mcmaster:tech_inst:k2_ind
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mcmaster:tech_inst:k2_ind [2015/04/05 02:09] – [K2 IND: eBay] mcmaster | mcmaster:tech_inst:k2_ind [2016/07/12 03:38] (current) – removed mcmaster | ||
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- | I've acquired 2 or 3 K2 IND systems and have mixed/ | ||
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- | ====== pr0nk2ind mk1 ====== | ||
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- | Given the quality of this system and how much I bid to get other systems, this system has been surprisingly low cost to build. | ||
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- | Combining parts into a working high quality system composed of: | ||
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- | ^Image ^Vendor ^Model ^Description ^Source system ^Notes | | ||
- | | |Zygo / Tech Inst |KMS310RT |Chassis |Disp Serv K2 |base / Z axis | | ||
- | | |Tech |K2IND-KMS310 |Illuminator |Disp Serv K2 | | | ||
- | | |Nikon | |Lamphouse |Disp Serv K2 |Mercury burner | | ||
- | | |Nikon |HB-10103AF |Lamp PS |Disp Serv K2 |Mercury burner PS | | ||
- | | |Tech Inst? |? |XY stepper table |Disp Serv XY | | | ||
- | | |Compumotor |M57-102 |XY stepper driver |Disp Serv XY | | | ||
- | | |Gecko |G320X |Z servo driver |Gecko | \\ Came with a gecko! \\ | | ||
- | | |Nikon |CF Plan |Objective |Disp Serv K2 | \\ 10x, 20x, 50x, 100x \\ \\ Missing the 5x, has a slot for it \\ | | ||
- | | |Nikon |? |Observation tube, trinocular |eBay K2 |Original system was binocular | | ||
- | | |NRC |Model 39 |Tilt correction |eBay |Mirror mount | | ||
- | | |UVNet |Enclosed pr0ndexer |Indexer |Digikey, Amazon | \\ 2.5 combicon \\ \\ Lovingly assembled \\ | | ||
- | | |UVNet |pr0nscope |Control software |N/A | | | ||
- | | |Lenovo |t61p |Control laptop |weird stuff | | | ||
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- | ====== K2 IND: Nikon eBay ====== | ||
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- | 210 mm optics | ||
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- | Came mostly complete save objectives. | ||
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- | ====== K2 IND: disposition services (Zygo) ====== | ||
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- | {{: | ||
- | {{: | ||
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- | Above: system at auction. | ||
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- | Intended to be a mask aligner. | ||
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- | Very heavy! | ||
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- | Came as a complete system minus control system: | ||
- | * Mercury burner w/ PS | ||
- | * Fiber illuminator w/ PS | ||
- | * Nikon CF Plan objectives (4). Something like %< | ||
- | * 10x | ||
- | * 20x | ||
- | * 100x | ||
- | * TMC pneumatic anti-vibration table | ||
- | * Motorized servo XY table | ||
- | * Motorized Z axis (course focus) | ||
- | * Piezo Z axis (fine focus) | ||
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- | This page is about piecing it together to try to get it working again | ||
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- | It came with a very small subsection of the user man. I was able to contact Zygo and get some more info | ||
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- | ===== Chasis ===== | ||
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- | Dataplate: | ||
- | < | ||
- | Technical Instrument Company | ||
- | 650 North Mary Avenue | ||
- | Sunyvale, CA 94086-2906 | ||
- | Model: KMS310RT | ||
- | Serial No: XXX | ||
- | Assembly No: 015-00007-AA | ||
- | Manufacturered: | ||
- | THIS PRODUCT CONFORMS TO 21 CFR | ||
- | 1040 AT DATE OF MANUFACTURE | ||
- | </ | ||
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- | ===== K2 IND ===== | ||
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- | TMS300 or something | ||
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- | Had a neutral density filter rattling around when I got it. Have not looked to see where it came from. Have not tried spinning it up | ||
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- | Mercury burner: HB-10103AF | ||
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- | < | ||
- | Technical Instrument Company | ||
- | 650 North Mary Avenue | ||
- | Sunnyvale, CA 94086-2906 | ||
- | Model: K2IND-KMS310 | ||
- | Serial No: 9635-3235 | ||
- | Assembly No: 200-00013-AJ | ||
- | Manufactured: | ||
- | </ | ||
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- | ===== Motorized Z axis ===== | ||
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- | {{: | ||
- | {{: | ||
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- | Above: Zygo electronics overview | ||
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- | Have this sort of working using Gecko drive but not very well | ||
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- | ^ Signal ^ Encoder wire ^ Cable wire ^ Notes ^ | ||
- | | Floating | Shield | Clear unshielded | | | ||
- | | Common | Black | Black | | | ||
- | | +5V | White | White | | | ||
- | | A | Brown | Orange | | | ||
- | | B | Red | Red | | | ||
- | | Z | Yellow | N/C | Probably once-per-rev reference mark | | ||
- | | ? | N/C | Green | ? | | ||
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- | ==== Motor details ==== | ||
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- | Motor: Harmonic Drive "HiT Drive SERVO ACTUATOR, RH-11-6001-E100DO5" | ||
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- | * Encoder (sold with motor): ENCODER-02A 1000P /R | ||
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- | [[http:// | ||
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- | * RH Type: RH mini series | ||
- | * 11 size 11 | ||
- | * 60 Output shaft rated rotational speed (r/ | ||
- | * 01 Rated output (W) x10 10 W | ||
