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conventions [2018/03/14 01:42] mcmaster [Optical microscope images] |
conventions [2023/05/04 16:41] (current) infosecdj [Objective] |
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In order to make sure we're all on the same page, here are a few conventions to follow. | In order to make sure we're all on the same page, here are a few conventions to follow. | ||
- | ====== Layer names ====== | + | ====== Layer name ====== |
+ | TLDR: | ||
+ | * An unprocessed chip has layer " | ||
+ | * For others, see below | ||
+ | |||
+ | mcmaster: | ||
+ | * I've been calling intermediate etchings in more complex processes like s3-7 meaning sample 3, processing step 7 | ||
+ | * This avoids spending too much time trying to classify something that isn't really a purely poly or active | ||
+ | |||
+ | Conventions: | ||
* Active/ | * Active/ | ||
* If bare silicon with no processing: //active// | * If bare silicon with no processing: //active// | ||
Line 11: | Line 20: | ||
* Metal layer | * Metal layer | ||
* If the number of layers in the chip is known (from a cross section, etc): //mN//, where N starts from 1 at the lowest layer and counts up | * If the number of layers in the chip is known (from a cross section, etc): //mN//, where N starts from 1 at the lowest layer and counts up | ||
- | * If the number of layers is not known: //mN//, where N starts from the letter | + | * If the number of layers is not known: //mN//, where N starts from the letter |
- | ====== Image naming | + | ====== Image ====== |
High resolution images should be named like: < | High resolution images should be named like: < | ||
Line 23: | Line 32: | ||
Some sample image names: | Some sample image names: | ||
* st_24c02_mz_ns50xu.jpg: | * st_24c02_mz_ns50xu.jpg: | ||
- | * st_24c02_mz.jpg: | + | * st_24c02_mz.jpg: |
+ | * Complex example | ||
+ | * ti_tms32010c-70015_s1-2_mit20x_rom.jpg | ||
+ | * Vendor: Texas Instruments (ti) | ||
+ | * Chip: TMS32010C | ||
+ | * Chip variant: 70015 (in this case the ROM programming) | ||
+ | * s1-2: sample 1, processing step 2. Please list processing steps on wiki page if available | ||
+ | * mit20x: objective used | ||
+ | * rom: a region of interest within the 20x scan | ||
+ | * wafer example | ||
+ | * mos_8564r6-wafer_mz_die.jpg: | ||
+ | * mos_8564r6-wafer_mz_9079r2.jpg: | ||
+ | ===== Technique ===== | ||
- | ===== Non-microscope | + | Abbreviated names for different |
- | TODO: Come up with naming convention | + | ^ Applies ^ Abbreviation ^ Name ^ Notes ^ |
+ | | OM | bf | Brightfield | Usually omitted / implied default | | ||
+ | | EM | bs | Backscatter | | | ||
+ | | OM | df | Darkfield | | | ||
+ | | OM | dic | Differential interference contrast | | | ||
+ | | EM | se | Secondary electron | | | ||
+ | | OM | xpol | Crossed polarizers | | | ||
- | ===== SEM images ===== | + | Where: |
+ | * EM: electron microscopy (SEM) | ||
+ | * OM: optical microscopy | ||
- | azonenberg' | + | ===== Optical ===== |
- | + | ||
- | " | + | |
- | + | ||
- | Magnification should be abbreviated if a multiple of 1000, otherwise written out in full (ex: 3900x, 4kx). | + | |
- | + | ||
- | Working distance and accelerating voltage should also be specified to aid in interpretation of the image. Typically for high-resolution images one will use the lowest probe current and smallest aperture that give a good signal-to-noise ratio, so this information is often omitted from the filename. | + | |
- | + | ||
- | ===== Optical | + | |
If you've calibrated your microscope against a standard of some sort, please add an overlay with the objective name and a scale bar to your images. (Contact azonenberg if you'd like the GIMP files for our standard overlay, which you can modify for your setup.) | If you've calibrated your microscope against a standard of some sort, please add an overlay with the objective name and a scale bar to your images. (Contact azonenberg if you'd like the GIMP files for our standard overlay, which you can modify for your setup.) | ||
- | Abbreviated names for different microscope configurations | ||
- | |||
- | * bf: Brightfield optical | ||
- | * bse: Backscatter electron | ||
- | * df: Darkfield optical | ||
- | * dic: Differential interference contrast | ||
- | * se: Secondary electron | ||
- | * xpol: Crossed polarizers | ||
- | ====== Objective | + | ==== Objective ==== |
Please add new objectives to this list as necessary. | Please add new objectives to this list as necessary. | ||
Line 70: | Line 83: | ||
* mit50xn: Mitutoyo M Plan Apo 50x Near UV | * mit50xn: Mitutoyo M Plan Apo 50x Near UV | ||
* mit100x: Mitutoyo M Plan Apo 100x | * mit100x: Mitutoyo M Plan Apo 100x | ||
+ | * nikon20x: Nikon M Plan 20x ELWD | ||
* neo5x: Olympus Neo 5x | * neo5x: Olympus Neo 5x | ||
* nd5x: Olympus Neo DPlan 5x | * nd5x: Olympus Neo DPlan 5x | ||
* ns50x: Olympus Neo SPlan 50x | * ns50x: Olympus Neo SPlan 50x | ||
* ns50xu: Olympus Neo SPlan 50x ultra-long working distance (ULWD) | * ns50xu: Olympus Neo SPlan 50x ultra-long working distance (ULWD) | ||
+ | * ms20x: Olympus MSPlan 20x | ||
* sz or zoom: Zoom microscope, generally no scale bar provided because magnification varies (unless that particular zoom setting was calibrated during the same imaging session) | * sz or zoom: Zoom microscope, generally no scale bar provided because magnification varies (unless that particular zoom setting was calibrated during the same imaging session) | ||
- | |||
- | Scales | ||
- | |||
- | ^ Scope ^ Objective | ||
- | | pr0nscope | ||
- | | pr0nscope | ||
- | | pr0nscope | ||
- | | pr0nscope | ||
- | | pr0nscope | ||
- | | pr0nscope | ||
- | | pr0nscope | ||
- | | pr0nscope | ||
See also | See also | ||
* http:// | * http:// | ||
* http:// | * http:// | ||
+ | |||
+ | |||
+ | ===== SEM ===== | ||
+ | |||
+ | azonenberg' | ||
+ | |||
+ | " | ||
+ | |||
+ | Magnification should be abbreviated if a multiple of 1000, otherwise written out in full (ex: 3900x, 4kx). | ||
+ | |||
+ | Working distance and accelerating voltage should also be specified to aid in interpretation of the image. Typically for high-resolution images one will use the lowest probe current and smallest aperture that give a good signal-to-noise ratio, so this information is often omitted from the filename. | ||