This is an old revision of the document!

The intention of this table is to allow easy identification of a

This list includes ITRS standard nodes only, tag devices at the nearest appropriate node.

Please only tag devices whose process geometry is known for certain; this will allow us to more easily compare examples of devices at each node.

Node	Vcore	Layer count	Mz pitch	M1 pitch	SRAM pitch	References
Unknown	N/A	N/A
Huge (>10 µm)	>= 5
10 µm
3 µm
1500 nm
1000 nm	3.3 - 5	2
800 nm	5	2
600 nm	5	2 - 3
350 nm	3.3 - 5	3 - 5
250 / 220 nm	1.8 - 3.3	4 - 5
180 / 150 nm	1.5 - 1.8	4 - 6
130 / 110 nm	1.5 - 1.8	5 - 8
90 nm	1.2	7 - 10			1.92 x 2.04 µm = 3.92 µm2 (8T) 0.82 x 1.28 µm = 1.04 µm2 (6T)	XC3S50A block RAM XC3S50A config cells
65 nm	1.0 - 1.2	9 - 12
45 / 40 nm	0.9 - 1.2	6 - 11
32 / 28 nm	0.85 - 1.05	11 - 12
22 / 20 nm	0.9 - 0.95	9 - 15
16 / 14 nm	0.7	13 + MiM		54 nm	0.058 µm2 (6T)	ChipWorks Intel 14nm