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| technics:hummer [2018/08/09 17:40] – [mcmaster Hummer VI] mcmaster | technics:hummer [2019/03/05 01:19] (current) – removed mcmaster | ||
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| - | Now Anatech | ||
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| - | BK intro to sputter coaters: https:// | ||
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| - | Suggested procedure: https:// | ||
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| - | Claims to have a manual: https:// | ||
| - | * "The manufacturer was purchased by Anatech USA and they still support this product. " | ||
| - | * Requesting it | ||
| - | |||
| - | ====== Hummer I ====== | ||
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| - | ====== Hummer II ====== | ||
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| - | {{: | ||
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| - | {{: | ||
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| - | JM unit: advert called it " | ||
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| - | Have a bunch of internal photos. | ||
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| - | TODO: | ||
| - | * Fix ATM switch | ||
| - | * Stuck closed | ||
| - | * Panel: clean | ||
| - | * Panel: fix handle / order screw(s) | ||
| - | * Replace with SHCS? | ||
| - | * Thread size? | ||
| - | * Panel: fill out all screws | ||
| - | * Replace with SHCS? | ||
| - | * Thread size? | ||
| - | * Pump: slowly leaking oil? | ||
| - | * Pump: oil mist filter | ||
| - | * Where does it go? Thread? | ||
| - | * HV: fix negative lead. Currently alligator clipped | ||
| - | * TC: replace sensor | ||
| - | * Rusted | ||
| - | * Key is broken | ||
| - | * Seems to work though | ||
| - | |||
| - | DONE | ||
| - | * Demonstrate plasma. | ||
| - | * General cleaning | ||
| - | * Pump: oil was low but now halfway on window | ||
| - | * Pump: window dirty. | ||
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| - | General notes: | ||
| - | * TC sensor: Teledyne DV-23. | ||
| - | * Pump: Sargent Welch 8810 | ||
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| - | ====== Hummer III ====== | ||
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| - | ====== Hummer IV ====== | ||
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| - | ====== Hummer V ====== | ||
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| - | {{: | ||
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| - | [[https:// | ||
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| - | ====== Hummer 6 ====== | ||
| - | |||
| - | [[https:// | ||
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| - | {{: | ||
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| - | [[http:// | ||
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| - | {{: | ||
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| - | [[http:// | ||
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| - | {{: | ||
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| - | [[http:// | ||
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| - | {{: | ||
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| - | [[http:// | ||
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| - | {{: | ||
| - | {{: | ||
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| - | [[http:// | ||
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| - | ====== Hummer 7 ====== | ||
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| - | Website skips from 7 to 8. Never produced? | ||
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| - | Notes from someone: | ||
| - | < | ||
| - | HUMMER VII NOTES | ||
| - | DISPLAY PCB | ||
