| | |Hitachi |HSM-2A |1971 |40 | |15 |EDS, WDS | | | | | |[1970s] | | |
| | |Hitachi |HU-500 |1964 |500 | | | | | | | | |[1960s] | | |
| | |Hitachi |HU-650 |1968 |650 | | | | | | | | |[1960s] | | |
| | |Hitachi |HU-1000 |1969 |1000 | | | | | | | | |[1960s] | | |
| | |Hitachi |HU-3000 |1970 |3000 | |0.46 | | | | | | |"accelerating voltage was the highest ever for an electron microscope" [1970s] | | |
| | |Hitachi |S-450 |1977 | | | | | | | | | |"samples up to 4 inches" [1970s] | | |
| | |Hitachi |S-500 |1975 | | | | | |[[http://www.ebay.com/itm/Hitachi-S-500-Scanning-Electron-Microscope-/181197721171?pt=LH_DefaultDomain_0&hash=item2a3039ce53|6,500 refurbished 10/05/2013]] | | | |"two 8 inch CRT displays, and featured automatic recording of image data (including magnification, acceleration voltage, and film number) directly on the micrograph" [1970s] | | |
| | |Hitachi |S-510 | | | | |EDX | | | | | |[[http://www.hht-eu.com/cms/6562.html|ref]] | | |
| | |Hitachi |S-520 | | | | | | |[[http://www.ebay.com/itm/Hitachi-S-520-Scanning-Electron-Microscope-SEM-Vacuum-TSK-Oil-Diffusion-Pump-/310391896582?pt=LH_DefaultDomain_0&hash=item4844cc7a06|8950]] | | | | | | |
| | |Hitachi |S-530 | | | | | | |[[http://www.ebay.com/itm/Hitachi-S-530-Scanning-Electron-Microscope-with-WDS-/261208885140?pt=LH_DefaultDomain_0&hash=item3cd1434794|9500]] | | | | | | |
| | |Hitachi |S-570 | | | | | | |[[http://www.ebay.com/itm/Hitachi-S-570-SEM-Scanning-Electron-Microscope-/190638433369?pt=LH_DefaultDomain_0&hash=item2c62efa459|4,900 non-working 10/05/2013]] | |[[http://siliconpr0n.org/media/hitachi/s-570/S-570 Schematics.pdf|Yes]] | |"As an option the S-570 is available with LaB6 gun for large probe currents and low voltage applications" [[http://www.hht-eu.com/cms/4731.html|ref]] | | |
| | |Hitachi |S-800 | | | | | | |[[http://www.ebay.com/itm/Hitachi-S800-Scanning-Electron-Microscope-/171142626069?pt=LH_DefaultDomain_0&hash=item27d8e53b15|$6,700 used 10/05/2013]] | |[[http://siliconpr0n.org/media/hitachi/s-800/S-800 Schematics Manual.pdf|Yes]] | |[[http://www.hht-eu.com/cms/4713.html|ref]] | | |
| | |Hitachi |S-806 | | | | | | | | | | |"uses a cold field emitter as electron gun" [[http://www.hht-eu.com/cms/4719.html|ref]] | | |
| | |Hitachi |S-806C | | | | | | | | | | | | | |
| | |Hitachi |S-2100 | | | | | | | | | | | | | |
| | |Hitachi |S-2300 | | | | |WDX, EDX | |[[http://www.ebay.com/itm/G75921-Hitachi-S-2300-Scanning-Electron-Microscope-/330998984221?pt=LH_DefaultDomain_0&hash=item4d1113ae1d|$4,999 non-working 10/05/2013]] | |[[http://siliconpr0n.org/media/hitachi/s-2300/S-2300 Schematics Manual.pdf|Yes]] | |[[http://www.hht-eu.com/cms/6475.html|ref]] | | |
| | |Hitachi |S-2400 | | | | | | | | | | | | | |
| | |Hitachi |S-2460N | | | | | | | | |[[http://siliconpr0n.org/media/hitachi/s-2460n/S-2460N Schematics Manual.pdf|Yes]] | | | | |
| | |Hitachi |S-2500 | | | | | | | | | | | | | |
| | |Hitachi |S-2600N/H | | | | | | | | |[[http://siliconpr0n.org/media/hitachi/S-3500NH-S3000NH-S2600NH Schematics Manual.pdf|Yes]] | | | | |
| | |Hitachi |S-2700 | | | | | | | | | | | | | |
| | |Hitachi |S-3000 | | | | | | | | | | | | | |
| | |Hitachi |S-3000N/H | | | | | | | | |[[http://siliconpr0n.org/media/hitachi/S-3500NH-S3000NH-S2600NH Schematics Manual.pdf|Yes]] | | | | |
