microscope:sem:start
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microscope:sem:start [2014/08/09 01:30] – mcmaster | microscope:sem:start [Unknown date] (current) – removed - external edit (Unknown date) 127.0.0.1 | ||
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- | This page was originally created to help me figure out options for buying a SEM for personal use. Since then, it has served best as a magnet for other DIY SEM people to contact me and collaborate with each other. | ||
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- | I can be contacted at JohnDMcMaster< | ||
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- | ====== SEM model comparison ====== | ||
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- | A list of scanning electron microscopes. | ||
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- | year reflects earliest reference to that SEM model. | ||
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- | assume list prices are non-inflation adjusted from around year SEM was offered | ||
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- | ask prices were from around 10/05/2013 unless otherwise noted | ||
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- | I've included ultra-high voltage SEMs as well | ||
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- | schematic column marked Yes if at least one schematic from the unit is available (original or reverse engineered) | ||
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- | Some units may be duplicated. | ||
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- | ^Image ^Vendor ^Model ^Year ^kV ^Gun ^Resolution (nm) ^Features ^List price ^Ask price ^Manual ^Schem ^SW ^Notes | | ||
- | |{{: | ||
- | | |Amray | \\ 900 \\ \\ (AMR-900) | ||
- | |{{: | ||
- | |{{: | ||
- | |{{: | ||
- | | |Amray |1200B | | | |[[http:// | ||
- | | |Amray |1200C | | | | | | |[[http:// | ||
- | | |Amray |1400D | | | | | | | | | | | | | ||
- | | {{: | ||
- | | {{: | ||
- | | {{: | ||
- | | {{: | ||
- | | {{: | ||
- | | |Amray |1830D | | | | | | |[[http:// | ||
- | | {{: | ||
- | | |Amray |1845 | | | |4 nm @ 1 kV \\ 1.5 nm @ 25 kV | | | | | | | | | ||
- | | |Amray |1850 | | | | | | | | | | | | | ||
- | | |Amray |1860FE | ~1988 | |TFE |7 nm @ 1 kV \\ 1.5 nm @ 25 kV | | |[[http:// | ||
- | | |Amray |1880FE | ~1988 | 10? | | 2 | | | | | | | | | ||
- | | |Amray |1910 | | |FE |7 nm @ 1 kV \\ 1.5 nm @ 30 kV | | | | | | | | | ||
- | | |Amray |2030L | | | | | | | | | | | | | ||
- | | |Amray |3200 | | | |6nm @ 30kV (LV) \\ 4nm @ 30kV (HV) | | | | | | |4 torr max pressure | | ||
- | | |Amray |3300 | | |FE |5 nm @ 1.5 kV \\ 1.5 nm @ 20 kV | | | | | | | | | ||
- | |{{: | ||
- | | |Akashi |Mini-SEM MSM2 |1972 |15 | | | | | | | | |[1970s] | | ||
- | | |Akashi |Mini-Rapid-Scan |1973 |15? | | | | | | | | |" | ||
- | | |Bausch & Lomb |LE 2100 | | | | | | |[[http:// | ||
- | | |Ben Krasnow |BK-1? | | | | | | | | | | | | | ||