- | * E incremental encoder | ||
- | * 100 encoder resolution | ||
- | * D Encoder power supply 5-12 | ||
- | * Case says 5V | ||
- | * O: open collector | ||
- | * aha! | ||
- | * 5: ? | ||
- | * Not a special suffix | ||
- | * indicates 5V operation? | ||
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- | ==== Encoder details ==== | ||
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- | Cover removed: | ||
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- | {{: | ||
- | {{: | ||
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- | Glass rotary encoder with open drain outputs. | ||
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- | I opened this up because I was having trouble getting signal (2014-09-29) and thought it might have been broken. | ||
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- | {{: | ||
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- | Above: troubleshooting encoder signals | ||
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- | When I asked Gecko about my linear encoders they didn't seem that familiar with them (which seems a bit odd but w/e). In any case, they recommended the follow qudrature encoders: | ||
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- | * CUI AMT102-V | ||
- | * US Digital quadrature encoder | ||
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- | ===== Nosepiece ===== | ||
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- | Motor: FRAULHABER | ||
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- | < | ||
- | MOTOREN | ||
- | 22BK 40.5:1 | ||
- | </ | ||
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- | ===== Lamphouse ===== | ||
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- | "super high pressure mercury" | ||
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- | Model: Nikon LH-M100CB-1 | ||
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- | Use bulb: USH-102DH | ||
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- | ===== Piezo Z axis ===== | ||
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- | {{: | ||
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- | {{: | ||
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- | Removed, but would be nice to get it working at some point | ||
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- | PHYSIK INSTRUMENTE (PI) | ||
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- | Type: P-960.00 Polarity: + | ||
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- | Serial-No. XXX | ||
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- | ===== XY servo motor stage ===== | ||
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- | DC servo system with glass linear encoders. | ||
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- | Motor: voltage/ | ||
- | < | ||
- | QUALITY MOTION CONTROL | ||
- | PART NO. 2241-M2608 | ||
- | SERIAL NO. 177 | ||
- | DATE CODE 9606 | ||
- | CUST NO. | ||
- | REV. LEVEL | ||
- | </ | ||
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- | linear encoder | ||
- | < | ||
- | RSK | ||
- | Type MSA6703 | ||
- | Nr.034-042815 01003 Spec.939 | ||
- | F08 Int. 10 um RI-Code02U +5V | ||
- | </ | ||
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- | ====== Disposition Services microscope stand ====== | ||
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- | XY stepper motors and a reasonably heavy duty (not as heavy duty as the Zygo) manual Z axis. | ||
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- | I believe this was from a K2 IND, or at least something very similar. | ||
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- | At the time I didn't have a use for it but bought it on speculation since it was pretty inexpensive (about $120 total IIRC) | ||
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- | ===== XY stepper stage ===== | ||
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- | {{: | ||
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- | [[http:// | ||
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- | Motor | ||
- | < | ||
- | Model: M57-102 | ||
- | Serial: 27852 | ||
- | Code: | ||
- | </ | ||
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- | Driver | ||
- | < | ||
- | COMPUMOTOR | ||
- | CORPORATION | ||
- | Model: M57-102 | ||
- | Serial: 27852 | ||
- | Code: A | ||
- | </ | ||
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- | Control cable is a DB-9 to funky female connector | ||
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- | ^ Indexer pin ^ DB-9 pin ^ Cable color ^ Name ^ Notes ^ | ||
- | | 1 | B | Red | STEP+ | | | ||
- | | 2 | A | Green | DIR+ | | | ||
- | | 3 | C | Blue | SHUT+ | | | ||
- | | 4 | F | Brown | SHUT- | | | ||
- | | 5 | E | Black | DIR- | | | ||
- | | 6 | D | White | STEP- | | | ||
- | | | N?C | H | | | | ||
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- | ===== Z axis and stand ===== | ||
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- | Currently unused, in storage | ||
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- | ====== Misc ====== | ||
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- | {{: | ||
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- | Above: standard K2 IND next to the KMS310RT | ||
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- | {{: | ||
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- | Above: both Disposition Services stages during the swap. The servo system baseplate is 3.5" thick (!) and the stepper system is " | ||
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- | ====== References ====== | ||
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- | * [[http:// | ||
- | * [[http:// | ||
- | * The only documentation that came with it...where did the rest go... | ||
- | * [[http:// | ||
- | * [[http:// | ||
mcmaster/tech_inst/k2_ind.1428199790.txt.gz · Last modified: 2015/04/05 02:09 by mcmaster