| | |Hitachi |S-3200H | | | |3nm @ 30kV | | | | | | | | | |
| | |Hitachi |S-3200N | | | | | | | |[[http://siliconpr0n.org/media/hitachi/s-3200n/S3200N.pdf|Yes]] | | | | | |
| | |Hitachi |S-3500N/H | | | | | | | | |[[http://siliconpr0n.org/media/hitachi/S-3500NH-S3000NH-S2600NH Schematics Manual.pdf|Yes]] | | | | |
| | |Hitachi |S-4000 | | | | | | | | |[[http://siliconpr0n.org/media/hitachi/s-4000/S-4000 Schematics Manual.pdf|Yes]] | | | | |
| | |Hitachi |S-4100 | | | | | | | | | | | | | |
| | |Hitachi |S-4200 | | |FE |5 nm @ 1 kV \\ 1.6 nm @ 15 kV | | | | | | | | | |
| | |Hitachi |S-4500 | | | | | | | | |[[http://siliconpr0n.org/media/hitachi/s-4500/S-4500 Schematics Manual.pdf|Yes]] | | | | |
| | |Hitachi |S-4700 | | | | | | | | |[[http://siliconpr0n.org/media/hitachi/s-4700/S-4700 Schematics.pdf|Yes]] | | | | |
| | |Hitachi |S-4700-II | | | | | | |[[http://www.ebay.com/itm/Hitachi-S-4700-II-Scanning-Electron-Microscope-with-Thermo-Noran-Vantage-EDS-SEM-/130878728136?pt=LH_DefaultDomain_0&hash=item1e78fae7c8|160,000]] | | | | | | |
| | |Hitachi |S-4800 | | | | | | | |[[http://siliconpr0n.org/media/hitachi/s-4800/SEM-Hitachi-S-4800-Instruction-Manual.pdf|Yes]] | | | | | |
| | |Hitachi |S-5200 | | | | | | | | |[[http://siliconpr0n.org/media/hitachi/s-5200/S-5200service-schematics.pdf|Yes]] | | | | |
| | |Hitachi |S-6000 | | | | | | | | | | | | | |
| | |Hitachi |S-6100 | | | | | | | | | | | | | |
| | |Hitachi |S-6200 | | | | | | | | | | | | | |
| | |Hitachi |S-6280H | | | | | | | | | | |[[http://www.hht-eu.com/cms/4725.html|ref]] | | |
| | |Hitachi |S-6600 | | | | | | | | | | | | | |
| | |Hitachi |S-6780 | | | | | | |[[http://www.ebay.com/itm/Hitachi-SEM-Scanning-Electron-Microscope-S-6780-as-is-/140744408886?pt=LH_DefaultDomain_0&hash=item20c5053f36|10,000]] | | | | | | |
| | |Hitachi |S-7000 | | | | | | | | | | | | | |
| | |Hitachi |S-9300 | | | | | | |[[http://www.ebay.com/itm/Hitachi-SEM-9300-Electronic-Microscope-Working-/290921996061?pt=LH_DefaultDomain_0&hash=item43bc4d5f1d|8,000 column only]] | | | |[[http://www.ebay.com/itm/Hitachi-S-9300-Column-Scanning-Electron-Microscope-/131010537853?pt=LH_DefaultDomain_0&hash=item1e80d6297d|ref]] | | |
| | |Hitachi |SU-1500 | | | | | | | | | | | | | |
| | |Hitachi |SU-8010 | | | | | | | | | | | | | |
| | |Hitachi |SU-8020 | | | | | | | | | | | | | |
| | |Hitachi |SU-8030 | | | | | | | | | | | | | |
| | |Hitachi |SU-8040 | | | | | | | | | | | | | |
| | |Hitachi |XMA-5b |1966 | | | | | | | | | |"Hitachi called its 1966 XMA-5b an EPMA with SEM. This was more of an electron probe microanalyzer than an SEM, and was most likely Hitachi's attempt to quickly join in the SEM business" [1960s] | | |
| |{{:tntech:isi:sr50:image016.jpg?300}} \\ Source: [TNTech MSE] |ISI |SR50 | | | | | | | | | | | | | |
| |{{:umt:isi:cl-6:analytical_top.jpg?300}} \\ Source: [UMT EA] |ISI |CL-6 | | | | | | | | | | | | | |
| |{{:ds130:isi:ds130:ds-130.jpg?300}} \\ Source: [DS130 DS130] |ISI |DS130 | | | | | | | | | | | | | |
| |{{:isi:dtradingpost:isi-40:isisemfull.jpg?300}} \\ Source: [dtradingpost ISI-40] |ISI |ISI-40 | | | | | | | | | | | | | |
| | |ISI |ISI-100 |1977 |25? |LAB<sub>6</sub> |10? | | | | | | |"could handle 4-inch-diameter specimens" [1970s] | | |
