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conventions [2018/03/14 01:44] mcmaster |
conventions [2023/05/04 16:41] (current) infosecdj [Objective] |
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In order to make sure we're all on the same page, here are a few conventions to follow. | In order to make sure we're all on the same page, here are a few conventions to follow. | ||
- | ====== Layer names ====== | + | ====== Layer name ====== |
+ | TLDR: | ||
+ | * An unprocessed chip has layer " | ||
+ | * For others, see below | ||
+ | |||
+ | mcmaster: | ||
+ | * I've been calling intermediate etchings in more complex processes like s3-7 meaning sample 3, processing step 7 | ||
+ | * This avoids spending too much time trying to classify something that isn't really a purely poly or active | ||
+ | |||
+ | Conventions: | ||
* Active/ | * Active/ | ||
* If bare silicon with no processing: //active// | * If bare silicon with no processing: //active// | ||
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* Metal layer | * Metal layer | ||
* If the number of layers in the chip is known (from a cross section, etc): //mN//, where N starts from 1 at the lowest layer and counts up | * If the number of layers in the chip is known (from a cross section, etc): //mN//, where N starts from 1 at the lowest layer and counts up | ||
- | * If the number of layers is not known: //mN//, where N starts from the letter | + | * If the number of layers is not known: //mN//, where N starts from the letter |
====== Image ====== | ====== Image ====== | ||
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Some sample image names: | Some sample image names: | ||
* st_24c02_mz_ns50xu.jpg: | * st_24c02_mz_ns50xu.jpg: | ||
- | * st_24c02_mz.jpg: | + | * st_24c02_mz.jpg: |
- | + | * Complex example | |
- | ===== Optical ===== | + | * ti_tms32010c-70015_s1-2_mit20x_rom.jpg |
- | + | * Vendor: Texas Instruments (ti) | |
- | If you've calibrated your microscope against | + | * Chip: TMS32010C |
+ | * Chip variant: 70015 (in this case the ROM programming) | ||
+ | * s1-2: sample 1, processing step 2. Please list processing steps on wiki page if available | ||
+ | * mit20x: objective used | ||
+ | * rom: a region | ||
+ | * wafer example | ||
+ | * mos_8564r6-wafer_mz_die.jpg: | ||
+ | * mos_8564r6-wafer_mz_9079r2.jpg: a MOS 8564R6 wafer top metal, but the test pattern 9079R2 | ||
===== Technique ===== | ===== Technique ===== | ||
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Abbreviated names for different microscope configurations | Abbreviated names for different microscope configurations | ||
- | * bf: Brightfield | + | ^ Applies ^ Abbreviation ^ Name ^ Notes ^ |
- | * bse: Backscatter | + | | OM | bf | Brightfield |
- | | + | | EM | bs | Backscatter |
- | | + | | OM | df | Darkfield |
- | | + | | OM | dic | Differential interference contrast |
- | | + | | EM | se | Secondary electron |
+ | | OM | xpol | Crossed polarizers | ||
- | ===== Objective names ===== | + | Where: |
+ | * EM: electron microscopy (SEM) | ||
+ | * OM: optical microscopy | ||
+ | |||
+ | ===== Optical | ||
+ | |||
+ | If you've calibrated your microscope against a standard of some sort, please add an overlay with the objective name and a scale bar to your images. (Contact azonenberg if you'd like the GIMP files for our standard overlay, which you can modify for your setup.) | ||
+ | |||
+ | |||
+ | ==== Objective | ||
Please add new objectives to this list as necessary. | Please add new objectives to this list as necessary. | ||
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* mit50xn: Mitutoyo M Plan Apo 50x Near UV | * mit50xn: Mitutoyo M Plan Apo 50x Near UV | ||
* mit100x: Mitutoyo M Plan Apo 100x | * mit100x: Mitutoyo M Plan Apo 100x | ||
+ | * nikon20x: Nikon M Plan 20x ELWD | ||
* neo5x: Olympus Neo 5x | * neo5x: Olympus Neo 5x | ||
* nd5x: Olympus Neo DPlan 5x | * nd5x: Olympus Neo DPlan 5x | ||
* ns50x: Olympus Neo SPlan 50x | * ns50x: Olympus Neo SPlan 50x | ||
* ns50xu: Olympus Neo SPlan 50x ultra-long working distance (ULWD) | * ns50xu: Olympus Neo SPlan 50x ultra-long working distance (ULWD) | ||
+ | * ms20x: Olympus MSPlan 20x | ||
* sz or zoom: Zoom microscope, generally no scale bar provided because magnification varies (unless that particular zoom setting was calibrated during the same imaging session) | * sz or zoom: Zoom microscope, generally no scale bar provided because magnification varies (unless that particular zoom setting was calibrated during the same imaging session) | ||
- | |||
- | Scales | ||
- | |||
- | ^ Scope ^ Objective | ||
- | | pr0nscope | ||
- | | pr0nscope | ||
- | | pr0nscope | ||
- | | pr0nscope | ||
- | | pr0nscope | ||
- | | pr0nscope | ||
- | | pr0nscope | ||
- | | pr0nscope | ||
See also | See also |