“I promise this the last in a series of MEMS accelerometers [1] [2]. This chip, the ADXL311, is one of the most recent bi-axial accelerometers from Analog Devices. The fingers in the middle that determine acceleration have a different pattern from the 202. Again, the packaging of the dye has prevented me from using the higher power magnification, above 20x.”

Source: http://microblog.routed.net/2007/04/20/ic-friday-analog-devices-adxl311/

Package

Die