| |{{:isi:ptli:isi-ss40:sem_3.jpg?300}} \\ Source: [PTLI ISI-SS40] |ISI |ISI-SS40 | | | | | | | | | | | | | |
| | |ISI |ISI-60 |1979 | | | | |<$30,000 \\ \\ (1979) [isi research advert] | | | | |Advert lists it as new the same time as the Super IIIA and I know the Super IIIA was around 1979 | | |
| |{{:ams:isi:ss60:img_1264.jpg?300}} \\ Source: [AMS SEM] |ISI |ISI-SS60 | | | | | | | | | | | | | |
| | {{:mcmaster:isi:m-7:m7front.jpg?300|}} \\ {{:mcmaster:isi:m-7:isicolumn.jpg?300|}} \\ Source: private e-mail |ISI |M-7 | | | | | | | | | | |Very hard to find info on this unit | | |
| |{{:osu:isi_msm-2_mini_sem.jpg?300}} \\ Source: [OSU MINISEM1] |ISI |MSM-2 |1973 | | |[[http://www.science.oregonstate.edu/emfacility/?q=node/History/EM/MINISEM1|30]] | |$17,000 | | | | | \\ Tabletop \\ \\ [OSU MINISEM1] | | |
| | |ISI |[[:microscope:sem:isi:sms|Super-Mini-SEM 1 (SMS-1)]] |1974 |25 | |10 | | | | |[[:microscope:sem:isi:sms|Yes]] | |"could accommodate samples up to 32 mm in diameter" [1970s] | | |
| | |ISI |[[:microscope:sem:isi:sms|Super-Mini-SEM 2 (SMS-2)]] |1975 |25? | |10? | | | | |[[:microscope:sem:isi:sms|Yes]] | | \\ "increased the sample chamber size to 3 inches in diameter"[1970s] \\ \\ JM may have partial or full schematic | | |
| |{{:mcmaster:isi:super_iiia:01.jpg?300}} |ISI | Super-Mini-SEM (SMS-3A) \\ "[[:microscope:sem:isi:super_iii_a|Super III A]]" | ~1980 | 30 | WHP | 7 | | \\ <$30,000 \\ \\ (1979) [isi research advert] | |[[http://siliconpr0n.org/media/isi/super_iiia/manual/|Yes]] |[[:microscope:sem:isi:sms|Yes]] | | \\ [[http://members.tm.net/lapointe2/Scanning_Electron_Microscope.html|ref]] | | |
| | {{:virago:isi:sx30:at_school_a.jpg?300}} \\ Source: [Virago] |ISI | SX30 | | | | | | | | | | | [Virago] | | |
| |{{:equipmatching.com:isi:sx-40:1.jpg?300}} \\ Source: [equipmatching] |ISI | SX-40 | | | \\ 30 | 6 | | | |[[http://siliconpr0n.org/media/isi/sx-40/isi_sx-40_instruction_manual.pdf|Yes]] | | | \\ Thanks to Nathalie Renevier for the user manual! \\ \\ Specifications on page 67 | | |
| | | | SX-60 | | | | | | | | | | |Mentioned on ds130 website but I can't find any other references to this model | | |
| |{{:mcmaster:isi:tv_mini_sem:nb_overview.jpg?200}} |ISI | \\ TV Mini-SEM \\ ([[:microscope:sem:isi:msm|TV-MSM]]) \\ \\ Schematic: MRS-2 | 1976 | | | | | | | |[[http://siliconpr0n.org/media/isi/tv-msm/schem/|Yes]] | | \\ [[https://www.noisebridge.net/wiki/SEM|Noisebridge unit]] \\ \\ Year based off of schematic date | | |
| | {{:ebay:product4you80:isi:wb-6:0.jpg?300}} \\ Source: [eBay 231289327125] | ISI | WB-6 | | | | | | | | | | | | | |
| | |JEOL |ClairScope JASM-6200 | | | |[[http://www.jeolusa.com/PRODUCTS/ElectronOptics/ScanningElectronMicroscopes(SEM)/AtmosphericSEM/ClairScope%E2%A2JASM6200/tabid/727/Default.aspx#216960-specifications|W/8nm (30kV)]] | | | | | | |Atmospheric | | |
| | |JEOL |JAMP-10 | | | | | | | | | | | | | |
| | |JEOL |JEM-100S | | | | | | |[[http://www.ebay.com/itm/Jeol-Jem-100S-Electron-Microscope-/330904701981?pt=LH_DefaultDomain_0&hash=item4d0b750c1d|14999]] [[http://www.ebay.com/itm/Jeol-JEM-100S-Electron-Microscope-/300892292497?pt=LH_DefaultDomain_0&hash=item460e940591| 20,000]] | | | |[1960s] | | |
