• “45nm and below”
• 300 mm wafer

• 0.6- to 0.35-micron
• 200 mm wafer

• 0.35-micron to 0.18-micron
• 200 mm wafer

• 0.18-micron
• 200 mm wafer

• 0.18- to 0.11-micron
• 200 mm wafer

0.13-micron to 40nm

28nm and below