microscope:sem:start
                Differences
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| - | This page was originally created to help me figure out options for buying a SEM for personal use.   | ||
| - | Since then, it has served best as a magnet for other DIY SEM people to contact me and collaborate with each other.   | ||
| - | If you have any SEM material (pictures, user manual, schematics, etc) I am very interested.   | ||
| - | Also feel free to contact me if you are looking for info on a particular model and I'll see what I can dig up | ||
| - | |||
| - | I can be contacted at JohnDMcMaster< | ||
| - | |||
| - | |||
| - | ====== SEM model comparison ====== | ||
| - | |||
| - | A list of scanning electron microscopes.  | ||
| - | |||
| - | year reflects earliest reference to that SEM model.  | ||
| - | |||
| - | assume list prices are non-inflation adjusted from around year SEM was offered | ||
| - | |||
| - | ask prices were from around 10/05/2013 unless otherwise noted | ||
| - | |||
| - | I've included ultra-high voltage SEMs as well | ||
| - | |||
| - | schematic column marked Yes if at least one schematic from the unit is available (original or reverse engineered) | ||
| - | |||
| - | Some units may be duplicated.  | ||
| - | |||
| - | Document sources can be found in README.txt file in the same directory as the linked document | ||
| - | |||
| - | ^Image ^Vendor ^Model ^Year ^kV ^Gun ^Resolution (nm) ^Features ^List price ^Ask price ^Manual ^Schem ^SW ^Notes | | ||
| - | |{{: | ||
| - | |  |Amray |   \\ 900    \\   \\ (AMR-900)  | ||
| - | |{{: | ||
| - | |{{: | ||
| - | |{{: | ||
| - | |  |Amray |1200B |  |  |  |[[http:// | ||
| - | |  |Amray |1200C |  |  |  |  |  |  |[[http:// | ||
| - | | |Amray |1400D | | | | | | | | | | | | | ||
| - | | {{: | ||
| - | | {{: | ||
| - | | {{: | ||
| - | | {{: | ||
| - | | {{: | ||
| - | |  |Amray |1830D |  |  |  |  |  |  |[[http:// | ||
| - | | {{: | ||
| - | | |Amray |1845FE | | | |4 nm @ 1 kV \\ 1.5 nm @ 25 kV | | | | | | | | | ||
| - | | |Amray |1850 | | | | | | | | | | | | | ||
| - | |  |Amray |1860FE | ~1988 |  |TFE |7 nm @ 1 kV     \\ 1.5 nm @ 25 kV |  |  |[[http:// | ||
| - | | |Amray |1880FE | ~1988 | 10? | | 2 | | | | | | | | | ||
| - | | |Amray |1910FE | | |FE |7 nm @ 1 kV \\ 1.5 nm @ 30 kV | | | | | | | | | ||
| - | | |Amray |2030L | | | | | | | | | | | | | ||
| - | | |Amray |3200 | | | |6nm @ 30kV (LV) \\ 4nm @ 30kV (HV) | | | | | | |4 torr max pressure | | ||
| - | | |Amray |3300FE | | |FE |5 nm @ 1.5 kV \\ 1.5 nm @ 20 kV | | | | | | | | | ||
| - | |{{: | ||
| - | | |Akashi |Mini-SEM MSM2 |1972 |15 | | | | | | | | |[1970s] | | ||
| - | |  |Akashi |Mini-Rapid-Scan |1973 |15? |  |  |  |  |  |  |  |  |" | ||
| - | |  |Bausch & Lomb |LE 2100 |  |  |  |  |  |  |[[http:// | ||
| - | | |Ben Krasnow |BK-1? | | | | | | | | | | | | | ||
| - | | |Cambridge |S-90 | | | | | | | | | | | | | ||
| - | | |Cambridge |S-100 | | | | | | | | | | | | | ||
| - | | |Cambridge |S-120 | | | | | | | | | | | | | ||
| - | | |Cambridge |S-200 | | | | | | | | | | | | | ||
