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decap:rie [2012/05/30 04:59] – created mcmaster | decap:rie [2013/11/23 06:19] (current) – mcmaster | ||
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- | Reactive Ion Etching (RIE) uses radio waves and an etchant gas to etch away a sample. | + | Mainly this is used for delayering ([[delayer:rie|main article]]) but sometimes used to remove epoxy. |
- | A typical RIE setup (an " |