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honeywell_awm2100v [2013/01/29 21:00]
azonenberg
honeywell_awm2100v [2015/01/04 22:50]
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-{{tag>collection_az vendor_honeywell year_1995 type_sensor type_sensor/airflow type_mems}} 
  
-Honeywell AWM2100V mass airflow sensor ([[http://sensing.honeywell.com/product%20page?pr_id=25698]]) 
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-Guessing the 9503 is a date code so tagging it as such. 
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-Blog posts: 
-  * [[http://siliconexposed.blogspot.com/2012/07/mems-pressure-sensor-teardown-part-2.html]] 
-  * [[http://siliconexposed.blogspot.com/2012/07/mems-pressure-sensor-teardown.html]] 
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-====== Package ====== 
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-{{:azonenberg:honeywell:s7302834.jpg?600|}} 
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-{{:azonenberg:honeywell:s7302837.jpg?600|}} 
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- 
-====== Board ====== 
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-Ceramic, looks like Al2O3. Two layers of metalization plus thick-film resistors. Blue dielectric may be glass or polymer, not sure which yet. 
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-{{:azonenberg:honeywell:s7302830_sm.jpg?600|}} 
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-====== Die ====== 
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-One layer of polysilicon resistor plus one layer of gold metalization.  
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-Die is <100> oriented as can be seen by the KOH (or similar) etch used to define the cavity under the membrane. 
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-{{:azonenberg:honeywell:pressure_sensor_neo10x_sm_annotated.jpg?600|}} 
 
honeywell_awm2100v.txt ยท Last modified: 2015/01/04 22:50 (external edit)
 
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