| - | | |Cambridge |S-240 | | | | | | | | | | | | | ||
| - | | |Cambridge |S-250 | | | | | | | | | | | | | ||
| - | | |Cambridge |S-260 | | | | | | | | | | | | | ||
| - | | |Cambridge |S-360 | | | | | | | | | | | | | ||
| - | |  |CEMES-LOE/ | ||
| - | | |Delong Instruments |LVEM5 | | | | | | | | | | | | | ||
| - | |  |ElectroScan (Phillips) |2020 |  |  |  |  |  |  |[[http:// | ||
| - | |  |ElectroScan (Phillips) |E30 |  |  |  |  |  |  |[[http:// | ||
| - | |  |ElectroScan (Phillips) |ESEM E3 |  |  |  |  |ESEM |  |[[http:// | ||
| - | | |Elionix |8900 | | |FE |5 nm @ 1 kV \\ 1.2 nm @ 30 kV | | | | | | | | | ||
| - | | |FEI |ESEM Explorer |1992 | | | |ESEM | | | | | |"up to 20 Torr" [1990s] | | ||
| - | |  |FEI |ESEM Model   2020 |1994 |  |  |  |ESEM |  |  |  |  |  |"50 Torr in the sample chamber" | ||
| - | |  |FEI |Nova NanoSEM 450 |  |  |  |  |  |  |  |[[http:// | ||
| - | |  |FEI |Nova NanoSEM 650 |  |  |  |  |  |  |  |[[http:// | ||
| - | | |FEI |Quanta 450FEG | | | | | | | |Yes | | | | | ||
| - | | |Hitachi |? |1954 |300 | | | | | | | | |[1960s] | | ||
| - | | |Hitachi |H-1250 |1976 |1250 | |0.204 | | | | | | |Successor to HU-3000 [1970s] | | ||
| - | |  |Hitachi |H-1300S |1982 |1300 |  |  |  |  |  |  |  |  |" based on ion radiation" | ||
| - | |  |Hitachi |HFS-2 |1972 |  |FE |3 |  |  |  |  |  |  |" | ||
| - | | |Hitachi |HSM-2A |1971 |40 | |15 |EDS, WDS | | | | | |[1970s] | | ||
| - | | |Hitachi |HU-500 |1964 |500 | | | | | | | | |[1960s] | | ||
| - | | |Hitachi |HU-650 |1968 |650 | | | | | | | | |[1960s] | | ||
| - | | |Hitachi |HU-1000 |1969 |1000 | | | | | | | | |[1960s] | | ||
| - | |  |Hitachi |HU-3000 |1970 |3000 |  |0.46 |  |  |  |  |  |  |" | ||
| - | |  |Hitachi |S-450 |1977 |  |  |  |  |  |  |  |  |  |" | ||
| - | |  |Hitachi |S-500 |1975 |  |  |  |  |  |[[http:// | ||
| - | |  |Hitachi |S-510 |  |  |  |  |EDX |  |  |  |  |  |[[http:// | ||
| - | |  |Hitachi |S-520 |  |  |  |  |  |  |[[http:// | ||
| - | |  |Hitachi |S-530 |  |  |  |  |  |  |[[http:// | ||
| - | |  |Hitachi |S-570 |  |  |  |  |  |  |[[http:// | ||
| - | |  |Hitachi |S-800 |  |  |  |  |  |  |[[http:// | ||
| - | |  |Hitachi |S-806 |  |  |  |  |  |  |  |  |  |  |"uses a cold field emitter as electron gun" [[http:// | ||
| - | | |Hitachi |S-806C | | | | | | | | | | | | | ||
| - | | |Hitachi |S-2100 | | | | | | | | | | | | | ||
| - | |  |Hitachi |S-2300 |  |  |  |  |WDX, EDX |  |[[http:// | ||
| - | | |Hitachi |S-2400 | | | | | | | | | | | | | ||
| - | |  |Hitachi |S-2460N |  |  |  |  |  |  |  |  |[[http:// | ||
| - | | |Hitachi |S-2500 | | | | | | | | | | | | | ||
| - | |  |Hitachi |S-2600N/H |  |  |  |  |  |  |  |  |[[http:// | ||
| - | | |Hitachi |S-2700 | | | | | | | | | | | | | ||
| - | | |Hitachi |S-3000 | | | | | | | | | | | | | ||
| - | |  |Hitachi |S-3000N/H |  |  |  |  |  |  |  |  |[[http:// | ||
| - | | |Hitachi |S-3200H | | | |3nm @ 30kV | | | | | | | | | ||
| - | |  |Hitachi |S-3200N |  |  |  |  |  |  |  |[[http:// | ||
| - | |  |Hitachi |S-3500N/H |  |  |  |  |  |  |  |  |[[http:// | ||
| - | |  |Hitachi |S-4000 |  |  |  |  |  |  |  |  |[[http:// | ||
