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honeywell_awm2100v [2013/01/29 21:00] azonenberg |
honeywell_awm2100v [2015/01/04 22:50] |
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- | {{tag> | ||
- | Honeywell AWM2100V mass airflow sensor ([[http:// | ||
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- | Guessing the 9503 is a date code so tagging it as such. | ||
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- | Blog posts: | ||
- | * [[http:// | ||
- | * [[http:// | ||
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- | ====== Package ====== | ||
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- | {{: | ||
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- | {{: | ||
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- | ====== Board ====== | ||
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- | Ceramic, looks like Al2O3. Two layers of metalization plus thick-film resistors. Blue dielectric may be glass or polymer, not sure which yet. | ||
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- | ====== Die ====== | ||
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- | One layer of polysilicon resistor plus one layer of gold metalization. | ||
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- | Die is <100> oriented as can be seen by the KOH (or similar) etch used to define the cavity under the membrane. | ||
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- | {{: |