- | | |Cambridge |S-90 | | | | | | | | | | | | | ||
- | | |Cambridge |S-100 | | | | | | | | | | | | | ||
- | | |Cambridge |S-120 | | | | | | | | | | | | | ||
- | | |Cambridge |S-200 | | | | | | | | | | | | | ||
- | | |Cambridge |S-240 | | | | | | | | | | | | | ||
- | | |Cambridge |S-250 | | | | | | | | | | | | | ||
- | | |Cambridge |S-260 | | | | | | | | | | | | | ||
- | | |Cambridge |S-360 | | | | | | | | | | | | | ||
- | | |CEMES-LOE/ | ||
- | | |Delong Instruments |LVEM5 | | | | | | | | | | | | | ||
- | | |ElectroScan (Phillips) |2020 | | | | | | |[[http:// | ||
- | | |ElectroScan (Phillips) |E30 | | | | | | |[[http:// | ||
- | | |ElectroScan (Phillips) |ESEM E3 | | | | |ESEM | |[[http:// | ||
- | | |Elionix |8900 | | |FE |5 nm @ 1 kV \\ 1.2 nm @ 30 kV | | | | | | | | | ||
- | | |FEI |ESEM Explorer |1992 | | | |ESEM | | | | | |"up to 20 Torr" [1990s] | | ||
- | | |FEI |ESEM Model 2020 |1994 | | | |ESEM | | | | | |"50 Torr in the sample chamber" | ||
- | | |FEI |Nova NanoSEM 450 | | | | | | | |[[http:// | ||
- | | |FEI |Nova NanoSEM 650 | | | | | | | |[[http:// | ||
- | | |FEI |Quanta 450FEG | | | | | | | |Yes | | | | | ||
- | | |Hitachi |? |1954 |300 | | | | | | | | |[1960s] | | ||
- | | |Hitachi |H-1250 |1976 |1250 | |0.204 | | | | | | |Successor to HU-3000 [1970s] | | ||
- | | |Hitachi |H-1300S |1982 |1300 | | | | | | | | |" based on ion radiation" | ||
- | | |Hitachi |HFS-2 |1972 | |FE |3 | | | | | | |" | ||
- | | |Hitachi |HSM-2A |1971 |40 | |15 |EDS, WDS | | | | | |[1970s] | | ||
- | | |Hitachi |HU-500 |1964 |500 | | | | | | | | |[1960s] | | ||
- | | |Hitachi |HU-650 |1968 |650 | | | | | | | | |[1960s] | | ||
- | | |Hitachi |HU-1000 |1969 |1000 | | | | | | | | |[1960s] | | ||
- | | |Hitachi |HU-3000 |1970 |3000 | |0.46 | | | | | | |" | ||
- | | |Hitachi |S-450 |1977 | | | | | | | | | |" | ||
- | | |Hitachi |S-500 |1975 | | | | | |[[http:// | ||
- | | |Hitachi |S-510 | | | | |EDX | | | | | |[[http:// | ||
- | | |Hitachi |S-520 | | | | | | |[[http:// | ||
- | | |Hitachi |S-530 | | | | | | |[[http:// | ||
- | | |Hitachi |S-570 | | | | | | |[[http:// | ||
- | | |Hitachi |S-800 | | | | | | |[[http:// | ||
- | | |Hitachi |S-806 | | | | | | | | | | |"uses a cold field emitter as electron gun" [[http:// | ||
- | | |Hitachi |S-806C | | | | | | | | | | | | | ||
- | | |Hitachi |S-2100 | | | | | | | | | | | | | ||
- | | |Hitachi |S-2300 | | | | |WDX, EDX | |[[http:// | ||
- | | |Hitachi |S-2400 | | | | | | | | | | | | | ||
- | | |Hitachi |S-2460N | | | | | | | | |[[http:// | ||
- | | |Hitachi |S-2500 | | | | | | | | | | | | | ||
- | | |Hitachi |S-2600N/H | | | | | | | | |[[http:// | ||
- | | |Hitachi |S-2700 | | | | | | | | | | | | | ||
- | | |Hitachi |S-3000 | | | | | | | | | | | | | ||
- | | |Hitachi |S-3000N/H | | | | | | | | |[[http:// | ||
- | | |Hitachi |S-3200H | | | |3nm @ 30kV | | | | | | | | | ||
- | | |Hitachi |S-3200N | | | | | | | |[[http:// | ||
