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| piranha_solution [2013/11/17 07:03] – mcmaster | piranha_solution [2013/11/17 07:08] – [Compatibility] mcmaster | ||
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| + | "The Piranha (also known as sulfuric-peroxide) | ||
| + | parts 96% H SO :1 part 30% H O . | ||
| + | used here is a mix of | ||
| + | . The hydrogen peroxide is added just before use. | ||
| + | It is used as a cleaning solution that strips organics and some | ||
| + | metals. In these tests, it was indeed found to etch photoresist, | ||
| + | the resist pen, and polyimide very rapidly, but only slowly | ||
| + | attacked the Parylene C. It also etched aluminum, nickel, and | ||
| + | silver rapidly. Chromium was etched slowly, which allows it to | ||
| + | be used for the cleaning of photomasks." | ||
| ====== References ====== | ====== References ====== | ||
| Acid comaptible materials (AMC): http:// | Acid comaptible materials (AMC): http:// | ||