| | |JEOL |JEM-ARM-1000 |1983 |1000 | | | | | | | | |"one-of-a-kind Ultrahigh Voltage EM for the Lawrence Berkeley Laboratories in California, where scientists were interested in atomic resolution" [1980s] | | |
| | |JEOL |JFSM-30 |1974 | |FE |3 | | | | | | |[1970s] | | |
| | |JEOL |JRSM-50A |1973 | | | | | | | | | |"hot stage for examining samples at elevated temperatures" [1970s] | | |
| | |JEOL |JSM-1 | |50 | |50 | | | | | | |[1960s] | | |
| | |JEOL |JSM-2 | |50 | | | | | | | | |[1960s] | | |
| | |JEOL |JSM-U | |50 | | | | | | | | |[1960s] | | |
| | |JEOL |JSM-35CF | | | | | | |[[http://www.ebay.com/itm/Jeol-JSM-35CF-Scanning-Electron-Microscope-SEM-XRF-Micro-X-Ray-spectrometer-XRF-/181219143767?pt=LH_DefaultDomain_0&|4,900 used 10/05/2013]] | | | | | | |
| | |JEOL |JSM-35CFS |1982/3? | | | | | | | | | |[1980s] | | |
| | |JEOL |JSM-820 | | | | | | | | | | | | | |
| | |JEOL |JSM-840 |1982/3? | | |[[http://www.microscopy.ou.edu/jsm-840.shtml|3]] | | |[[http://www.ebay.com/itm/JEOL-JSM-840-Scanning-Electron-Microscope-Condition-unknown-Parts-or-fun-/300750575613?pt=LH_DefaultDomain_0&hash=item46062197fd|3900]] | | | | \\ "best i've gotten out of it was resolving ~60nm colloidal silica particles" [az] \\ \\ year: [1980s] | | |
| | |JEOL |JSM-5200 | | | | | | |[[http://www.ebay.com/itm/JEOL-JSM-5200-SEM-Scanning-Electron-Microscope-Nice-/310706225626?pt=LH_DefaultDomain_0&hash=item485788c1da|18950]] | | | | | | |
| | |JEOL |JSM-5400 | | | | | | | | | | | | | |
| | |JEOL |JSM-5800 | | | | | | | | | | | | | |
| | |JEOL |JSM-5900 | | | | | | |[[http://www.ebay.com/itm/JEOL-SEM-JSM-5900-Scanning-Electron-Microscope-Turbo-Racker-Molecular-Pump-NICE-/261241434194?pt=LH_DefaultDomain_0&hash=item3cd333f052|6000]] | | | | | | |
| | |JEOL |JSM-5900LV | | | |3nm @ 30kV (SEI) \\ 5nm @30kV (BEI) | | | | | | | | | |
| | |JEOL |JSM-5910 | | | | | | | | | | | | | |
| | |JEOL |JSM-6100 | | | | | | |[[http://www.ebay.com/itm/Jeol-JSM-6100-Scanning-Electron-Microscope-SEM-Imaging-demo-Video-/321220953743?pt=LH_DefaultDomain_0&hash=item4aca42c68f|10,000]] | | | | | | |
| | |JEOL |JSM-6300LV | | | | | | | | | | | | | |
| | |JEOL |JSM-6300F | | |CFE |1.5 nm @ 30 kV | | | | | | | | | |
| | |JEOL |JSM-6300V | | | | | | |[[http://www.ebay.com/itm/Jeol-JSM-6300V-Electron-Scanning-Microscope-/121063235744?pt=LH_DefaultDomain_0&hash=item1c2fee60a0|9500]] | | | | | | |
| | |JEOL |JSM-6340F | | |CFE |2.5 nm @ 1 kV \\ 1.2 nm @ 20 kV | | | | | | | | | |
| | |JEOL |JSM-6400 | | | | | | | \\ [[http://www.ebay.com/itm/JEOL-6400-SCANNING-ELECTRON-MICROSCOPE-/281127472961?pt=LH_DefaultDomain_0&hash=item417480cf41|10,000]] \\ \\ [[http://www.ebay.com/itm/JEOL-JSM-6400-F-SEM-scanning-electron-microscope-/400170674525?pt=LH_DefaultDomain_0&hash=item5d2c07e95d|11,000]] | | | | | | |
| | |JEOL |JSM-6010LA InTouchScop | | | | \\ [[http://www.jeolusa.com/PRODUCTS/ElectronOptics/ScanningElectronMicroscopesSEM/HighVacuumLowVacuum/tabid/186/Default.aspx|HV: 4nm @ 20kV (SE)]] \\ \\ [[http://www.jeolusa.com/PRODUCTS/ElectronOptics/ScanningElectronMicroscopesSEM/HighVacuumLowVacuum/tabid/186/Default.aspx|LV: 5nm @ 20kV (BSE)]] | | | | | | | | | |
| | |JEOL |JSM-6510 | | | |[[http://www.jeolusa.com/PRODUCTS/ElectronOptics/ScanningElectronMicroscopesSEM/HighVacuumLowVacuum/tabid/186/Default.aspx|LV: 3nm @ 30kV (SE)]] | | | | | | | | | |
