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conventions [2018/04/16 00:26] mcmaster [Layer name] |
conventions [2020/05/11 03:53] mcmaster [Table] |
* st_24c02_mz_ns50xu.jpg: ST Microelectronics (vendor) 24C02 (chip id). Top metal (mz) image taken with NeoSPlan 50x objective | * st_24c02_mz_ns50xu.jpg: ST Microelectronics (vendor) 24C02 (chip id). Top metal (mz) image taken with NeoSPlan 50x objective |
* st_24c02_mz.jpg: Like above, but capture information unknown. It appears to be top metal, so this is added in. Although no objective is given, implied that its brightfield | * st_24c02_mz.jpg: Like above, but capture information unknown. It appears to be top metal, so this is added in. Although no objective is given, implied that its brightfield |
| * wafer example |
| * mos_8564r6-wafer_mz.jpg: a MOS 8564R6 wafer top metal. Main chip |
| * mos_8564r6-wafer_mz-9079r2_mz.jpg: a MOS 8564R6 wafer top metal, but the test pattern 9079R2 |
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===== Technique ===== | ===== Technique ===== |
Scales | Scales |
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^ Scope ^ Objective | NA | JM qty ^ Resolving power (nm) ^ nm / pix ^ Notes ^ | ^ Scope ^ Objective ^ NA ^ Resolving power (nm) ^ nm / pix ^ Notes ^ |
| pr0nscope | mit2x | | | 5000 | 3330 | [[https://github.com/JohnDMcMaster/uvscada/blob/master/scope/config/pr0nscope/microscope.json|Config file]]. X: 1632 pix | | | pr0nscope | mit2x | | 5000 | 3550 | | |
| pr0nscope | mit5x | | | 2000 | 1330 | | | | pr0nscope | mit5x | | 2000 | 1420 | | |
| pr0nscope | mit10x | | | 1000 | 667 | | | | pr0nscope | mit10x | | 1000 | 710 | | |
| pr0nscope | mit20x | | | 700 | 333 | | | | pr0nscope | mit20x | | 700 | 355 | | |
| pr0nscope | ns50xu | | | | | | | | pr0nscope | ns50xu | | | 142? | | |
| pr0nscope | mit50xn | | | 700 | 133 | Assumed linear but needs actual verification. Also hmm should rethink its use | | | pr0nscope | nd50x | | | 142? | | |
| pr0nscope | mit50x | | | | | Proposed, don't have one | | | pr0nscope | mit50xn | | 700 | 142 | | |
| pr0nscope | mit100x | | | 400 | 66.7 | FIXME: correct NA? | | | pr0nscope | mit100x | | 400 | 71 | FIXME: correct NA? | |
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See also | See also |