- | | |Hitachi |S-3500N/H | | | | | | | | |[[http:// | ||
- | | |Hitachi |S-4000 | | | | | | | | |[[http:// | ||
- | | |Hitachi |S-4100 | | | | | | | | | | | | | ||
- | | |Hitachi |S-4200 | | |FE |5 nm @ 1 kV \\ 1.6 nm @ 15 kV | | | | | | | | | ||
- | | |Hitachi |S-4500 | | | | | | | | |[[http:// | ||
- | | |Hitachi |S-4700 | | | | | | | | |[[http:// | ||
- | | |Hitachi |S-4700-II | | | | | | |[[http:// | ||
- | | |Hitachi |S-4800 | | | | | | | |[[http:// | ||
- | | |Hitachi |S-5200 | | | | | | | | |[[http:// | ||
- | | |Hitachi |S-6000 | | | | | | | | | | | | | ||
- | | |Hitachi |S-6100 | | | | | | | | | | | | | ||
- | | |Hitachi |S-6200 | | | | | | | | | | | | | ||
- | | |Hitachi |S-6280H | | | | | | | | | | |[[http:// | ||
- | | |Hitachi |S-6600 | | | | | | | | | | | | | ||
- | | |Hitachi |S-6780 | | | | | | |[[http:// | ||
- | | |Hitachi |S-7000 | | | | | | | | | | | | | ||
- | | |Hitachi |S-9300 | | | | | | |[[http:// | ||
- | | |Hitachi |SU-1500 | | | | | | | | | | | | | ||
- | | |Hitachi |SU-8010 | | | | | | | | | | | | | ||
- | | |Hitachi |SU-8020 | | | | | | | | | | | | | ||
- | | |Hitachi |SU-8030 | | | | | | | | | | | | | ||
- | | |Hitachi |SU-8040 | | | | | | | | | | | | | ||
- | | |Hitachi |XMA-5b |1966 | | | | | | | | | |" | ||
- | |{{: | ||
- | |{{: | ||
- | |{{: | ||
- | |{{: | ||
- | | |ISI |ISI-100 |1977 |25? |LAB< | ||
- | |{{: | ||
- | | |ISI |ISI-60 |1979 | | | | |< | ||
- | |{{: | ||
- | | {{: | ||
- | |{{: | ||
- | | |ISI |[[: | ||
- | | |ISI |[[: | ||
- | |{{: | ||
- | | {{: | ||
- | |{{: | ||
- | | | | SX-60 | | | | | | | | | | |Mentioned on ds130 website but I can't find any other references to this model | | ||
- | |{{: | ||
- | | {{: | ||
- | | |JEOL |ClairScope JASM-6200 | | | |[[http:// | ||
- | | |JEOL |JAMP-10 | | | | | | | | | | | | | ||
- | | |JEOL |JEM-100S | | | | | | |[[http:// | ||
- | | |JEOL |JEM-ARM-1000 |1983 |1000 | | | | | | | | |" | ||
- | | |JEOL |JFSM-30 |1974 | |FE |3 | | | | | | |[1970s] | | ||
- | | |JEOL |JRSM-50A |1973 | | | | | | | | | |"hot stage for examining samples | ||
- | | |JEOL |JSM-1 | |50 | |50 | | | | | | |[1960s] | | ||
- | | |JEOL |JSM-2 | |50 | | | | | | | | |[1960s] | | ||
- | | |JEOL |JSM-U | |50 | | | | | | | | |[1960s] | | ||
- | | |JEOL |JSM-35CF | | | | | | |[[http:// | ||
- | | |JEOL |JSM-35CFS |1982/3? | | | | | | | | | |[1980s] | | ||
- | | |JEOL |JSM-820 | | | | | | | | | | | | | ||
- | | |JEOL |JSM-840 |1982/3? | | |[[http:// | ||
- | | |JEOL |JSM-5200 | | | | | | |[[http:// | ||
- | | |JEOL |JSM-5400 | | | | | | | | | | | | | ||
- | | |JEOL |JSM-5800 | | | | | | | | | | | | | ||
- | | |JEOL |JSM-5900 | | | | | | |[[http:// | ||
- | | |JEOL |JSM-5900LV | | | |3nm @ 30kV (SEI) \\ 5nm @30kV (BEI) | | | | | | | | | ||
- | | |JEOL |JSM-5910 | | | | | | | | | | | | | ||
- | | |JEOL |JSM-6100 | | | | | | |[[http:// | ||
- | | |JEOL |JSM-6300LV | | | | | | | | | | | | | ||
- | | |JEOL |JSM-6300F | | |CFE |1.5 nm @ 30 kV | | | | | | | | | ||