| | |JEOL |JSM-6510LV | | | | \\ [[http://www.jeolusa.com/PRODUCTS/ElectronOptics/ScanningElectronMicroscopesSEM/HighVacuumLowVacuum/tabid/186/Default.aspx|HV: 3nm @ 30kV (SE)]] \\ \\ [[http://www.jeolusa.com/PRODUCTS/ElectronOptics/ScanningElectronMicroscopesSEM/HighVacuumLowVacuum/tabid/186/Default.aspx|LV: 4nm @ 30kV (BSE)]] | | | | | | | | | |
| | |JEOL |JSM-7100F | | | |[[http://www.jeolusa.com/PRODUCTS/ElectronOptics/ScanningElectronMicroscopes(SEM)/FESEM/JSM7100F/tabid/865/Default.aspx|1.2nm at 30kV]] | | | | | | | | | |
| | |JEOL |JSM-7500F | | | |[[http://www.jeolusa.com/PRODUCTS/ElectronOptics/ScanningElectronMicroscopes(SEM)/FESEM/JSM7500F/tabid/394/Default.aspx|x 25 to 1,000,000 (printed as a 120mm x 90mm micrograph)]] | | | | | | | | | |
| | |JEOL |JSM-7610F | | | |[[http://www.jeolusa.com/PRODUCTS/ElectronOptics/ScanningElectronMicroscopes(SEM)/FESEM/JSM7610F/tabid/544/Default.aspx#199137-specifications|1.0 nm (15 kV), 0.6 nm (30 kV) attainable in STEM]] | | | | | | | | | |
| | |JEOL |JSM-7800F | | | |[[http://www.jeolusa.com/PRODUCTS/ElectronOptics/ScanningElectronMicroscopes(SEM)/FESEM/JSM7800F/tabid/869/Default.aspx|1.0nm at 15kV, 0.8nm at 15kV, GB mode]] | | | | | | | | | |
| | |JEOL |JSM-IC25S |1970's | | | | | | | | | |[1970s] | | |
| | |JEOL |JSM-IC845 |1982/3? | | | | | | | | | |"capable of holding 6 inch semiconductor wafers" [1980s] | | |
| | |JEOL |JSM-IC848 |1982/3? | | | | | | | | | |"cold handle 9 inch wafers" [1980s] | | |
| | |JEOL |JSM IC-848A | | | | | | |[[http://www.ebay.com/itm/JEOL-JSM-IC-848A-Scanning-Electron-Microscope-with-Thermo-Noran-EDS-/130973712504?pt=LH_DefaultDomain_0&hash=item1e7ea44078|6,000 used 10/05/2013]] | | | | | | |
| | |JEOL |JSM-IT300LV | | | | \\ [[http://www.jeolusa.com/PRODUCTS/ElectronOptics/ScanningElectronMicroscopesSEM/HighVacuumLowVacuum/tabid/186/Default.aspx|HV: 3nm @ 30kV (SE)]] \\ \\ [[http://www.jeolusa.com/PRODUCTS/ElectronOptics/ScanningElectronMicroscopesSEM/HighVacuumLowVacuum/tabid/186/Default.aspx|LV: 4nm @ 30kV (BSE)]] | | | | | | | | | |
| | |JEOL |JSM-T20 | | | | | | |[[http://www.ebay.com/itm/JEOL-JSM-T20-SCANNING-ELECTRON-MICROSCOPE-1ST-GEN-57318-/300934632704?pt=BI_Control_Systems_PLCs&hash=item46111a1500|828]] | | | | | | |
| | |JEOL |JSM-T200 | | | | | | |[[http://www.ebay.com/itm/JEOL-JSM-T200-Scanning-Electron-Microscope-With-Fuly-Operational-EDS-and-Chiller-/360679937251?pt=LH_DefaultDomain_0&hash=item53fa3314e3|12,000]] | | | | | | |
| | |JEOL |JSM-T220 |1986 | | | | | | | | | |"auto-stigmator and auto-focus" [1980s] | | |
| | |JEOL |JSM-T330 |1986 | | | | | | | | | |"auto-stigmator and auto-focus" [1980s] | | |
| | |JEOL |JSM-T330A | | | | | | |[[http://www.ebay.com/itm/JEOL-JSM-T330A-ELECTRON-SCANNING-MICROSCOPE-AND-CONTROL-CENTER-S-N-MP-168121-3-/290714985190?pt=LH_DefaultDomain_0&hash=item43aff6a2e6|link]] | | | | | | |
| | |JEOL |JSM-U3 | |50 | |20 | | | | | | |[1960s] | | |
| | |JEOL |NeoScope Benchtop SEM | | | |[[http://www.jeolusa.com/PRODUCTS/ElectronOptics/ScanningElectronMicroscopes(SEM)/Benchtop/NeoScopeBenchtopSEM/tabid/870/Default.aspx|"10X to 60,000X (printed as a 128mm x 96mm micrograph)"]] | | | | | | |Benchtop | | |
| | |JEOL |T-200 | | | | | | | | | | | | | |
| | |JEOL |T-300 | | | | | | | | | | | | | |