| - | LED Short Lead to square Pad, Long Lead to Round Pad MAIN PCB CONNECTIONS J7 Pin 1 Common Red Pin 2 Current Monitor Green Pin 3 No Connection Pin 4 No Connection Pin 5 Relay Yellow Pin 6 Relay Brown Pin 7 Safety Interlock Black Pin 8 Current Program Orange J8 Pin 1 Analog Common Yellow Pin 2 No Connection Pin 3 No Connection Pin 4 No Connection Pin 5 Logic Common Black Pin 6 -12v Pin 7 +5v Red Pin 8 +12v Green J9 Pin 1 Pressure Switch Blue Pin 2 Pressure Switch Blue Pin 3 No Connection J5 Pin 1 Two Way Gas Solenoid | ||
| - | </ | ||
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| - | ====== Hummer 8 ====== | ||
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| - | {{: | ||
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| - | [[http:// | ||
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| - | ====== Hummer X ====== | ||
| - | |||
| - | {{: | ||
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| - | [[http:// | ||
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| - | ====== Hummer XP ====== | ||
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| - | {{: | ||
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| - | [[http:// | ||
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| - | ====== mcmaster Hummer IV ====== | ||
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| - | Got from craigslist a while back, including gold source. A little dirty, but worked fine. Cleaned up front panel best I could | ||
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| - | 2018-08-07: | ||
| - | * Pedestal does not stay tight and can be easily moved up and down when tightented | ||
| - | * Threads had eroded on pedestal clamp. I tried to shore them up with PTFE tape, but maybe not enough | ||
| - | * Ordered " | ||
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| - | 2018-08-08: | ||
| - | * Chamber glass | ||
| - | * 5" OD | ||
| - | * 4.5" ID | ||
| - | * 0.25" thick | ||
| - | * 6" tall | ||
| - | * Chamber seals | ||
| - | * PORTER SEAL COMPANY-DALLAS | ||
| - | * L shaped | ||
| - | * 1/2" tall | ||
| - | * 3/8" wide | ||
| - | * ~0.073" | ||
| - | * Bell jar L gasket | ||
| - | |||
| - | ====== mcmaster Hummer VI ====== | ||
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| - | Got from industrial auction | ||
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| - | 2018-08-07: | ||
| - | * Glass chamber + seals not present | ||
| - | * No source installed | ||
| - | * Vacuum pump | ||
| - | * Model: Trivac D1, 6B | ||
| - | * Low on oil | ||
| - | * Remaining oil is clear | ||
| - | * Put Agilent oil in | ||
| - | * Black feet at bottom have degraded | ||
| - | * Black feet stick outside of case...I guess to better isolate the pump from the chamber? | ||
| - | * TODO: replace feet | ||
| - | * KF16 inlet and outlet | ||
| - | * Cleaned up inside unit | ||
| - | * Oil, degraded pump feet | ||
| - | * Front panel | ||
| - | * Cleaned. Lots of black stuff on it | ||
| - | * Not holding a vacuum. Pressure gauge does not move | ||
| - | * MODE switch is off center, but otherwise seems to work | ||
| - | * VAC PUMP switch is not present | ||
| - | * Its unclear how to properly vent the unit | ||
| - | * Rear assembly | ||
| - | * Chamber => electric solenoid => leak valve => cut green tube | ||
| - | * Rubber hinge w/ chamber top snapped | ||
| - | * Hummer IV chamber fits, but is probably too tall and slightly too wide | ||
| - | * Back cover comes off easily | ||
| - | * Generally much easier to work on this unit than the IV | ||
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| - | 2018-08-08: | ||
| - | * Found large gouge on cap | ||
| - | * Filed down followed by 220, 1500 grit sandpaper | ||
| - | * Pump ran for a few minutes and reached 50 mTorr | ||
| - | * Switched to IV pedestal | ||
| - | * After pumping for 15 minutes reached nearly 20 mTorr | ||
| - | * Conclusion | ||
| - | * Pump is good | ||
| - | * Vacuum tight, including the rear assembly | ||
| - | * Both pedestals seem fine. Evidence points towards replacing TITE assembly on IV | ||
