====== McMaster notes ====== ===== 2021-04-21 ===== * Goal: set RP2-B0 in wax on Allied sample holder * RP2-B0 * Decapped 2x "live" from photo shoot to bare die * Around 277 um thick. Later measurement 281 um * Sacrificial dies * Samsung k4h560438e-tcb0 * 324 um * Area * Samsung: 5.3 x 11.1 = 58.8 mm2 * RPI: maybe 4 mm2 * Net: maybe 60 mm2 * Etchant: 20% w/v KOH in water * https://cleanroom.byu.edu/koh * Approx 250 um / hour heated => 4.15 um / min * Etch * Etch 1 * 25 min @ 177F hotplate * 306 um * Etch 2 * 30 min? * raised temp? * 297, 302 um * High spots forming (was warned might be uneven at this conc) * Etch 3 * Now hotplate at 220F * 286 um, 291 um * 14 um in 30 min * (286 - 277) * 2 = 18 more min? * Lots of metal flaking off * Etch 4 * 20 min * Ultrasound. Lots of stuff flaked off * Didn't note final thickness... * Check all dies for thickness before mounting * Not all started at exactly the same time, although was close * Order replacement lapping gauge * 543-452B, ID-C125EB * 1 um resolution * 25 mm travel * Long * Flat carbide tip. Will need to switch to new unit * Skips * Can't modify spares to be long enough * One that might work I can't get to power up. Completely broken? * Set in wax * 0.4 mm gap in area(s). Not ideal but may still work ===== 2021-04-23 ===== Goal: setup lapping machine, lap RPI chip from other day TODO: * Level head * Review Allied recommendations * Characterize um / rev * Gauge skips, but is stable over say 1 mm * Setup slurry feed * Can I make this nicer? Inventory: * 2x MultiPrep systems w/ arm * Both were surplus / in bad condition * One is more "ready to go" * Lots of lapping disks * Is my old colloidial silica still good? Notes: * Installed old magnetic polishing cloth * Post 1.49" * Could I mount stopcock to it somehow? * Feeler gauge test * Pointed inside * About 30 um variation * Good enough for now: not great but not terrible * Main crank 40 TPI * Wheel is marked in um (635 um) * Allied-Parallel-Lapping-Integrated-Circuits.pdf * If gauge is moving its already too much pressure * Instead use recommended distances * Based on 500 um die * Imperial Polishing Cloth, #50-150-500: 0.840 mm * 277 um die => 724 + 277 = 1001 um offset? * Sample load set to full * Using spare holder to measure * Distance from Platen to bottom of polishing fixture = Ts - Tc - Td + 0.116 mm * Ts = Spacer thickness (0.500") * Tc = Cloth Thickness * Td = Die Thickness * So... * Ts: 12.65 mm * Tc: 0.840 mm * Td: 0.277 mm * Net: 12.65 - 0.840 - 0.277 + 0.116 = 11.649 * ...but I'm using magnetic sheet. Not the same * 50-500-500 instead of 50-150-500 * Magnet: 735 um * Cloth: 450 um (840 um official) * Let's use official number * 12.65 - 0.840 - 0.735 - 0.277 + 0.116 = 10.914 mm * Crank: 25.4 / 40 = 0.635 mm * 10.914 / 0.635 = 17.2 cranks * Remainder: 0.119 mm * Settings * 225 RPM CCW * Rotation: full speed (8) * Osc: 3 * 0.05 um silica ===== 2021-04-24 ===== Continue lapping same settings