| | |Leica Cambridge |S 360FE | | | | | | |[[http://www.ebay.com/itm/Leica-Cambridge-Instruments-S-360FE-SEM-Scanning-Electron-Microscope-Camscan-/180992856106?pt=LH_DefaultDomain_0&hash=item2a2403d02a|5000]] | | | | | | |
| | |Leica Cambridge |260 | | | | | | |[[http://www.ebay.com/itm/CAMBRIDGE-INSTRUMENTS-STEREO-SCAN-260-SCANNING-ELECTRON-MICROSCOPE-W-OXFORD-EDS-/290750338459?pt=LH_DefaultDomain_0&hash=item43b212159b|15,000]] | | | | | | |
| | |Leica Cambridge |Stereoscan 150u |1978 | | |7 [manual] | | |5,000 on craigslist | | | | | | |
| | |Leica Cambridge |Stereoscan 240 | | | | | | |[[http://www.ebay.com/itm/Cambridge-Instruments-Stereo-Scan-Model-240-Scanning-Electron-Microscope-System-/300948700632?pt=LH_DefaultDomain_0&hash=item4611f0bdd8|7395]] | | | | | | |
| | |Leica Cambridge |Stereoscan 430 | | | | | | | |[[http://siliconpr0n.org/media/leica_cambridge/stereoscan_430/operator_manual/|Yes]] | | | | | |
| | |Leica Cambridge |Stereoscan 440 | | | | | | | |[[http://siliconpr0n.org/media/leica_cambridge/stereoscan_440/stereoscan_440.pdf|Yes]] | | | | | |
| | |Leo |435VP | | | |4nm @ 30kV (HV) | | | | | | | | | |
| | |Leo |1530 | | | | | | | |[[http://siliconpr0n.org/media/leo/1530/20100929044721481.pdf|Yes]] | | | | | |
| | |Leo |1550 | | | | | | | | | | | | | |
| | |Phillips |FEG XL 40 | | | | |EDAX | |[[http://www.ebay.com/itm/PHILIPS-FEG-XL-40-SCANNING-ELECTRON-MICROSCOPE-W-EDAX-PV9760-57-/300980801721?pt=LH_DefaultDomain_0&hash=item4613da90b9|100,000]] | | | | | | |
| | |Phillips |501 |1977 |30 | |7 | | | | | | |[1970s] | | |
| | |Phillips |501B |1979 |30? | |7? |EDS, WDS | | | | | |[1970s] | | |
| | |Phillips |SEM 505 |1980 | | | | | | | | | |"new doped-yttrium silicate scintillator for the detection of backscattered electrons in its 1980 model SEM 505; this new detector was 200 times more sensitive to backscattered electrons than previous scintillators" [1980s] | | |
| | |Phillips |SEM 515 |1984 | | | | | | | | | |"improved on the 505 by adding computer-controlled automatic focussing and astigmation correction" [1980s] | | |
| | |Phillips |SEM 525 EB |1985 | | | | | | | | | |"created for functional testing of ICs" [1980s] | | |
| | |Phillips |SEM 525 IC |1985 | | | | | | | | | |"designed for the non-destructive testing of semiconductor wafers" [1980s] | | |
| | |Phillips |EM 300 accessory |1968 | | | | | | | | | |"attachment turned the TEM into an STEM" [1960s] | | |
| | |Phillips |PSEM 500 |1972 |50 | |10 | | | | | | |"Philips' first SEM" [1970s] | | |
| | |Phillips |PSEM 500M |1973 |50? | |10? | | | | | | |"designed for larger samples, accommodating specimens with dimensions of 153 mm x 146 mm x 84 mm" [1970s] | | |
| |{{:microscope:sem:dc:phillips:xl40:dc_sem.jpg?300}} |Phillips |XL-30 | | |W |3.5nm @ 30kV | | | | | | | | | |
| | |RCA |EMU-3 | | | | | | |[[http://www.ebay.com/itm/RCA-Electron-Microscopes-Vintage-EMU-3-and-EMU-4-/331036772721?pt=LH_DefaultDomain_0&hash=item4d13544971|275,000 for EMU-3/4 (way overpriced?)]] | | | | | | |
| | |RCA |EMU-4 | | | | | | |[[http://www.ebay.com/itm/RCA-Electron-Microscopes-Vintage-EMU-3-and-EMU-4-/331036772721?pt=LH_DefaultDomain_0&hash=item4d13544971|275,000 for EMU-3/4 (way overpriced?)]] | | | | | | |
| | |SEC |SNE-1500M | | | | | | | |[[http://siliconpr0n.org/media/sec/sne-1500m/SNE-1500M Manual_eng_042308[1].pdf|Yes]] | | |Tabletop | | |
