• 1 μm (6“ wafer, 2-3 metal)
• 800 nm (6” wafer, 2-3 metal)
• 500 nm (6“ wafer, 2-3 metal)
• 220 nm (6-metal)
• GaAs
• ECL
• SOI on “650 to 250 nm”

http://www.militaryaerospace.com/articles/print/volume-9/issue-12/departments/cots-watch/nsa-seeking-new-business-for-in-house-cmos-wafer-fab.html