- | | |JEOL |JSM-6300V | | | | | | |[[http:// | ||
- | | |JEOL |JSM-6340F | | |CFE |2.5 nm @ 1 kV \\ 1.2 nm @ 20 kV | | | | | | | | | ||
- | | |JEOL |JSM-6400 | | | | | | | | ||
- | | |JEOL |JSM-6010LA InTouchScop | | | | | ||
- | | |JEOL |JSM-6510 | | | |[[http:// | ||
- | | |JEOL |JSM-6510LV | | | | | ||
- | | |JEOL |JSM-7100F | | | |[[http:// | ||
- | | |JEOL |JSM-7500F | | | |[[http:// | ||
- | | |JEOL |JSM-7610F | | | |[[http:// | ||
- | | |JEOL |JSM-7800F | | | |[[http:// | ||
- | | |JEOL |JSM-IC25S |1970' | ||
- | | |JEOL |JSM-IC845 |1982/3? | | | | | | | | | |" | ||
- | | |JEOL |JSM-IC848 |1982/3? | | | | | | | | | |"cold handle 9 inch wafers" | ||
- | | |JEOL |JSM IC-848A | | | | | | |[[http:// | ||
- | | |JEOL |JSM-IT300LV | | | | | ||
- | | |JEOL |JSM-T20 | | | | | | |[[http:// | ||
- | | |JEOL |JSM-T200 | | | | | | |[[http:// | ||
- | | |JEOL |JSM-T220 |1986 | | | | | | | | | |" | ||
- | | |JEOL |JSM-T330 |1986 | | | | | | | | | |" | ||
- | | |JEOL |JSM-T330A | | | | | | |[[http:// | ||
- | | |JEOL |JSM-U3 | |50 | |20 | | | | | | |[1960s] | | ||
- | | |JEOL |NeoScope Benchtop SEM | | | |[[http:// | ||
- | | |JEOL |T-200 | | | | | | | | | | | | | ||
- | | |JEOL |T-300 | | | | | | | | | | | | | ||
- | | |Leica Cambridge |S 360FE | | | | | | |[[http:// | ||
- | | |Leica Cambridge |260 | | | | | | |[[http:// | ||
- | | |Leica Cambridge |Stereoscan 150u |1978 | | |7 [manual] | | |5,000 on craigslist | | | | | | ||
- | | |Leica Cambridge |Stereoscan 240 | | | | | | |[[http:// | ||
- | | |Leica Cambridge |Stereoscan 430 | | | | | | | |[[http:// | ||
- | | |Leica Cambridge |Stereoscan 440 | | | | | | | |[[http:// | ||
- | | |Leo |435VP | | | |4nm @ 30kV (HV) | | | | | | | | | ||
- | | |Leo |1530 | | | | | | | |[[http:// | ||
- | | |Leo |1550 | | | | | | | | | | | | | ||
- | | |Phillips |FEG XL 40 | | | | |EDAX | |[[http:// | ||
- | | |Phillips |501 |1977 |30 | |7 | | | | | | |[1970s] | | ||
- | | |Phillips |501B |1979 |30? | |7? |EDS, WDS | | | | | |[1970s] | | ||
- | | |Phillips |SEM 505 |1980 | | | | | | | | | |"new doped-yttrium silicate scintillator for the | ||
- | | |Phillips |SEM 515 |1984 | | | | | | | | | |" | ||
- | | |Phillips |SEM 525 EB |1985 | | | | | | | | | |" | ||
- | | |Phillips |SEM 525 IC |1985 | | | | | | | | | |" | ||
- | | |Phillips |EM 300 accessory |1968 | | | | | | | | | |" | ||
- | | |Phillips |PSEM 500 |1972 |50 | |10 | | | | | | |" | ||
- | | |Phillips |PSEM 500M |1973 |50? | |10? | | | | | | |" | ||
- | |{{: | ||
- | | |RCA |EMU-3 | | | | | | |[[http:// | ||
- | | |RCA |EMU-4 | | | | | | |[[http:// | ||
- | | |SEC |SNE-1500M | | | | | | | |[[http:// | ||
- | | |SEC |SNE-3000M | | | | | | | | | | |Tabletop | | ||
- | | |SEC |SNE-3000MB | | | | | | | | | | |Tabletop | | ||
- | | |SEC |SNE-3200M | | | | | | | | | | |Tabletop | | ||
- | | |SEC |SNE-4500M | | | | | | | | | | |Tabletop | | ||
- | | |Seron |AIS2100C | | | | | | | | | | | | | ||
- | | |Seron |AIS2200 | | | | | | | | | | | | | ||