| | |SEC |SNE-3000M | | | | | | | | | | |Tabletop | | |
| | |SEC |SNE-3000MB | | | | | | | | | | |Tabletop | | |
| | |SEC |SNE-3200M | | | | | | | | | | |Tabletop | | |
| | |SEC |SNE-4500M | | | | | | | | | | |Tabletop | | |
| | |Seron |AIS2100C | | | | | | | | | | | | | |
| | |Seron |AIS2200 | | | | | | | | | | | | | |
| | |Seron |AIS2300C | | | | | | | | | | | | | |
| | |Tescan |VEGA3 | | | | | | | |[[http://siliconpr0n.org/media/tescan/vega3/VEGA_manual_GEN_3_04_tisk.pdf|Yes]] | | | | | |
| | |Topcon |ABT-32 | | | |[[http://ds130.com/ABT-32.htm|5]] | | | | | | | | | |
| | |Topcon |ABT-60 | | | |[[http://ds130.com/ABT-60.htm|4]] | | | | | | | | | |
| | |Topcon |ABT-150 | | | | | | | | | | | | | |
| | |Topcon |SM-720 | | | |[[http://ds130.com/SM-720.htm|0.9]] | | | | | | | | | |
| | |Zeiss |DSM 960 | | | | | | |[[http://www.ebay.com/itm/ZEISS-SEM-Scanning-Electron-Microscope-Model-DSM-960-Turbo-Pump-/151026866735?pt=LH_DefaultDomain_0&|link]] | | | | | | |
| | |Zeiss |NEON 40 EsB | | |FE |2.5 nm @ 1 kV | | | | | | |"Canion FIB column" | | |
| | |Zeiss |SIGMA | | | | | | | |[[http://siliconpr0n.org/media/carl_zeiss/sigma/SEM_manual.pdf|Yes]] | | | | | |
| | |Zeiss |Supra 55VP | | |FE | \\ 1.7 nm @ 1 kV \\ \\ 2 nm @ 30 kV (VP) | | | | | | | | | |
| |
| Where: | |
| |
| * Gun type | |
| * WHP: tungsten hairpin | |
| * CFE: cold field emission | |
| * TFE: thermally assisted field emission | |
| |
| Misc notes: | |
| |
| * "1990s…Carl Zeiss and Leica joined to form LEO Electron Microscopy, Inc" [1990s] | |
| * "1996 Philips bought Electroscan…to form Philips Electroscan" [1990s] | |
| * 1997: "Philips Electron Optics and a company called FEI merged under the name FEI" [1990s] | |
| |
| ===== Privately owned ===== | |
| |
| List of privately owned SEMs (ie die hard SEMolites that we could probably collaborate with): | |
| |
| * [[http://uvicrec.blogspot.com/2014/04/a-new-toy-arrives.html|McMaster ISI Super III A]] | |
| * [[https://www.noisebridge.net/wiki/SEM|Noisebridge ISI TV Mini SEM]] | |
| * [[http://members.tm.net/lapointe2/Scanning_Electron_Microscope.html|lapointe2 ISI Super III A]] | |
| * [[http://www.youtube.com/watch?v=VdjYVF4a6iU|Ben Krasnow DIY SEM]] | |
| * [[http://www.youtube.com/watch?v=Xp0Qo6mEmAM|SCIFIaction: Our living room Scanning Electron Microscope (SEM)]] | |
| * Main site: [[http://www.sciencephotography.com/|http://www.sciencephotography.com/]] | |
| * [[https://plus.google.com/115971553634517134434/posts/3FyTakPD74T|Jeri Ellsworth: Video showing my electron microscope in action]] | |
| * [[http://hackaday.com/2010/10/25/gas-containment-for-laser-cutters/|Complete/working Amray 1800 + some of Cambridge and ASI SEM's]] | |
| * [[http://www.threedee.com/jmosn/microscopes/amray/index.html|This guy]] is trying to get rid of his Amray</font> 1610T </font> as of May 2013 | |
| * [[http://blog.lib.umn.edu/bbandli/semlablog/2008/04/|bbandli JEOL JSM-6490LV]] | |
| * DC: Philips XL30 | |
| * Sascha: Super IIIA | |
| * Markus: Aspex PSEM | |
| * Pumping station 1 (Leica Cambridge Stereoscan 430?) | |
| |
| ====== References ====== | |
| |
| * Might be interesting read and/or get in contact with them: [[http://blog.lib.umn.edu/bbandli/semlablog/|http://blog.lib.umn.edu/bbandli/semlablog/]] | |