| - | * TODO | ||
| - | * Size / order chamber, seals | ||
| - | * Investigate leaking chamber | ||
| - | * Mode tests | ||
| - | * All three modes seem to roughly work | ||
| - | * Plate D/C: very slight discharge at top. Suspect plate is too far away | ||
| - | * Etch D/C: padastel sparkles (reverse polarity?) | ||
| - | * Plasma Exc: mix of both of above (AC?) | ||
| - | * Chamber glass diameter estimate | ||
| - | * Lower platform lip | ||
| - | * IV: recessed, 3.8 ID, 5.4 OD | ||
| - | * VI: edge, 3.9 ID, 4.9 OD | ||
| - | * Upper | ||
| - | * VI: recessed, 4.9 OD | ||
| - | * VI: edge, 5.4 OD | ||
| - | * VI pedestal: 3.75" OD | ||
| - | * eBay pictures show a chamber not overhanging | ||
| - | * IV is 4.5" ID, could shrink down 0.5" probably from 5.0" => 4.5" OD | ||
| - | * But 5" does seem to work and would keep parts compatible. Maybe easier to find | ||
| - | * Chamber glass height estimate | ||
| - | * 2.3" gap | ||
| - | * Current chamber 6", 3.75" is probably right for this one | ||
| - | * Chamber glass summary | ||
| - | * Diameter: 4.5 - 5.0" OD | ||
| - | * Height: 3.5 - 4.0" | ||
| - | * Width: 0.25" | ||
| - | * Chamber candidates | ||
| - | * https:// | ||
| - | * $67 for 1' of 5" acrylic | ||
| - | * Finding replacement seal | ||
| - | * Ideally want chamber + seals together | ||
| - | * http:// | ||
| - | * Called. Min run 250 pieces | ||
| - | * https:// | ||
| - | * Smallest 7" | ||
| - | * https:// | ||
| - | * Sent RFQ | ||
| - | * Same as http:// | ||
| - | * https:// | ||
| - | * smallest 12" | ||
| - | * mcmaster.com | ||
| - | * can't find anything in the category | ||
| - | * https:// | ||
| - | * smallest 7" | ||
| - | * http:// | ||
| - | * smallest 6" | ||
| - | * http:// | ||
| - | * might have some | ||
| - | * Called, they will get back to me | ||
| - | * http:// | ||
| - | * Think they used to be PORTER SEAL COMPANY-DALLAS | ||
| - | * Called them and have 5" in stock, about $15 each, $50 min order. Order 3 | ||
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| - | glass tubing | ||
| - | * need: Pyrex 237670 | ||
| - | * 127.0mm (5") Pyrex® Glass Heavy Wall Tubing, 2/cs., 29 lbs. | ||
| - | * Size O.D. (mm): 127 | ||
| - | * Wall (mm): 6.4 | ||
| - | * http:// | ||
| - | * https:// | ||
| - | * BH-500C | ||
| - | * Heavy Wall Corning Pyrex Glass Tubing - 5 ft. lengths | ||
| - | * 127mm (5 in) O.D. x 6.4mm wall Corning Pyrex Glass Tubing - CASE(3 PCS.) 53 LBS. | ||
| - | * $310.00 | ||
| - | * Yields 15' => 180", need 4 | ||
| - | * https:// | ||
| - | * 4-1/4" max | ||
| - | * Pressure-Rated Borosilicate Glass Tubes | ||
| - | * can be used as glass bowls in oil dispensers | ||
| - | * http:// | ||
| - | * HW237670 | ||
| - | * $239 | ||
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| - | Custom glass quotes | ||
| - | * http:// | ||
| - | * "1 to 2 ea # | ||
| - | * stemmerich.com | ||
| - | * $29 each | ||
| - | * 3 wk LT | ||
| - | * http:// | ||
| - | * Pending | ||
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| - | 2018-08-09 | ||
| - | * Gasket order placed w/ elderrubber | ||
| - | * MOQ $50, gaskets about $16 each, ordered 3 | ||
| - | * In stock | ||
| - | * Glass order placed w/ stemmerich.com | ||
| - | * $29 each, no MOQ | ||
| - | * Ordered 1 | ||
| - | * 3 wk LT | ||
| - | * Summary: a lot of sleuthing, but around $100 to fully replace a chamber | ||
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| - | ====== mcmaster carbon ====== | ||
| - | |||
| - | 2018-08-07: | ||
| - | * Order replacement chamber seals | ||
| - | * Original gasket brown (Viton?) | ||
| - | * Ordered replacement gaskets: [[https:// | ||
| - | * Chemical-Resistant Viton Fluoroelastomer O-Ring, 3/16 Fractional Width, Dash Number 346, packs of 2 | ||
| - | * Width: 0.21" | ||
| - | * ID: 4.100" | ||
| - | * OD: 4.520" | ||
| - | * Order carbon rods: [[https:// | ||
| - | * PNTD CARBON ROD, | ||