| - | | |Hitachi |S-4100 | | | | | | | | | | | | | ||
| - | | |Hitachi |S-4200 | | |FE |5 nm @ 1 kV \\ 1.6 nm @ 15 kV | | | | | | | | | ||
| - | |  |Hitachi |S-4500 |  |  |  |  |  |  |  |  |[[http:// | ||
| - | |  |Hitachi |S-4700 |  |  |  |  |  |  |  |  |[[http:// | ||
| - | |  |Hitachi |S-4700-II |  |  |  |  |  |  |[[http:// | ||
| - | |  |Hitachi |S-4800 |  |  |  |  |  |  |  |[[http:// | ||
| - | |  |Hitachi |S-5200 |  |  |  |  |  |  |  |  |[[http:// | ||
| - | | |Hitachi |S-6000 | | | | | | | | | | | | | ||
| - | | |Hitachi |S-6100 | | | | | | | | | | | | | ||
| - | | |Hitachi |S-6200 | | | | | | | | | | | | | ||
| - | |  |Hitachi |S-6280H |  |  |  |  |  |  |  |  |  |  |[[http:// | ||
| - | | |Hitachi |S-6600 | | | | | | | | | | | | | ||
| - | |  |Hitachi |S-6780 |  |  |  |  |  |  |[[http:// | ||
| - | | |Hitachi |S-7000 | | | | | | | | | | | | | ||
| - | |  |Hitachi |S-9300 |  |  |  |  |  |  |[[http:// | ||
| - | | |Hitachi |SU-1500 | | | | | | | | | | | | | ||
| - | | |Hitachi |SU-8010 | | | | | | | | | | | | | ||
| - | | |Hitachi |SU-8020 | | | | | | | | | | | | | ||
| - | | |Hitachi |SU-8030 | | | | | | | | | | | | | ||
| - | | |Hitachi |SU-8040 | | | | | | | | | | | | | ||
| - | |  |Hitachi |XMA-5b |1966 |  |  |  |  |  |  |  |  |  |" | ||
| - | |{{: | ||
| - | |{{: | ||
| - | |{{: | ||
| - | |{{: | ||
| - | |  |ISI |ISI-100 |1977 |25? |LAB< | ||
| - | |{{: | ||
| - | |  |ISI |ISI-60 |1979 |  |  |  |  |< | ||
| - | |{{: | ||
| - | | {{: | ||
| - | |{{: | ||
| - | |  |ISI |[[: | ||
| - | |  |ISI |[[: | ||
| - | |{{: | ||
| - | |  {{: | ||
| - | |{{: | ||
| - | | | | SX-60 | | | | | | | | | | |Mentioned on ds130 website but I can't find any other references to this model | | ||
| - | |{{: | ||
| - | |  {{: | ||
| - | |  |JEOL |ClairScope JASM-6200 |  |  |  |[[http:// | ||
| - | | |JEOL |JAMP-10 | | | | | | | | | | | | | ||
| - | |  |JEOL |JEM-100S |  |  |  |  |  |  |[[http:// | ||
| - | |  |JEOL |JEM-ARM-1000 |1983 |1000 |  |  |  |  |  |  |  |  |" | ||
| - | | |JEOL |JFSM-30 |1974 | |FE |3 | | | | | | |[1970s] | | ||
| - | |  |JEOL |JRSM-50A |1973 |  |  |  |  |  |  |  |  |  |"hot stage for examining samples  | ||
| - | | |JEOL |JSM-1 | |50 | |50 | | | | | | |[1960s] | | ||
| - | | |JEOL |JSM-2 | |50 | | | | | | | | |[1960s] | | ||
| - | | |JEOL |JSM-U | |50 | | | | | | | | |[1960s] | | ||
| - | |  |JEOL |JSM-35CF |  |  |  |  |  |  |[[http:// | ||
| - | | |JEOL |JSM-35CFS |1982/3? | | | | | | | | | |[1980s] | | ||
| - | | |JEOL |JSM-820 | | | | | | | | | | | | | ||
| - | |  |JEOL |JSM-840 |1982/3? |  |  |[[http:// | ||
| - | |  |JEOL |JSM-5200 |  |  |  |  |  |  |[[http:// | ||
| - | | |JEOL |JSM-5400 | | | | | | | | | | | | | ||
| - | | |JEOL |JSM-5800 | | | | | | | | | | | | | ||
| - | |  |JEOL |JSM-5900 |  |  |  |  |  |  |[[http:// | ||
| - | | |JEOL |JSM-5900LV | | | |3nm @ 30kV (SEI) \\ 5nm @30kV (BEI) | | | | | | | | | ||
| - | | |JEOL |JSM-5910 | | | | | | | | | | | | | ||
| - | |  |JEOL |JSM-6100 |  |  |  |  |  |  |[[http:// | ||
| - | | |JEOL |JSM-6300LV | | | | | | | | | | | | | ||
| - | | |JEOL |JSM-6300F | | |CFE |1.5 nm @ 30 kV | | | | | | | | | ||