| * Electron microscopy in the… | |
| * Electron microscopy in the 1960s: [[http://authors.library.caltech.edu/5456/1/hrst.mit.edu/hrs/materials/public/ElectronMicroscope/EM1960s.htm|http://authors.library.caltech.edu/5456/1/hrst.mit.edu/hrs/materials/public/ElectronMicroscope/EM1960s.htm]] | |
| * Electron microscopy in the 1970s: [[http://authors.library.caltech.edu/5456/1/hrst.mit.edu/hrs/materials/public/ElectronMicroscope/EM1970s.htm|http://authors.library.caltech.edu/5456/1/hrst.mit.edu/hrs/materials/public/ElectronMicroscope/EM1970s.htm]] | |
| * Electron microscopy in the 1980s: [[http://authors.library.caltech.edu/5456/1/hrst.mit.edu/hrs/materials/public/ElectronMicroscope/EM1980s.htm|http://authors.library.caltech.edu/5456/1/hrst.mit.edu/hrs/materials/public/ElectronMicroscope/EM1980s.htm]] | |
| * Electron microscopy in the 1990s: [[http://authors.library.caltech.edu/5456/1/hrst.mit.edu/hrs/materials/public/ElectronMicroscope/EM1990s.htm|http://authors.library.caltech.edu/5456/1/hrst.mit.edu/hrs/materials/public/ElectronMicroscope/EM1990s.htm]] | |
| * ISI research advert: [[http://webcache.googleusercontent.com/search?q=cache:PzDd1oLzlawJ:cdn-pubs.acs.org/doi/pdfplus/10.1021/ac50015a716+&cd=18&hl=en&ct=clnk&gl=us&client=ubuntu|http://webcache.googleusercontent.com/search?q=cache:PzDd1oLzlawJ:cdn-pubs.acs.org/doi/pdfplus/10.1021/ac50015a716+&cd=18&hl=en&ct=clnk&gl=us&client=ubuntu]] | |
| * OSU MINISEM1: [[http://www.science.oregonstate.edu/emfacility/?q=node/History/EM/MINISEM1|http://www.science.oregonstate.edu/emfacility/?q=node/History/EM/MINISEM1]] | |
| * Virago: [[http://www.drviragopete.com/scanning-electron-microscope.php|http://www.drviragopete.com/scanning-electron-microscope.php]] | |
| * DS130 | |
| * DS130: [[http://ds130.com/ds130.htm|http://ds130.com/ds130.htm]] | |
| * United Material Technologies, LLC. Equipment Analytical [UMT EA]: [[http://www.unitedmt.com/equipment_analytical.htm|http://www.unitedmt.com/equipment_analytical.htm]] | |
| * Taking apart the controls of a scanning electron microscope [AMS SEM]: [[http://amymakesstuff.com/2011/06/29/taking-apart-the-controls-of-a-scanning-electron-microscope/|http://amymakesstuff.com/2011/06/29/taking-apart-the-controls-of-a-scanning-electron-microscope/]] | |
| * Complete ISI Model 40 Scanning Electron Microscope ( SEM ) [dtradingpost ISI-40]: [[http://dtradingpost.com/isi40qte.htm|http://dtradingpost.com/isi40qte.htm]] | |
| * PTLI ISI-SS40: [[http://www.ptli.com/testlopedia/tests/sem.asp|http://www.ptli.com/testlopedia/tests/sem.asp]] | |
| * Microanalysis In Science and Engineering [TNTech MSE]: [[http://www.cae.tntech.edu/~jbiernacki/nsfteacherworkshop.htm|http://www.cae.tntech.edu/~jbiernacki/nsfteacherworkshop.htm]] | |
| * eBay 231289327125: [[http://www.ebay.com/usr/product4you80?_trksid=p2047675.l2559|product4you80]], “Set of ISI Scanning Electron Microscopes WB-6 w/ manual and accessories” | |
| * equipmatching: [[http://www.equipmatching.com/used_equipment/4/62/327603.php|http://www.equipmatching.com/used_equipment/4/62/327603.php]] | |
| * [[http://www.semtechsolutions.com/sites/default/files/2010-SEM-List.pdf|http://www.semtechsolutions.com/sites/default/files/2010-SEM-List.pdf]] | |
| |
| \\ | |
| |