- | | |Seron |AIS2300C | | | | | | | | | | | | | ||
- | | |Tescan |VEGA3 | | | | | | | |[[http:// | ||
- | | |Topcon |ABT-32 | | | |[[http:// | ||
- | | |Topcon |ABT-60 | | | |[[http:// | ||
- | | |Topcon |ABT-150 | | | | | | | | | | | | | ||
- | | |Topcon |SM-720 | | | |[[http:// | ||
- | | |Zeiss |DSM 960 | | | | | | |[[http:// | ||
- | | |Zeiss |NEON 40 EsB | | |FE |2.5 nm @ 1 kV | | | | | | |" | ||
- | | |Zeiss |SIGMA | | | | | | | |[[http:// | ||
- | | |Zeiss |Supra 55VP | | |FE | \\ 1.7 nm @ 1 kV \\ \\ 2 nm @ 30 kV (VP) | | | | | | | | | ||
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- | Where: | ||
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- | * Gun type | ||
- | * WHP: tungsten hairpin | ||
- | * CFE: cold field emission | ||
- | * TFE: thermally assisted field emission | ||
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- | Misc notes: | ||
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- | * " | ||
- | * "1996 Philips bought Electroscan…to form Philips Electroscan" | ||
- | * 1997: " | ||
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- | ===== Privately owned ===== | ||
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- | List of privately owned SEMs (ie die hard SEMolites that we could probably collaborate with): | ||
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- | * [[http:// | ||
- | * [[https:// | ||
- | * [[http:// | ||
- | * [[http:// | ||
- | * [[http:// | ||
- | * Main site: [[http:// | ||
- | * [[https:// | ||
- | * [[http:// | ||
- | * [[http:// | ||
- | * [[http:// | ||
- | * DC: Philips XL30 | ||
- | * Sascha: Super IIIA | ||
- | * Markus: Aspex PSEM | ||
- | * Pumping station 1 (Leica Cambridge Stereoscan 430?) | ||
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- | ====== References ====== | ||
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- | * Might be interesting read and/or get in contact with them: [[http:// | ||
- | * Electron microscopy in the… | ||
- | * Electron microscopy in the 1960s: [[http:// | ||
- | * Electron microscopy in the 1970s: [[http:// | ||
- | * Electron microscopy in the 1980s: [[http:// | ||
- | * Electron microscopy in the 1990s: [[http:// | ||
- | * ISI research advert: [[http:// | ||
- | * OSU MINISEM1: [[http:// | ||
- | * Virago: [[http:// | ||
- | * DS130 | ||
- | * DS130: [[http:// | ||
- | * United Material Technologies, | ||
- | * Taking apart the controls of a scanning electron microscope [AMS SEM]: [[http:// | ||
- | * Complete ISI Model 40 Scanning Electron Microscope ( SEM ) [dtradingpost ISI-40]: [[http:// | ||
- | * PTLI ISI-SS40: [[http:// | ||
- | * Microanalysis In Science and Engineering [TNTech MSE]: [[http:// | ||
- | * eBay 231289327125: | ||
- | * equipmatching: | ||
- | * [[http:// | ||
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- | \\ | ||
microscope/sem/start.1407547815.txt.gz · Last modified: 2014/08/09 01:30 by mcmaster