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test_pattern [2013/10/20 14:59] – external edit 127.0.0.1
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 +Work in progress: aims to identify the purpose of various wafer test patterns, process control monitors (PCM), alignment markers, etc.
 +
 +====== Alignment ====== 
 +
 +{{gallery>image:test_patterns.jpg}}
 +
 +Pass condition: concentric
 +
 +Used to align mask/reticle from layer to layer.
 +
 +====== Continuity ====== 
 +
 +Pass condition: low resistance.
 +
 +A long wire that should maintain a good electrical signal.
 +
 +====== Isolation ====== 
 +
 +Pass condition: high resistance
 +
 +Two wires placed close to each other that should not short.
 +
 +====== Chain (contact, via) ====== 
 +
 +{{gallery>image:john_mcmaster_ibm_043641wkaa_pattern_regular_64.jpg}}
 +
 +{{gallery>image:john_mcmaster_ibm_043641wkaa_pattern_regular_68.jpg}}
 +
 +{{gallery>image:john_mcmaster_ibm_043641wkaa_pattern_regular_61.jpg}}
 +
 +{{gallery>image:john_mcmaster_ibm_043641wkaa_pattern_regular_18_0.jpg}}
 +
 +Pass condition: low resistance
 +
 +====== Contact resistance ====== 
 +
 +Four point probe. Two
 +
 +====== References ====== 
 +  * [[http://www.patentgenius.com/patent/6841890.html]]
 +  * [[http://cleanroom.byu.edu/alignment.phtml]]
 +  * http://www.stanford.edu/class/ee410/TestStructures.pdf
 +
  
 
test_pattern.txt · Last modified: 2018/12/02 20:10 by mcmaster
 
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