| - | |  |JEOL |JSM-6300V |  |  |  |  |  |  |[[http:// | ||
| - | | |JEOL |JSM-6340F | | |CFE |2.5 nm @ 1 kV \\ 1.2 nm @ 20 kV | | | | | | | | | ||
| - | |  |JEOL |JSM-6400 |  |  |  |  |  |  |    | ||
| - | |  |JEOL |JSM-6010LA InTouchScop |  |  |  |    | ||
| - | |  |JEOL |JSM-6510 |  |  |  |[[http:// | ||
| - | |  |JEOL |JSM-6510LV |  |  |  |    | ||
| - | |  |JEOL |JSM-7100F |  |  |  |[[http:// | ||
| - | |  |JEOL |JSM-7500F |  |  |  |[[http:// | ||
| - | |  |JEOL |JSM-7610F |  |  |  |[[http:// | ||
| - | |  |JEOL |JSM-7800F |  |  |  |[[http:// | ||
| - | |  |JEOL |JSM-IC25S |1970' | ||
| - | |  |JEOL |JSM-IC845 |1982/3? |  |  |  |  |  |  |  |  |  |" | ||
| - | |  |JEOL |JSM-IC848 |1982/3? |  |  |  |  |  |  |  |  |  |"cold handle 9 inch wafers" | ||
| - | |  |JEOL |JSM IC-848A |  |  |  |  |  |  |[[http:// | ||
| - | |  |JEOL |JSM-IT300LV |  |  |  |    | ||
| - | |  |JEOL |JSM-T20 |  |  |  |  |  |  |[[http:// | ||
| - | |  |JEOL |JSM-T200 |  |  |  |  |  |  |[[http:// | ||
| - | |  |JEOL |JSM-T220 |1986 |  |  |  |  |  |  |  |  |  |" | ||
| - | |  |JEOL |JSM-T330 |1986 |  |  |  |  |  |  |  |  |  |" | ||
| - | |  |JEOL |JSM-T330A |  |  |  |  |  |  |[[http:// | ||
| - | | |JEOL |JSM-U3 | |50 | |20 | | | | | | |[1960s] | | ||
| - | |  |JEOL |NeoScope Benchtop SEM |  |  |  |[[http:// | ||
| - | | |JEOL |T-200 | | | | | | | | | | | | | ||
| - | | |JEOL |T-300 | | | | | | | | | | | | | ||
| - | |  |Leica Cambridge |S 360FE |  |  |  |  |  |  |[[http:// | ||
| - | |  |Leica Cambridge |260 |  |  |  |  |  |  |[[http:// | ||
| - | | |Leica Cambridge |Stereoscan 150u |1978 | | |7 [manual] | | |5,000 on craigslist | | | | | | ||
| - | |  |Leica Cambridge |Stereoscan 240 |  |  |  |  |  |  |[[http:// | ||
| - | |  |Leica Cambridge |Stereoscan 430 |  |  |  |  |  |  |  |[[http:// | ||
| - | |  |Leica Cambridge |Stereoscan 440 |  |  |  |  |  |  |  |[[http:// | ||
| - | | |Leo |435VP | | | |4nm @ 30kV (HV) | | | | | | | | | ||
| - | |  |Leo |1530 |  |  |  |  |  |  |  |[[http:// | ||
| - | | |Leo |1550 | | | | | | | | | | | | | ||
| - | |  |Phillips |FEG XL 40 |  |  |  |  |EDAX |  |[[http:// | ||
| - | | |Phillips |501 |1977 |30 | |7 | | | | | | |[1970s] | | ||
| - | | |Phillips |501B |1979 |30? | |7? |EDS, WDS | | | | | |[1970s] | | ||
| - | |  |Phillips |SEM 505 |1980 |  |  |  |  |  |  |  |  |  |"new doped-yttrium silicate scintillator for the    | ||
| - | |  |Phillips |SEM 515 |1984 |  |  |  |  |  |  |  |  |  |" | ||
| - | |  |Phillips |SEM 525 EB |1985 |  |  |  |  |  |  |  |  |  |" | ||
| - | |  |Phillips |SEM 525 IC |1985 |  |  |  |  |  |  |  |  |  |" | ||
| - | |  |Phillips |EM 300 accessory |1968 |  |  |  |  |  |  |  |  |  |" | ||
| - | |  |Phillips |PSEM 500 |1972 |50 |  |10 |  |  |  |  |  |  |" | ||
| - | |  |Phillips |PSEM 500M |1973 |50? |  |10? |  |  |  |  |  |  |" | ||
| - | |{{: | ||
| - | |  |RCA |EMU-3 |  |  |  |  |  |  |[[http:// | ||
| - | |  |RCA |EMU-4 |  |  |  |  |  |  |[[http:// | ||
| - | |  |SEC |SNE-1500M |  |  |  |  |  |  |  |[[http:// | ||
| - | | |SEC |SNE-3000M | | | | | | | | | | |Tabletop | | ||
