Differences

This shows you the differences between two versions of the page.

Link to this comparison view

Both sides previous revision Previous revision
Next revision
Previous revision
honeywell_awm2100v [2013/01/24 05:43]
azonenberg
honeywell_awm2100v [2013/01/30 08:44]
azonenberg
Line 1: Line 1:
-{{tag>collection_az vendor_honeywell type_sensor type_sensor/airflow type_mems}} +Moved to [[azonenberg:honeywell:awm2100v]]
- +
-Honeywell AWM2100V mass airflow sensor ([[http://sensing.honeywell.com/product%20page?pr_id=25698]]) +
- +
-Blog posts: +
-  * [[http://siliconexposed.blogspot.com/2012/07/mems-pressure-sensor-teardown-part-2.html]] +
-  * [[http://siliconexposed.blogspot.com/2012/07/mems-pressure-sensor-teardown.html]] +
- +
-====== Package ====== +
- +
-{{:azonenberg:honeywell:s7302834.jpg?600|}} +
- +
-{{:azonenberg:honeywell:s7302837.jpg?600|}} +
- +
- +
-====== Board ====== +
- +
-Ceramic, looks like Al2O3. Two layers of metalization plus thick-film resistors. Blue dielectric may be glass or polymer, not sure which yet. +
- +
-{{:azonenberg:honeywell:s7302830_sm.jpg?600|}} +
- +
-====== Die ====== +
- +
-One layer of polysilicon resistor plus one layer of gold metalization.  +
- +
-Die is <100> oriented as can be seen by the KOH (or similar) etch used to define the cavity under the membrane. +
- +
-{{:azonenberg:honeywell:pressure_sensor_neo10x_sm_annotated.jpg?600|}}+
 
honeywell_awm2100v.txt · Last modified: 2015/01/04 22:50 (external edit)
 
Except where otherwise noted, content on this wiki is licensed under the following license: CC Attribution 4.0 International
Recent changes RSS feed Donate Powered by PHP Valid XHTML 1.0 Valid CSS Driven by DokuWiki