This is an old revision of the document!
This list includes ITRS standard nodes only, tag devices at the nearest appropriate node.
Please only tag devices whose process geometry is known for certain; this will allow us to more easily compare examples of devices at each node.
: Include typical top/lower metal pitches
Node | Vcore | Layer count |
---|---|---|
Unknown | N/A | N/A |
Huge (>10 µm) | >= 5 | ![]() |
10 µm | ![]() | ![]() |
3 µm | ![]() | ![]() |
1500 nm | ![]() | ![]() |
1000 nm | 3.3 - 5 | 2 |
800 nm | 5 | 2 |
600 nm | 5 | 2 - 3 |
350 nm | 3.3 - 5 | 3 - 5 |
250 / 220 nm | 1.8 - 3.3 | 4 - 5 |
180 / 150 nm | 1.5 - 1.8 | 4 - 6 |
130 / 110 nm | 1.5 - 1.8 | 5 - 8 |
90 nm | 1.2 | 7 - 10 |
65 nm | 1.0 - 1.2 | 9 - 12 |
45 / 40 nm | 0.9 - 1.2 | 6 - 11 |
32 / 28 nm | 0.85 - 1.05 | 11 - 12 |
22 / 20 nm | 0.9 - 0.95 | 9 - 15 |
16 / 14 nm | ![]() | 13 |