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honeywell_awm2100v [2013/01/29 16:00] azonenberg |
honeywell_awm2100v [2015/01/04 17:50] (current) |
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| - | {{tag>collection_az vendor_honeywell year_1995 type_sensor type_sensor/airflow type_mems}} | + | Moved to [[azonenberg:honeywell:awm2100v]] |
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| - | Honeywell AWM2100V mass airflow sensor ([[http://sensing.honeywell.com/product%20page?pr_id=25698]]) | + | |
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| - | Guessing the 9503 is a date code so tagging it as such. | + | |
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| - | Blog posts: | + | |
| - | * [[http://siliconexposed.blogspot.com/2012/07/mems-pressure-sensor-teardown-part-2.html]] | + | |
| - | * [[http://siliconexposed.blogspot.com/2012/07/mems-pressure-sensor-teardown.html]] | + | |
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| - | ====== Package ====== | + | |
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| - | {{:azonenberg:honeywell:s7302834.jpg?600|}} | + | |
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| - | {{:azonenberg:honeywell:s7302837.jpg?600|}} | + | |
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| - | ====== Board ====== | + | |
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| - | Ceramic, looks like Al2O3. Two layers of metalization plus thick-film resistors. Blue dielectric may be glass or polymer, not sure which yet. | + | |
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| - | {{:azonenberg:honeywell:s7302830_sm.jpg?600|}} | + | |
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| - | ====== Die ====== | + | |
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| - | One layer of polysilicon resistor plus one layer of gold metalization. | + | |
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| - | Die is <100> oriented as can be seen by the KOH (or similar) etch used to define the cavity under the membrane. | + | |
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| - | {{:azonenberg:honeywell:pressure_sensor_neo10x_sm_annotated.jpg?600|}} | + | |