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piranha_solution [2013/11/17 02:08]
mcmaster [Compatibility]
piranha_solution [2013/11/17 02:08] (current)
mcmaster
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 attacked the Parylene C. It also etched aluminum, nickel, and attacked the Parylene C. It also etched aluminum, nickel, and
 silver rapidly. Chromium was etched slowly, which allows it to silver rapidly. Chromium was etched slowly, which allows it to
-be used for the cleaning of photomasks."​+be used for the cleaning of photomasks." ​[Etch rates part II] 
 + 
 ====== References ====== ====== References ======
  
-Acid comaptible materials (AMC): http://​www.cheresources.com/​invision/​topic/​19132-piranha-caros-acid-peroxymonosulfuric-acid-compatible-materials/​+  * Acid comaptible materials (AMC): http://​www.cheresources.com/​invision/​topic/​19132-piranha-caros-acid-peroxymonosulfuric-acid-compatible-materials/​ 
 +  * [[http://​microlab.berkeley.edu/​labmanual/​chap1/​JMEMSEtchRates2(2003).pdf|Etch rates part II]]
  
 
piranha_solution.txt · Last modified: 2013/11/17 02:08 by mcmaster
 
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