| - | | |SEC |SNE-3000MB | | | | | | | | | | |Tabletop | | ||
| - | | |SEC |SNE-3200M | | | | | | | | | | |Tabletop | | ||
| - | | |SEC |SNE-4500M | | | | | | | | | | |Tabletop | | ||
| - | | |Seron |AIS2100C | | | | | | | | | | | | | ||
| - | | |Seron |AIS2200 | | | | | | | | | | | | | ||
| - | | |Seron |AIS2300C | | | | | | | | | | | | | ||
| - | |  |Tescan |VEGA3 |  |  |  |  |  |  |  |[[http:// | ||
| - | |  |Topcon |ABT-32 |  |  |  |[[http:// | ||
| - | |  |Topcon |ABT-60 |  |  |  |[[http:// | ||
| - | | |Topcon |ABT-150 | | | | | | | | | | | | | ||
| - | |  |Topcon |SM-720 |  |  |  |[[http:// | ||
| - | |  |Zeiss |DSM 960 |  |  |  |  |  |  |[[http:// | ||
| - | |  |Zeiss |NEON 40 EsB |  |  |FE |2.5 nm @ 1 kV |  |  |  |  |  |  |" | ||
| - | |  |Zeiss |SIGMA |  |  |  |  |  |  |  |[[http:// | ||
| - | | |Zeiss |Supra 55VP | | |FE | \\ 1.7 nm @ 1 kV \\ \\ 2 nm @ 30 kV (VP) | | | | | | | | | ||
| - | |||
| - | Where: | ||
| - | |||
| - | * Gun type | ||
| - | * WHP: tungsten hairpin | ||
| - | * CFE: cold field emission | ||
| - | * TFE: thermally assisted field emission | ||
| - | |||
| - | Misc notes: | ||
| - | |||
| - |     * " | ||
| - |     * "1996 Philips bought Electroscan…to form Philips Electroscan" | ||
| - |     * 1997: " | ||
| - | |||
| - | ===== Privately owned ===== | ||
| - | |||
| - | List of privately owned SEMs (ie die hard SEMolites that we could probably collaborate with): | ||
| - | |||
| - |     * [[http:// | ||
| - |     * [[https:// | ||
| - |     * [[http:// | ||
| - |     * [[http:// | ||
| - |     *  [[http:// | ||
| - |       * Main site: [[http:// | ||
| - |     *  [[https:// | ||
| - |       * [[http:// | ||
| - |     * [[http:// | ||
| - |     * [[http:// | ||
| - | * DC: Philips XL30 | ||
| - | * Sascha: Super IIIA | ||
| - | * Markus: Aspex PSEM | ||
| - | * Pumping station 1 (Leica Cambridge Stereoscan 430?) | ||
| - | |||
| - | ====== References ====== | ||
| - | |||
| - |     * Might be interesting read and/or get in contact with them: [[http:// | ||
| - | * Electron microscopy in the… | ||
| - |     * Electron microscopy in the 1960s: [[http:// | ||
| - |     * Electron microscopy in the 1970s: [[http:// | ||
| - |     * Electron microscopy in the 1980s: [[http:// | ||
| - |     * Electron microscopy in the 1990s: [[http:// | ||
| - |     * ISI research advert: [[http:// | ||
| - |     * OSU MINISEM1: [[http:// | ||
| - |     * Virago: [[http:// | ||
| - | * DS130 | ||
| - |       * DS130: [[http:// | ||
| - |     * United Material Technologies, | ||
| - |     * Taking apart the controls of a scanning electron microscope [AMS SEM]: [[http:// | ||
| - |     * Complete ISI Model 40 Scanning Electron Microscope ( SEM ) [dtradingpost ISI-40]: [[http:// | ||
| - |     * PTLI ISI-SS40: [[http:// | ||
| - |     * Microanalysis In Science and Engineering [TNTech MSE]: [[http:// | ||
| - |     * eBay 231289327125: | ||
| - |     * equipmatching: | ||
| - |     * [[http:// | ||
| - | |||
| - | \\ | ||
microscope/sem/start.1407601850.txt.gz · Last modified: 2014/08/09 16:30 by mcmaster
                
                