{{tag>collection_az vendor_honeywell year_1995 type_sensor type_sensor/airflow type_mems tech_unknown foundry_unknown}}

Honeywell AWM2100V mass airflow sensor ([[http://sensing.honeywell.com/product%20page?pr_id=25698]])

Guessing the 9503 is a date code so tagging it as such.

Blog posts:
  * [[http://siliconexposed.blogspot.com/2012/07/mems-pressure-sensor-teardown-part-2.html]]
  * [[http://siliconexposed.blogspot.com/2012/07/mems-pressure-sensor-teardown.html]]

====== Package ======

{{:azonenberg:honeywell:s7302834.jpg?600|}}

{{:azonenberg:honeywell:s7302837.jpg?600|}}


====== Board ======

Ceramic, looks like Al2O3. Two layers of metalization plus thick-film resistors. Blue dielectric may be glass or polymer, not sure which yet.

{{:azonenberg:honeywell:s7302830_sm.jpg?600|}}

====== Die ======

One layer of polysilicon resistor plus one layer of gold metalization. 

Die is <100> oriented as can be seen by the KOH (or similar) etch used to define the cavity under the membrane.

{{:azonenberg:honeywell:pressure_sensor_neo10x_sm_annotated.jpg?600|}}