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honeywell_awm2100v [2013/01/29 16:00]
azonenberg
honeywell_awm2100v [2015/01/04 17:50] (current)
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-{{tag>​collection_az vendor_honeywell year_1995 type_sensor type_sensor/​airflow type_mems}} +Moved to [[azonenberg:honeywell:awm2100v]]
- +
-Honeywell AWM2100V mass airflow sensor ([[http://sensing.honeywell.com/​product%20page?​pr_id=25698]]) +
- +
-Guessing the 9503 is a date code so tagging it as such. +
- +
-Blog posts: +
-  * [[http://​siliconexposed.blogspot.com/​2012/​07/​mems-pressure-sensor-teardown-part-2.html]] +
-  * [[http://​siliconexposed.blogspot.com/​2012/​07/​mems-pressure-sensor-teardown.html]] +
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-====== Package ====== +
- +
-{{:​azonenberg:​honeywell:​s7302834.jpg?​600|}} +
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-{{:​azonenberg:​honeywell:​s7302837.jpg?​600|}} +
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-====== Board ====== +
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-Ceramic, looks like Al2O3. Two layers of metalization plus thick-film resistors. Blue dielectric may be glass or polymer, not sure which yet. +
- +
-{{:​azonenberg:​honeywell:​s7302830_sm.jpg?​600|}} +
- +
-====== Die ====== +
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-One layer of polysilicon resistor plus one layer of gold metalization.  +
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-Die is <100> oriented as can be seen by the KOH (or similar) etch used to define the cavity under the membrane. +
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-{{:​azonenberg:​honeywell:​pressure_sensor_neo10x_sm_annotated.jpg?​600|}}+
 
honeywell_awm2100v.txt · Last modified: 2015/01/04 17:50 (external edit)
 
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